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GB/T 34899-2017: Micro-electromechanical system technology -- Measuring method of microstructure surface stress based on Raman spectroscopy
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Micro-electromechanical system technology -- Measuring method of microstructure surface stress based on Raman spectroscopy
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GB/T 34899-2017
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Basic data | Standard ID | GB/T 34899-2017 (GB/T34899-2017) | | Description (Translated English) | Micro-electromechanical system technology -- Measuring method of microstructure surface stress based on Raman spectroscopy | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | L55 | | Classification of International Standard | 31.200 | | Word Count Estimation | 15,150 | | Date of Issue | 2017-11-01 | | Date of Implementation | 2018-05-01 | | Regulation (derived from) | National Standard Announcement 2017 No. 29 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | GB/T 34899-2017: Micro-electromechanical system technology -- Measuring method of microstructure surface stress based on Raman spectroscopy
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Micro-electromechanical system technology-Measuring method of microstructure surface stress based on Raman spectroscopy
ICS 31.200
L55
National Standards of People's Republic of China
Microelectromechanical system (MEMS) technology
Microstructure based on Raman spectroscopy
Surface stress test method
Posted.2017-11-01
2018-05-01 implementation
General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
China National Standardization Administration released
Directory
Preface Ⅰ
1 Scope 1
2 Normative references 1
3 Terms and definitions 1
4 stress test principle 1
5 test conditions 2
5.1 General 2
5.2 Sample Requirements 2
5.3 Calibration Requirements 2
5.4 Environmental conditions 2
5.5 Test System 2
6 test procedures 4
6.1 Calibration Raman spectrometer 4
6.2 Test System Error 4
6.3 Select the test area 4
6.4 Test Procedure 4
6.5 Test Records 6
6.6 Determination of Raman shift 6
6.7 Stress Calculation 6
Appendix A (Informative) Cubic stress and Raman shift between the conversion relationship 7
Appendix B (informative) relative dynamic stress test system example 8
Appendix C (informative) Microstructure surface stress Raman spectroscopy test Example 10
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This standard by the National Microelectromechanical Technology Standardization Technical Committee (SAC/TC336) and focal point.
The main drafting units of this standard. North Central University, China Machine Productivity Promotion Center.
The main drafters of this standard. Shi Yunbo, Tang Jun, Cheng Hongbing, Cui Jiangong, Li Haibin, Zhu Yue.
Microelectromechanical system (MEMS) technology
Microstructure based on Raman spectroscopy
Surface stress test method
1 Scope
This standard specifies the Raman spectroscopy to determine the surface residual stress, relative static stress, relative dynamics
Method of stress.
This standard applies to micro-electromechanical systems (MEMS) structure surface residual stress, relative static stress, relative dynamic stress Raman spectrum
Law test.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version applies to this article
Pieces. For undated references, the latest edition (including all amendments) applies to this document.
GB/T 2421.1 Electrical and Electronic Products Environmental Testing Overview and Guidelines
GB/T 25915.1 cleanroom and related controlled environment Part 1. air cleanliness level
GB/T 26111 Microelectromechanical System (MEMS) technology terminology
JJF1544-2015 Raman spectrometer calibration specifications Measurement characteristics and calibration requirements
3 Terms and definitions
GB/T 26111 and JJF1544-2015 defined and the following terms and definitions apply to this document.
3.1
Wavenumber wavenumber
The reciprocal of the wavelength, which is the number of wavelengths contained per centimeter.
Note. The unit is per centimeter (cm-1).
4 stress test principle
Raman spectroscopy stress test is based on the Raman scattering Raman shift to calculate the surface stress of the material method.
Under the action of stress, the crystal lattice will deform, which will scatter the incident light and lead to the Raman frequency shift. according to
The size of the Raman shift can calculate the stress value. The relationship between the structural surface stress and the Raman shift is linear, as shown in Eq. (1).
σ =
Δω
(1)
In the formula.
σ --- surface stress, in megapascals (MPa);
α --- stress factor in units of megapascals per centimeter (cm-1 · MPa-1);
Δω --- Raman frequency shift, in units of centimeters (cm-1).
See Appendix A for the conversion relationship between cubic stress and Raman shift.
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