| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | See Detail | Status | Related Standard |
| YS/T 839-2012 | English | 289 |
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Days<=3
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Test method for measurement of insulator thickness and refractive index on silicon substrates by ellipsometry
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YS/T 839-2012
| Valid |
YS/T 839-2012
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