|
US$229.00 ยท In stock
Delivery: <= 3 days. True-PDF full-copy in English will be manually translated and delivered via email.
GB/T 21287-2021: Electronic specialty gas - Nitrogen trifluoride
Status: Valid GB/T 21287: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 21287-2021 | English | 229 |
Add to Cart
|
3 days [Need to translate]
|
Electronic specialty gas - Nitrogen trifluoride
| Valid |
GB/T 21287-2021
|
| GB/T 21287-2007 | English | 719 |
Add to Cart
|
3 days [Need to translate]
|
Gases for electronic industry -- Nitrogen trifluoride
| Obsolete |
GB/T 21287-2007
|
PDF similar to GB/T 21287-2021
Basic data | Standard ID | GB/T 21287-2021 (GB/T21287-2021) | | Description (Translated English) | Electronic specialty gas - Nitrogen trifluoride | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Word Count Estimation | 12,150 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 21287-2021: Electronic specialty gas - Nitrogen trifluoride---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Electronic specialty gas - Nitrogen trifluoride
ICS 71.100.20
CCSG86
National Standards of People's Republic of China
Replace GB/T 21287-2007
Electronic special gas nitrogen trifluoride
Released on 2021-10-11
2022-05-01 implementation
State Administration for Market Regulation
Issued by the National Standardization Management Committee
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1.Structure and Drafting Rules of Standardization Documents"
Drafting.
This document replaces GB/T 21287-2007 "Gas Nitrogen Trifluoride for the Electronic Industry". Compared with GB/T 21287-2007, this document is
In addition to structural adjustments and editorial changes, the main technical changes are as follows.
---Changed the technical requirements that nitrogen trifluoride should meet (see Chapter 4, Chapter 3 of the.2007 edition);
--- The requirements for sampling, determination and re-inspection have been changed (see 5.1, 4.1 in the.2007 edition);
---The sampling requirements are changed (see 5.2, 4.1.6 of the.2007 edition);
---Added the requirements for exhaust gas treatment (see 5.3);
---Added the general provisions of the test method (see 6.1);
---Changed the purity calculation method (see 6.2, 4.2 of the.2007 edition);
---Changed the determination method of oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, carbon tetrafluoride, nitrous oxide, sulfur hexafluoride content (see
6.3, 4.3 and 4.4 of the.2007 edition);
---The method for determining moisture content has been changed (see 6.4, 4.6 of the.2007 edition);
---The determination method of hydrolyzable fluoride has been changed (see 6.5, 4.5 in.2007 edition);
--- Changed the logo, packaging, transportation and storage (see Chapter 7, Chapter 5 of the.2007 edition);
--- Changed the safety information (see 7.3, Appendix D of the.2007 edition).
Please note that some of the contents of this document may involve patents. The issuing agency of this document is not responsible for identifying patents.
This document was proposed and managed by the National Semiconductor Equipment and Material Standardization Technical Committee (SAC/TC203).
Drafting organizations of this document. Haohua Gas Co., Ltd., China Shipbuilding Industry Corporation (Handan) Perui Special Gas Co., Ltd., Southwest Chemical Research and Design
Institute Co., Ltd., Guangdong Huate Gas Co., Ltd., Tianjin Luling Gas Co., Ltd., Fujian Jiuce Gas Co., Ltd., Haining City
Yingdesai Electronics Co., Ltd., Jiangxi Huate Electronic Chemical Co., Ltd., Zhejiang Research Institute of Chemical Industry Co., Ltd., Haohua Gas Co., Ltd.
Southwest Branch, Suzhou Jinhong Gas Co., Ltd., Hangzhou Consumer Rights Protection Committee Secretariat (Hangzhou National Electronic Commerce Industry
Quality Monitoring and Disposal Center), Shanghai Shennan Special Gas Co., Ltd., Shanghai Huaai Chromatographic Analysis Technology Co., Ltd., Dalian Date Gas Co., Ltd.
Co., Ltd., Shanghai Fanwei Instrument Equipment Co., Ltd., Lianxiong Investment (Shanghai) Co., Ltd., Shenyang Zhongfu Kejin Pressure Vessel Co., Ltd., Zhejiang
Dongkai Semiconductor Technology Co., Ltd., Heli Gas (Shanghai) Co., Ltd., Kunming Guangruida Special Gas Co., Ltd., Southwest Chemical Research Institute
Research and Design Institute Co., Ltd. Wuhan Branch, Southwest Chemical Research and Design Institute Co., Ltd. Shuangliu Branch.
The main drafters of this document. Wang Juan, Fu Mengyue, Wang Shaobo, Meng Xiangjun, Fu Zhuhong, Chen Yanshan, Ma Jianxiu, He Jingyu, Cao Suying,
Song Fucai, Su Zijie, Ding Gaosong, Pei Youhong, Wei Jieguang, Shi Wanjun, Zhang Jianjun, Wang Xinxi, Sun Meng, Chu Chunli, Zhang Qiyan, Lu Bowen, Chen Jie,
Wu Liang, Fang Hua, Yi Junting, He Bo, Yang Kang, Huang Hui, Gong Bing, Wang Dawei, Yi Dawen, Li Yang, Liang Yongqiang, Liang Chengke, Gao Jing, Ma Changning,
Tang Xiamei, Li Guanghui, Zhou Pengyun, Huang Chao.
The previous releases of this document and the documents it replaced are as follows.
--- First published as GB/T 21287-2007 in.2007;
---This is the first revision.
Electronic special gas nitrogen trifluoride
1 Scope
This document specifies the technical requirements, inspection rules, test methods, signs, packaging, transportation and storage and safety information of electronic grade nitrogen trifluoride
Requirements.
This document is applicable to the preparation and purification of anhydrous hydrogen fluoride and liquid ammonia as raw materials, or the preparation and purification of trifluoride obtained from ammonium bifluoride as raw materials.
Nitrogen.
2 Normative references
The content of the following documents constitutes an indispensable clause of this document through normative references in the text. Among them, dated quotations
Only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to
This document.
GB 190 Dangerous Goods Packaging Mark
GB/T 601 Preparation of Standard Titration Solution for Chemical Reagents
Preparation of preparations and products used in GB/T 603 chemical reagent test method
GB/T 3723 General rules for the sampling safety of industrial chemical products
GB/T 5099 (all parts) seamless steel gas cylinders
GB/T 5832.3 Determination of trace moisture in gases Part 3.Cavity ring-down spectroscopy
GB/T 6682 Analytical laboratory water specifications and test methods
GB/T 7144 Gas cylinder color mark
GB/T 14193 Liquefied Gas Cylinder Filling Regulations
GB 15258 Regulations for the preparation of chemical safety labels
GB/T 16804 Gas cylinder warning label
GB/T 28726 Gas Analysis Helium Ionization Gas Chromatography
GB/T 33145 Large-volume steel seamless gas cylinder
TSGR0005 Safety Technical Supervision Regulations for Mobile Pressure Vessels
TSG07 Licensing Rules for Special Equipment Production and Filling Units
TSG23 Gas Cylinder Safety Technical Regulations
3 Terms and definitions
There are no terms and definitions that need to be defined in this document.
4 Technical requirements
The technical requirements of nitrogen trifluoride should meet the requirements of Table 1.
|