YS/T 1068-2015 (YS/T1068-2015, YST 1068-2015, YST1068-2015)
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| YS/T 1068-2015 | English | 139 |
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Ruthenium powder for ruthenium sputttering target
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YS/T 1068-2015
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Standards related to: YS/T 1068-2015
| Standard ID | YS/T 1068-2015 (YS/T1068-2015) | | Description (Translated English) | Ruthenium powder for ruthenium sputtering tafget | | Sector / Industry | Nonferrous Metallurgy Industry Standard (Recommended) | | Classification of Chinese Standard | H68 | | Classification of International Standard | 77.150.99 | | Word Count Estimation | 6,695 | | Date of Issue | 2015-04-30 | | Date of Implementation | 2015-10-01 | | Quoted Standard | GB/T 5162; GB/T 6524; GB/T 23275; HB 5220.3; HB 5220.49 | | Drafting Organization | Your research Platinum Ltd.; Technical and Economic Research Institute of Nonferrous Metals | | Administrative Organization | National Non-Ferrous Metals Standardization Technical Committee (SAC/TC 243) | | Regulation (derived from) | Ministry of Industry and Information Technology Announcement (2015 No. 28) | | Proposing organization | National Non-Ferrous Metals Standardization Technical Committee (SAC/TC 243) | | Issuing agency(ies) | Ministry of Industry and Information Technology of the People's Republic of China | | Summary | This Standard specifies the requirements for the hard disk and integrated circuit industries ruthenium sputtering target with ruthenium powder, test methods, inspection rules and signs, packaging, transportation, storage, quality certificate and contract (or purchase order) content. This Standard applies to the preparation of the hard drive and integrated circuit industries ruthenium sputtering target ruthenium powder (hereinafter referred to as ruthenium powder). | YS/T 1068-2015
(Preparation of ruthenium target with ruthenium powder)
ICS 77.150.99
H68
People's Republic of China Nonferrous Metals Industry Standard
Preparation of ruthenium with ruthenium powder target
Issued on. 2015-04-30
2015-10-01 implementation
Ministry of Industry and Information Technology of the People's Republic of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) and focal points.
This standard was drafted. Your research Platinum Ltd., Technical and Economic Research Institute of Nonferrous Metals.
Drafters of this standard. Tanzhi Long, Guojun Mei, OF SCIENTIFIC to Lei, Wang Zhuanjun, Bi Jun, Wen Ming, pipe Weiming, Chen Song, Zhu Wuxun.
Preparation of ruthenium with ruthenium powder target
1 Scope
This standard specifies the requirements for the hard disk and integrated circuit industries ruthenium sputtering target with ruthenium powder, test methods, inspection rules and signs, packaging,
Transportation, storage, quality certificate and contract (or purchase order) content.
This standard applies to the preparation of the hard drive and integrated circuit industries ruthenium sputtering target ruthenium powder (hereinafter referred to as ruthenium powder).
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
Determination of GB/T 5162 metal powder tap density
Gravity measurements GB/T 6524 metal powder particle size distribution sedimentation light transmission method
GB/T 23275 ruthenium powder chemical analysis of lead, iron, nickel, aluminum, copper, silver, gold, platinum, iridium, palladium, rhodium, determination of silicon content glow
Discharge Mass Spectrometry
HB5220.3 high temperature alloys - Part 3. High-frequency induction combustion - infrared absorption method for determination of carbon content
HB5220.49 high temperature alloys - Part 49. Pulse heating - infrared, thermal conductivity method for the determination of oxygen and nitrogen content
3 Requirements
3.1 Categories
Press purity ruthenium powder is divided into four grades. SMP-Ru-99.95, SMP-Ru99.99, SMP-Ru-99.995, SMP-Ru99.99,
SMP-Ru-99.999.
3.2 Chemical composition
Ruthenium powder chemical composition shall comply with the requirements of Table 1. Ruthenium content of ruthenium powder is 100% minus the impurity element found in Table 1, more than the sum
the amount. SMP-99.999 Grades total impurity element calculation does not include Si elements.
Table 1 chemical composition of ruthenium powder%
Grades SMP-99.95 SMP-99.99 SMP-99.995 SMP-99.999
Ruthenium content
not less than
99.95 99.99 99.995 99.999
Metal impurities
no greater than
Ag 0.0004 0.0004 0.0002 0.00005
Al 0.005 0.001 0.0005 0.00005
Au 0.005 0.0005 0.0003 0.00005
Co 0.003 0.0005 0.0003 0.00005
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