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JJF 1427-2013 English PDF

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JJF 1427-2013: Calibration Specification for MEMS Linear Accelerometers
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Basic data

Standard ID JJF 1427-2013 (JJF1427-2013)
Description (Translated English) Calibration Specification for MEMS Linear Accelerometers
Sector / Industry Metrology & Measurement Industry Standard
Classification of Chinese Standard A57
Classification of International Standard 17.080
Word Count Estimation 27,231
Quoted Standard JJF 1116-2004; GJB 1037A-2004; GB/T 20485.21-2007; IEC 60747 PART14-4
Regulation (derived from) AQSIQ Announcement No. 122, 2013;
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine
Summary This standard specifies: micro-electromechanical (MEMS) accelerometers line (hereinafter referred to as MEMS linear accelerometer or accelerometers) Calibration projects and calibration methods, suitable for single line sensitive axis MEMS accelerometer.

JJF 1427-2013: Calibration Specification for MEMS Linear Accelerometers

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Calibration Specification for MEMS Linear Accelerometers People's Republic of China National Metrology Technical Specifications Microelectromechanical (MEMS) accelerometer calibration line specification Issued on. 2013-09-02 2013-12-02 implementation The State Administration of Quality Supervision, Inspection and Quarantine released Microelectromechanical (MEMS) accelerometer line Calibration Specification NFP. National Technical Committees Inertial Measurement Technology Drafted by. China Electronics Technology Group Corporation 13th Research Institute of Science and Technology Beijing Great Wall Institute of Measurement and Testing Technology AVIC This specification Inertial Technology commissioned the National Technical Committee responsible for the interpretation of measurement The main drafters of this specification. Yang Yongjun (China Electronics Technology Group Corporation 13th Research Institute) Dong Xueming (Beijing Great Wall Institute of Measurement and Testing Technology AVIC) Xushu Jing (China Electronics Technology Group Corporation 13th Research Institute) Drafters participate. Ho Yi only (Beijing Great Wall Institute of Measurement and Testing Technology AVIC) Stingy Haifeng (China Electronics Technology Group Corporation 13th Research Institute) Tianyang (Beijing Great Wall Institute of Measurement and Testing Technology AVIC)

table of Contents

Introduction (Ⅱ) 1 Scope (1) 2. References (1) 3 Terms and definitions (1) 4 Overview (1) 5 Metrological characteristics (2) 6 calibration conditions (3) 6.1 Calibration environmental conditions (3) 6.2 standards and measuring equipment (3) 7 calibration items and calibration methods (4) 7.1 calibration items (4) 7.2 Calibration method (5) 8 calibration results expression (14) 9 Recalibration interval (14) Appendix A MEMS linear accelerometer calibration uncertainty assessment of the gravity field sample (15) Appendix B Calibration Certificate-page format (21)

Introduction

Micro-electromechanical (MEMS) linear accelerometers are widely used in various fields of national economy, based on this consideration, combined with computer Electric (MEMS) accelerometer calibration line of the actual situation, the reference to the International Electrotechnical Commission IEC (INTERNATIONAL ELECTROTECHNICALCOMMISSION) 60747-14-4Ed.1 written/CDVIEC Semiconductor Accelerometer (SEMICONDUCTORDEVICES-Part 14-4. Semiconductoraccelerometers) Preparation of this specification. Microelectromechanical (MEMS) accelerometer calibration line specification

1 Scope

This specification defines the micro-electromechanical (MEMS) linear accelerometer (hereinafter referred to as MEMS linear accelerometer or acceleration Meter) calibration program and calibration methods for single sensitive axis MEMS linear accelerometer. 2. References This specification refers to the following documents. JJF 1116-2004 linear accelerometer calibration precision centrifuge specifications GJB1037A-2004 single-axis accelerometer tilting servo line test method GB/T 20485.21-2007 vibration and shock sensor calibration method Part 21. Vibration Comparative Law calibration IEC 60747Part 14-4 semiconductor accelerometer (14-4. Semiconductoraccelerometers) For dated references, only the dated edition applies to this specification; undated reference documents Member, the latest edition (including any amendments) applies to this specification.

3 Terms and definitions

3.1 micro-electromechanical MicroElectroMechanicalSystem, MEMS The use of semiconductor technology systems with integrated sensors, actuators, and/or circuits. 3.2 MEMS linear accelerometer MEMSlinearaccelerometers Using the MEMS fabrication processing for converting the input line is proportional to the acceleration converted to an output (usually The quantity of electricity) sensors. 3.3 sensitive quality proofmass Line accelerometers along or around the axis of the acceleration input is converted to torque (or force) the effective mass.

4 Overview

MEMS linear accelerometer sensitive by the general quality, flexible support and switching circuits, and the like; works of Min A certain sense of mass displacement in the inertia force generated by the external acceleration, the displacement associated with the input acceleration, which Physical model by equation (1) can be simplified. Md 2x dt2 D dx dt Kx C = -Ma (1) Where. M --- sensitive quality, kg; The D --- damping provided by the surrounding gas, N · s/m; K --- spring rate, N/m;

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