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Basic data Standard ID | JJF 1913-2021 (JJF1913-2021) | Description (Translated English) | (Calibration specification for laser interferometer) | Sector / Industry | Metrology & Measurement Industry Standard | Classification of Chinese Standard | A52 | Word Count Estimation | 14,181 | Issuing agency(ies) | State Administration for Market Regulation |
JJF 1913-2021: (Calibration specification for laser interferometer)---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
(Calibration specification for laser interferometer)
National Metrology Technical Specification of the People's Republic of China
Laser Interferometer Calibration Specification
Published on 2021-07-28
2022-01-28 Implementation
Released by the State Administration for Market Regulation
Laser Interferometer Calibration Specification
Replacing JJG331-1994
Focal Point. National Technical Committee on Geometric Length Measurement
Drafting unit. China Institute of Metrology
Beijing Great Wall Metrology and Testing Technology of Aviation Industry Corporation of China
graduate School
This specification is interpreted by the National Technical Committee of Geometry and Length Measurement
Drafters of this specification.
Sun Shuanghua (China Institute of Metrology)
Zhao Xinli (Beijing Great Wall Institute of Measurement and Testing Technology, Aviation Industry Corporation of China)
Shen Xueping (China Institute of Metrology)
Gao Hongtang (China Institute of Metrology)
content
Introduction (Ⅱ)
1 Scope(1)
2 References (1)
3 Terms and Definitions(1)
4 Overview(1)
5 Metrology Characteristics(2)
5.1 Straightness of table movement (2)
5.2 Aiming repeatability(2)
5.3 Measurement repeatability(2)
5.4 Indication error of image probe (2)
5.5 Indication error(2)
6 Calibration Conditions(2)
6.1 General calibration conditions(2)
6.2 Environmental conditions (2)
6.3 Standard for calibration (2)
7 Calibration items and calibration methods (3)
7.1 Straightness of table movement (3)
7.2 Aiming repeatability(3)
7.3 Measurement repeatability(4)
7.4 Indication error of image probe (4)
7.5 Indication error(5)
8 Expression of calibration results (5)
9 Recalibration interval(5)
Appendix A Example of Measurement Uncertainty Evaluation of Indication Error of Laser Interferometer (6)
Appendix B Calibration Certificate Contents and Inner Page Format (8)
Introduction
JJF 1071 "Rules for the Compilation of National Metrology Calibration Specifications", JJF 1001 "General Metrology Terms and Definitions" and
JJF 1059.1 "Assessment and Representation of Measurement Uncertainty" together constitute the basic series supporting the formulation of this specification
specification.
This specification replaces JJG331-1994 "Laser Interferometer". Compared with JJG331-1994, except for editorial
In addition to the modification, the main technical changes are as follows.
--- Replace the accuracy of the ratiometer with the indication error of the laser interference ratiometer;
--- Modified the measurement repeatability calibration and its data processing method;
--- Increased aiming repeatability and its calibration method;
--- Delete the uniformity of the laser parallel beam, the contrast of the interference fringes and the quality of the output signal, the measurement light
Verification items such as the consistency of beam and movement direction, and the uniformity of table movement speed;
--- Added related calibration items for the image probe aiming system;
--- Added the measurement uncertainty evaluation example of the indication error of the laser interferometer in Appendix A.
The previous releases of this specification are as follows.
---JJG331-1994.
---JJG331-1983.
Laser Interferometer Calibration Specification
1 Scope
This specification applies to the calibration of laser interferometers with a measurement range of (0~1000) mm.
2 Reference documents
This specification references the following documents.
JJG73-2005 High-grade line ruler
JJF 1001-2011 General Metrology Terms and Definitions
JJF 1059.1 Evaluation and representation of measurement uncertainty
JJF 1094-2002 Characteristic Evaluation of Measuring Instruments
For dated references, only the dated version applies to this specification; for undated references
The latest version (including all amendments) applies to this specification.
3 Terms and Definitions
The following terms and definitions apply to this specification.
The minimum scribe line interval of the line ruler that can be effectively measured by the laser interferometry.
4 Overview
The laser interferometer is based on the laser wavelength as the length measurement benchmark, and directly measures the linear ruler, linear displacement sensor, laser
Optical interferometer is a standard instrument for measuring the length of the line value class. The laser interferometer consists of a mechanical main body, a length measuring system, a aiming
system, motion control system, lighting system, environmental parameter measurement system and data processing system, etc.
The structure is shown in Figure 1.The length measuring system includes frequency-stabilized laser light source, interference optical path, wavelength correction system, etc.; aiming system
Use a photoelectric microscope or an image probe for reticle aiming or reading.
Figure 1 Laser Interferometer
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