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JJG 508-2004 English PDF

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JJG 508-2004: Verification Regulation of Resistivity Measuring Instruments with Four-Probe Array Method
Status: Valid

JJG 508: Evolution and historical versions

Standard IDContents [version]USDSTEP2[PDF] delivered inStandard Title (Description)StatusPDF
JJG 508-2004English519 Add to Cart 4 days [Need to translate] Verification Regulation of Resistivity Measuring Instruments with Four-Probe Array Method Valid JJG 508-2004
JJG 508-1987English479 Add to Cart 4 days [Need to translate] Verification Regulation of Resistivity Measuring Instruments with Four-Prope Array Method Obsolete JJG 508-1987

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Basic data

Standard ID JJG 508-2004 (JJG508-2004)
Description (Translated English) Verification Regulation of Resistivity Measuring Instruments with Four-Probe Array Method
Sector / Industry Metrology & Measurement Industry Standard
Classification of Chinese Standard A56
Classification of International Standard 17.220
Word Count Estimation 20,295
Date of Issue 2004-09-21
Date of Implementation 2005-03-01
Older Standard (superseded by this standard) JJG 508-1987
Quoted Standard 2004 technical regulations issued by national metrology (industrial measurement 2005 Volume 15, Issue 1)
Regulation (derived from) 2004 technical regulations issued by national metrology (industrial measurement 2005 Volume 15, Issue 1)
Issuing agency(ies) State Administration of Quality Supervision, Inspection and Quarantine
Summary This standard applies to the touch, measuring range 10 ^ (-3) ��/cm ~ 10 ^ 3��/cm the four-probe resistivity tester initial verification, testing and use of follow-up inspection. Some versatile four-probe resistivity tester or can only measure the sheet resistance of the four-probe tester also applicable. Sheet resistance measurement range of 10 ^ (-2) ��/cm ~ 10 ^ 4��/cm. This procedure does not apply to two probes, three probes, six probes and a square four-probe resistivity tester checks.

JJG 508-2004: Verification Regulation of Resistivity Measuring Instruments with Four-Probe Array Method


---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Verification Regulation of Resistivity Measuring Instruments with Four-Probe Array Method National Metrology Verification Regulations of the People's Republic Four probe resistivity tester Released on.2004-09-21 2005-03-21 implementation The General Administration of Quality Supervision, Inspection and Quarantine issued Four-probe resistivity tester verification procedure Four-ProbeArray Method Replace JJG 508-1987 This regulation was approved by the General Administration of Quality Supervision, Inspection and Quarantine on September 21,.2004, and It will take effect on March 21,.2005. Focal Point. National Radio Measurement Technology Committee Main drafting unit. China Institute of Metrology Participated in the drafting unit. Guangzhou Institute of Semiconductor Materials This procedure entrusts the National Radiometric Technical Committee to explain The main drafters of this procedure. Lu Xiaoming (China Institute of Metrology) Participate in the drafters. Xie Hongbo (Guangzhou Institute of Semiconductor Materials)

table of Contents

1 Scope (1) 2 Overview (1) 3 Metrological performance requirements (1) 3.1 Requirements for the technical index of the resistivity tester (1) 3.2 Measurement of insulation resistance and test of insulation strength (2) 4 General technical requirements (3) 4.1 Appearance of Resistivity Tester (3) 4.2 Check of the normality of the resistivity tester (3) 5 measuring instrument control (3) 5.1 Verification conditions (3) 5.2 Verification project (5) 5.3 Verification method (5) 5.4 Processing of verification results (8) 5.5 Verification cycle (8) Appendix A Probe Indentation Verification Record and Calculation Method (9) Appendix B Verification of the recording format of the resistivity tester using the resistivity standard sample method (10) Appendix C Checking the Correction Coefficient Table of Resistivity Tester with Standard Samples (11) Appendix D Sub-component verification Four-probe resistivity tester verification results processing (12) Appendix E Four-Probe Resistivity Tester Verification Certificate and Verification Result Notice Page Format (14) Four-probe resistivity tester verification procedure

1 Scope

This procedure is applicable to four-probe resistivity testers with a contact range of 10-3 Ω·cm to 103 Ω·cm. First verification, subsequent verification and in-use inspection. For some versatile four-probe resistivity testers or only for measurement Block resistance four probe testers are also suitable. The sheet resistance is measured from 10-2 Ω/□ to 104 Ω/□. This procedure does not apply to the verification of two-probe, three-probe, six-probe and square four-probe resistivity testers.

2 Overview

The four-probe resistivity tester (hereinafter referred to as the resistivity tester) is used to measure semiconductor materials and process silicon. The resistivity of the sheet, or the diffusion layer and the epitaxial layer, and the measuring instrument for the sheet resistance of the insulating substrate coating layer. It is mainly The electrical part and the probe are composed of parts. The automatic tester also includes a computer and an interface, etc., and the electrical part is generally Including adjustable steady current source, A/D converter, digital display, reversing switch and other instruments and components. Probe part general package The probe fixture, the probe and the sample stage are shown in Fig. 1 and Fig. 2. Figure 1 Schematic diagram of the standard sample test resistivity tester K1-commutation switch; RN-standard resistance; D-probe wiring; K2-no thermoelectric potential switch; RX-tested standard sample Figure 2 Block diagram of the standard sample test resistivity tester

3 Metrological performance requirements

3.1 Requirements for technical indicators of resistivity tester 3.1.1 The technical specifications of various types of resistivity testers shall comply with the requirements of the factory technical specifications. Level I, The technical specifications of the Class II resistivity tester shall comply with the ministerial standards of SJ/T 10314-92 and SJ/T 10315-92.

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