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GB/T 25497-2010: Test methods for gas absorbency and release of getters
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| GB/T 25497-2010 | English | 369 |
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Test methods for gas absorbency and release of getters
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GB/T 25497-2010
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Basic data | Standard ID | GB/T 25497-2010 (GB/T25497-2010) | | Description (Translated English) | Test methods for gas absorbency and release of getters | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | L90 | | Classification of International Standard | 31-030 | | Word Count Estimation | 16,186 | | Date of Issue | 2010-12-01 | | Date of Implementation | 2011-05-01 | | Older Standard (superseded by this standard) | GB/T 6626.3-1986; GB/T 9506.4-1988; GB/T 9506.5-1988; GB/T 9506.7-1988; GB/T 9506.8-1988 | | Quoted Standard | GB/T 4314 | | Regulation (derived from) | Announcement of Newly Approved National Standards No. 9, 2010 (No. 164 overall) | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the getter gas emission testing methods, interpretation of nitrogen doped getter getter dynamic curve of the test method, released mercury getter deflated suction curve test method, constant pressure method suction performance test methods constant volume method suction performance test methods getter gas absorption and desorption performance testing methods. This standard applies to devices with vacuum getter. | GB/T 25497-2010: Test methods for gas absorbency and release of getters---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Test methods for gas absorbency and release of getters
ICS 31-030
L90
National Standards of People's Republic of China
Replacing GB/T 6626.3-1986, GB/T 9506.4-1988, GB/T 9506.5-1988, GB/T 9506.7-1988,
GB/T 9506.8-1988
Getter gas absorption and desorption performance test methods
Issued on. 2010-12-01
2011-05-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard is the integration of the following criteria after revising.
--- GB/T 6626.3-1986 "mercury releasing getter performance test method mercury releasing getter method for gas discharge test";
--- GB/T 9506.4-1988 "getter outgas test methods";
--- GB/T 9506.5-1988 "release nitrogen doped getter getter dynamic curve test method";
--- GB/T 9506.7-1988 "barium evaporable getter getter performance testing methods";
--- GB/T 9506.8-1988 "non-evaporable getter getter performance test methods."
This standard compared with the original standard main changes are as follows.
--- Delete the definition of the term, add references GB/T 4314 "getter term" normative;
--- The test method evaporable and NEG performance combined constant pressure method of suction performance test method, measuring the corresponding amendments
Test equipment requirements. Such as discharge rate constant pressure leak test method molecular flow state when the suction performance of the system requirements for the uniform
1 × 10-7Pa · L/s, to meet in the testing accuracy requirements of the premise, according to the characteristic sorption capacity is calculated inspiratory capacity
Getter can be relaxed;
--- The constant pressure method gas purity requirements for non-evaporable getter increase from 99.8% to 99.99%;
Time --- the constant pressure method testing evaporable getter suction performance, measured by the non-absorbable gas pressure extended to 15min
25min;
--- Cancellation mercury releasing getter heating temperature curve, instead of inside 30s heated to 900 °;
6626.1-1986 "Test Method for mercury releasing getter performance test method mercury releasing getter mercury release characteristics" --- removing GB Appendix
A mercury glass cleaning system on the part;
--- Cancellation mercury releasing getter and a non-evaporable getter discharge gas volume calculation of correction coefficient;
--- Cancellation than gassing calculation;
--- The NEG outgas test from steam press for changes to barium (calcium) divided by the amount of use of the area by a partition;
--- Cancel GB/T 9506.4-1988 B getter test system recommended volume "getter outgas test methods" in the Appendix;
--- Cancel GB/T 9506.5-1988 "release nitrogen doped getter getter dynamic curve test methods" requirements for evapotranspiration coil;
--- Increasing the mercury releasing getter deflated suck back dynamic curve test method;
--- Increase the suction performance constant volume method test methods;
--- Each temperature increase in mercury saturated vapor pressure;
--- According to GB/T 1.1-2000 requirements were revised format.
This standard replaces the following criteria.
--- GB/T 6626.3-1986 "mercury releasing getter performance test method mercury releasing getter method for gas discharge test";
--- GB/T 9506.4-1988 "getter outgas test methods";
--- GB/T 9506.5-1988 "release nitrogen doped getter getter dynamic curve test method";
--- GB/T 9506.7-1988 "barium evaporable getter getter performance testing methods";
--- GB/T 9506.8-1988 "non-evaporable getter getter performance test methods."
The Standard Appendix A, Appendix B, Appendix C is a normative appendix.
This standard by the National Standardization Technical Committee of semiconductor equipment and materials and focal points.
This standard was drafted. Nanjing SAES Huadong Vacuum Material Co., Ltd., the Ministry of Information Industry and the Institute of Electronics Industry Standardization, China
Electronics Technology Group Corporation 12th Research Institute.
The main drafters of this standard. Letter Xue Ying, Guo Weibin, ZHANG Ju first, Liu Yun.
This standard replaces the standards previously issued as follows.
--- GB/T 6626.3-1986;
--- GB/T 9506.4-1988;
--- GB/T 9506.5-1988;
--- GB/T 9506.7-1988;
--- GB/T 9506.8-1988.
Getter gas absorption and desorption performance test methods
1 Scope
This standard specifies the test method of getter gassing test method release nitrogen doped getter getter dynamic curve, the mercury releasing getter discharge
Gas suction curve test method, getter constant pressure method gas suction performance test method, the suction performance test methods and other constant volume method of absorbing and releasing performance measurement
Test methods.
This standard applies to devices with a vacuum getter.
2 Normative references
The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent
Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research
Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard.
GB/T 4314 getter term
3 Terms
GB/T 4314 as determined by the terms and definitions apply to this standard.
4 getter outgas test
4.1 Principle
This method uses the "constant volume method." Namely the use of measurement at a constant temperature in a predetermined time interval, the amount of change in a pressure vessel of known volume
Determined outgas.
4.2 Test equipment and conditions
Test apparatus as shown in Figure 1.
1 --- before the pump;
2 --- three-way vacuum valve;
3 --- high vacuum pump;
4 --- off valve;
5 --- bleed valve;
6 --- A high vacuum gauge;
7 --- cold trap (optional);
8 --- off valve;
. 9 --- measuring outgas vacuum gauges;
10 --- static expansion vessel;
. 11 --- thermocouple wire;
12 --- high-frequency induction coil;
13 --- getter sample;
14 --- sample chamber.
Figure 1 getter outgas test system
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