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www.ChineseStandard.net Database: 189760 (1 Nov 2025)

YS/T 1740-2025 English PDF

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YS/T 1740-2025EnglishRFQ ASK 3 days [Need to translate] Evaluation method for chemical vapor deposition of electronic grade trichlorosilane Valid YS/T 1740-2025

Basic data

Standard ID YS/T 1740-2025 (YS/T1740-2025)
Description (Translated English) Evaluation method for chemical vapor deposition of electronic grade trichlorosilane
Sector / Industry Nonferrous Metallurgy Industry Standard (Recommended)
Classification of Chinese Standard H17
Classification of International Standard 77.04
Date of Issue 2025-04-10
Date of Implementation 2025-11-01
Issuing agency(ies) Ministry of Industry and Information Technology
Summary This standard specifies a procedure for preparing evaluation samples of electronic-grade trichlorosilane using chemical vapor deposition (CVD), and characterizing the quality of electronic-grade trichlorosilane by testing the conductivity type, resistivity, carbon content, and donor and acceptor impurity content of the evaluation samples. This document applies to the quality evaluation of electronic-grade trichlorosilane used in polycrystalline silicon production and silicon epitaxy.

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