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YS/T 1068-2015 English PDF

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YS/T 1068-2015: Ruthenium powder for ruthenium sputttering target
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PDF similar to YS/T 1068-2015


Standard similar to YS/T 1068-2015

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Basic data

Standard ID YS/T 1068-2015 (YS/T1068-2015)
Description (Translated English) Ruthenium powder for ruthenium sputttering target
Sector / Industry Nonferrous Metallurgy Industry Standard (Recommended)
Classification of Chinese Standard H68
Classification of International Standard 77.150.99
Word Count Estimation 6,615
Date of Issue 2015-04-30
Date of Implementation 2015-10-01
Quoted Standard GB/T 5162; GB/T 6524; GB/T 23275; HB 5220.3; HB 5220.49
Regulation (derived from) Ministry of Industry and Information Technology Announcement (2015 No. 28)
Issuing agency(ies) Ministry of Industry and Information Technology
Summary This Standard specifies the requirements for the hard disk and integrated circuit industries ruthenium sputtering target with ruthenium powder, test methods, inspection rules and signs, packaging, transportation, storage, quality certificate and contract (or purchase order) content. This Standard applies to the preparation of the hard drive and integrated circuit industries ruthenium sputtering target ruthenium powder (hereinafter referred to as ruthenium powder).

YS/T 1068-2015: Ruthenium powder for ruthenium sputttering target

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(Preparation of ruthenium target with ruthenium powder) ICS 77.150.99 H68 People's Republic of China Nonferrous Metals Industry Standard Preparation of ruthenium with ruthenium powder target Issued on. 2015-04-30 2015-10-01 implementation Ministry of Industry and Information Technology of the People's Republic of China released

Foreword

This standard was drafted in accordance with GB/T 1.1-2009 given rules. This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) and focal points. This standard was drafted. Your research Platinum Ltd., Technical and Economic Research Institute of Nonferrous Metals. Drafters of this standard. Tanzhi Long, Guojun Mei, OF SCIENTIFIC to Lei, Wang Zhuanjun, Bi Jun, Wen Ming, pipe Weiming, Chen Song, Zhu Wuxun. Preparation of ruthenium with ruthenium powder target

1 Scope

This standard specifies the requirements for the hard disk and integrated circuit industries ruthenium sputtering target with ruthenium powder, test methods, inspection rules and signs, packaging, Transportation, storage, quality certificate and contract (or purchase order) content. This standard applies to the preparation of the hard drive and integrated circuit industries ruthenium sputtering target ruthenium powder (hereinafter referred to as ruthenium powder).

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein Member. For undated references, the latest edition (including any amendments) applies to this document. Determination of GB/T 5162 metal powder tap density Gravity measurements GB/T 6524 metal powder particle size distribution sedimentation light transmission method GB/T 23275 ruthenium powder chemical analysis of lead, iron, nickel, aluminum, copper, silver, gold, platinum, iridium, palladium, rhodium, determination of silicon content glow Discharge Mass Spectrometry HB5220.3 high temperature alloys - Part 3. High-frequency induction combustion - infrared absorption method for determination of carbon content HB5220.49 high temperature alloys - Part 49. Pulse heating - infrared, thermal conductivity method for the determination of oxygen and nitrogen content

3 Requirements

3.1 Categories Press purity ruthenium powder is divided into four grades. SMP-Ru-99.95, SMP-Ru99.99, SMP-Ru-99.995, SMP-Ru99.99, SMP-Ru-99.999. 3.2 Chemical composition Ruthenium powder chemical composition shall comply with the requirements of Table 1. Ruthenium content of ruthenium powder is 100% minus the impurity element found in Table 1, more than the sum the amount. SMP-99.999 Grades total impurity element calculation does not include Si elements. Table 1 chemical composition of ruthenium powder% Grades SMP-99.95 SMP-99.99 SMP-99.995 SMP-99.999 Ruthenium content not less than 99.95 99.99 99.995 99.999 Metal impurities no greater than Ag 0.0004 0.0004 0.0002 0.00005 Al 0.005 0.001 0.0005 0.00005 Au 0.005 0.0005 0.0003 0.00005 Co 0.003 0.0005 0.0003 0.00005

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