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JJF 1913-2021 English PDF

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JJF 1913-2021: (Calibration specification for laser interferometer)
Status: Valid

Standard ID	Contents [version]	USD	STEP2	[PDF] delivered in	Standard Title (Description)	Status	PDF
JJF 1913-2021	English	279	Add to Cart	3 days [Need to translate]	(Calibration specification for laser interferometer)	Valid	JJF 1913-2021

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Basic data

Standard ID	JJF 1913-2021 (JJF1913-2021)
Description (Translated English)	(Calibration specification for laser interferometer)
Sector / Industry	Metrology & Measurement Industry Standard
Classification of Chinese Standard	A52
Word Count Estimation	14,181
Issuing agency(ies)	State Administration for Market Regulation

JJF 1913-2021: (Calibration specification for laser interferometer)

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
(Calibration specification for laser interferometer) National Metrology Technical Specification of the People's Republic of China Laser Interferometer Calibration Specification Published on 2021-07-28 2022-01-28 Implementation Released by the State Administration for Market Regulation Laser Interferometer Calibration Specification Replacing JJG331-1994 Focal Point. National Technical Committee on Geometric Length Measurement Drafting unit. China Institute of Metrology Beijing Great Wall Metrology and Testing Technology of Aviation Industry Corporation of China graduate School This specification is interpreted by the National Technical Committee of Geometry and Length Measurement Drafters of this specification. Sun Shuanghua (China Institute of Metrology) Zhao Xinli (Beijing Great Wall Institute of Measurement and Testing Technology, Aviation Industry Corporation of China) Shen Xueping (China Institute of Metrology) Gao Hongtang (China Institute of Metrology)

content

Introduction (Ⅱ) 1 Scope(1) 2 References (1) 3 Terms and Definitions(1) 4 Overview(1) 5 Metrology Characteristics(2) 5.1 Straightness of table movement (2) 5.2 Aiming repeatability(2) 5.3 Measurement repeatability(2) 5.4 Indication error of image probe (2) 5.5 Indication error(2) 6 Calibration Conditions(2) 6.1 General calibration conditions(2) 6.2 Environmental conditions (2) 6.3 Standard for calibration (2) 7 Calibration items and calibration methods (3) 7.1 Straightness of table movement (3) 7.2 Aiming repeatability(3) 7.3 Measurement repeatability(4) 7.4 Indication error of image probe (4) 7.5 Indication error(5) 8 Expression of calibration results (5) 9 Recalibration interval(5) Appendix A Example of Measurement Uncertainty Evaluation of Indication Error of Laser Interferometer (6) Appendix B Calibration Certificate Contents and Inner Page Format (8)

Introduction

JJF 1071 "Rules for the Compilation of National Metrology Calibration Specifications", JJF 1001 "General Metrology Terms and Definitions" and JJF 1059.1 "Assessment and Representation of Measurement Uncertainty" together constitute the basic series supporting the formulation of this specification specification. This specification replaces JJG331-1994 "Laser Interferometer". Compared with JJG331-1994, except for editorial In addition to the modification, the main technical changes are as follows. --- Replace the accuracy of the ratiometer with the indication error of the laser interference ratiometer; --- Modified the measurement repeatability calibration and its data processing method; --- Increased aiming repeatability and its calibration method; --- Delete the uniformity of the laser parallel beam, the contrast of the interference fringes and the quality of the output signal, the measurement light Verification items such as the consistency of beam and movement direction, and the uniformity of table movement speed; --- Added related calibration items for the image probe aiming system; --- Added the measurement uncertainty evaluation example of the indication error of the laser interferometer in Appendix A. The previous releases of this specification are as follows. ---JJG331-1994. ---JJG331-1983. Laser Interferometer Calibration Specification

1 Scope

This specification applies to the calibration of laser interferometers with a measurement range of (0~1000) mm.

2 Reference documents

This specification references the following documents. JJG73-2005 High-grade line ruler JJF 1001-2011 General Metrology Terms and Definitions JJF 1059.1 Evaluation and representation of measurement uncertainty JJF 1094-2002 Characteristic Evaluation of Measuring Instruments For dated references, only the dated version applies to this specification; for undated references The latest version (including all amendments) applies to this specification.

3 Terms and Definitions

The following terms and definitions apply to this specification. The minimum scribe line interval of the line ruler that can be effectively measured by the laser interferometry.

4 Overview

The laser interferometer is based on the laser wavelength as the length measurement benchmark, and directly measures the linear ruler, linear displacement sensor, laser Optical interferometer is a standard instrument for measuring the length of the line value class. The laser interferometer consists of a mechanical main body, a length measuring system, a aiming system, motion control system, lighting system, environmental parameter measurement system and data processing system, etc. The structure is shown in Figure 1.The length measuring system includes frequency-stabilized laser light source, interference optical path, wavelength correction system, etc.; aiming system Use a photoelectric microscope or an image probe for reticle aiming or reading. Figure 1 Laser Interferometer

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