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GB/T 34893-2017 English PDF

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GB/T 34893-2017: Micro-electromechanical system technology -- Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer
Status: Valid

Standard ID	Contents [version]	USD	STEP2	[PDF] delivered in	Standard Title (Description)	Status	PDF
GB/T 34893-2017	English	219	Add to Cart	3 days [Need to translate]	Micro-electromechanical system technology -- Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer	Valid	GB/T 34893-2017

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Basic data

Standard ID	GB/T 34893-2017 (GB/T34893-2017)
Description (Translated English)	Micro-electromechanical system technology -- Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer
Sector / Industry	National Standard (Recommended)
Classification of Chinese Standard	L55
Classification of International Standard	31.200
Word Count Estimation	11,153
Date of Issue	2017-11-01
Date of Implementation	2018-05-01
Regulation (derived from)	National Standard Announcement 2017 No. 29
Issuing agency(ies)	General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China

GB/T 34893-2017: Micro-electromechanical system technology -- Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Micro-electromechanical system technology-Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer ICS 31.200 L55 National Standards of People's Republic of China Microelectromechanical system (MEMS) technology MEMS microstructure based on optical interference In-plane length measurement method Posted.2017-11-01 2018-05-01 implementation General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China China National Standardization Administration released Directory Preface Ⅰ 1 Scope 1 2 Normative references 1 3 Terms and definitions 1 4 measurement method 1 5 main factors affecting the measurement uncertainty 4 Appendix A (informative) Optical interference microscope typical form and main technical features 5

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. This standard by the National Microelectromechanical Technology Standardization Technical Committee (SAC/TC336) and focal point. The main drafting units of this standard. Tianjin University, Machine Productivity Promotion Center, the National Instrument Components Quality Supervision and Inspection Center, South Beijing Institute of Technology China Electronics Technology Group Corporation thirteenth Institute. The main drafters of this standard. Hu Xiaodong, Guo Tong, Yu Zhenyi, Li Haibin, Cheng Hongbing, Qiu Anping, Cui Bo, Zhu Yue. Microelectromechanical system (MEMS) technology MEMS microstructure based on optical interference In-plane length measurement method

1 Scope

This standard specifies the method based on optical interference microscopy to obtain the surface morphology of MEMS micro-structures for in-plane length measurement. This standard applies to the surface reflectance of not less than 4%, the aspect ratio of not less than 1.10, and the use of optical interference microscope can obtain topography MEMS microstructure.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version applies to this article Pieces. For undated references, the latest edition (including all amendments) applies to this document. GB/T 3505 Geometrical product specifications (GPS) Surface texture contouring Terms, definitions, and surface texture parameters GB/T 26111 Microelectromechanical System (MEMS) technology terminology General principles of microgeometry assessment of microelectromechanical systems (MEMS) GB/T 26113

3 Terms and definitions

GB/T 3505 and GB/T 26111 and define the following terms and definitions apply to this document. 3.1 Surface topography Macroscopic and microscopic geometric properties of surface structures. Note. Generally includes the surface geometry, surface waviness, surface roughness and surface defects. 3.2 In-plane length Two points on the surface that have edge structure features, the distance between a point and a line or two lines.

4 measurement method

4.1 General 4.1.1 The implementation of in-plane length measurement premise is that the MEMS structure has a stepped edge structure between the two edge structures (End 1 and End 2) The distance is the in-plane length of the microstructure measured, as shown in Figure 1.

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