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GB/T 16594: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 16594-2008 | English | 419 |
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General rules for measurement of length in micron scale by SEM
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GB/T 16594-2008
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| GB/T 16594-1996 | English | 239 |
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Micron grade lenght measurement by SEM
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GB/T 16594-1996
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PDF similar to GB/T 16594-2008
Basic data
| Standard ID | GB/T 16594-2008 (GB/T16594-2008) |
| Description (Translated English) | General rules for measurement of length in micron scale by SEM |
| Sector / Industry | National Standard (Recommended) |
| Classification of Chinese Standard | N53 |
| Classification of International Standard | 71.040.99 |
| Word Count Estimation | 18,145 |
| Date of Issue | 2008-09-18 |
| Date of Implementation | 2009-05-01 |
| Older Standard (superseded by this standard) | GB/T 16594-1996 |
| Quoted Standard | JJF 1001-1998; JJF 550-1998; JJF 1059-1999; BIPM IEC IFCC ISO IUPAP OIML-1993 |
| Regulation (derived from) | Announcements of national standards in 2008 No. 16 (No. 129 overall) |
| Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China |
| Summary | This standard specifies the SEM measurement micron length of general principles. Suitable for measuring (0. 5-10) ��m in length. |
GB/T 16594-2008: General rules for measurement of length in micron scale by SEM
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
General rules for measurement of length in micron scale by SEM
ICS 71.040.99
N53
National Standards of People's Republic of China
Replacing GB/T 16594-1996
SEM measurement micron length General
Posted 2008-09-18
2009-05-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard replaces GB/T 16594-1996 "SEM measurement micron length."
This standard and GB/T 16594-1996 compared to the main changes are as follows.
--- The "measuring method" to "measurement Law";
--- The "Error Analysis" to "Uncertainty Assessment";
--- Increased uncertainty generated by the sample deformation evaluation;
--- Use experimental methods aimed at obtaining image measurement uncertainty values;
--- Increase "Adjusting the measured length direction" Appendix.
Appendix A of this standard is a normative appendix, Appendix B ~ Appendix D is an informative annex.
This standard by the National Standardization Technical Committee microbeam analysis made.
This standard by the National Standardization Technical Committee microbeam analysis.
Drafting of this standard. Shanghai ingot Energy Technology Co., Ltd., Shanghai Polytechnic University, Shanghai Institute of Measurement and Testing Technology, with
Tongji University, China Shipbuilding Industry Corporation No. 725 Institute.
The main drafters of this standard. Xun Zhang Biao, Lu Desheng, Deng Baoqing, Ding Zhen Min, Liu Yue, Gao Hua, according to Xu.
This standard replaces the standards previously issued as follows.
--- GB/T 16594-1996.
SEM measurement micron length General
1 Scope
This standard specifies the measuring SEM micron length of general principles. For measuring (0.5 ~ 10) μm in length.
2 Normative references
The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent
Amendments (not including errata content) or revisions do not apply this standard, however, encourage the parties to reach an agreement on this standard is
Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard.
JJF1001-1998 common measurement terms and definitions
JJG550-1988 scanning electron microscope national verification procedures
JJF1059-1999 Evaluation and Expression of Uncertainty in Measurement
BIPMIEC IFCCISO IUPACIUPAPOIML-1993 Guide to the Expression of Uncertainty in Measurement (GuidetotheEx-
pressionofUncertaintyinMeasurement)
3 Terms and definitions, symbols, abbreviations
3.1 Terms and Definitions
JJF1001-1998 determined and the following terms and definitions apply to this standard.
3.1.1
Value is sufficiently stable, precisely calibrated to obtain the measured value and its uncertainty, issued by the approval authority exists objectively
length.
3.1.2
Obtain its objective existence length measured by value and uncertainty of measurement.
3.1.3
Measured the length of the carrier substance.
3.1.4
SEM magnification display itself.
3.1.5
When measuring the enlarged image, aiming uncertainty of the measured length of the marker is present.
3.1.6
Since the deformation of the material, resulting in the measured length value changes, bringing uncertainty component of measurement results.
3.1.7
Given the magnitude of reference material.
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