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GB/T 45130-2025: Zinc-aluminum oxide target
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| GB/T 45130-2025 | English | 199 |
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Zinc-aluminum oxide target
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GB/T 45130-2025
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Basic data | Standard ID | GB/T 45130-2025 (GB/T45130-2025) | | Description (Translated English) | Zinc-aluminum oxide target | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | H62 | | Classification of International Standard | 77.150.60 | | Word Count Estimation | 10,146 | | Date of Issue | 2025-01-24 | | Date of Implementation | 2025-08-01 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 45130-2025: Zinc-aluminum oxide target---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 77.150.60
CCSH62
National Standard of the People's Republic of China
Zinc Oxide Aluminum Sputtering Target
Released on 2025-01-24
2025-08-01 Implementation
State Administration for Market Regulation
The National Standardization Administration issued
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents"
Drafting.
Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.
This document was proposed by China Nonferrous Metals Industry Association.
This document is under the jurisdiction of the National Technical Committee on Standardization of Nonferrous Metals (SAC/TC243).
This document was drafted by. Pioneer Electronic Technology Co., Ltd., Shenzhen Zhongjin Lingnan Nonferrous Metals Co., Ltd., Zhuzhou Torch
Antai New Materials Co., Ltd., Wuhu Yingri Technology Co., Ltd., Chengdu Zhongjiancai Optoelectronic Materials Co., Ltd., Shenzhen Zhongjin Lingnan
Shaoguan Smelter of Nonferrous Metals Co., Ltd., Guangdong Oulai High-tech Materials Co., Ltd., Hebei Hengbo New Materials Technology Co., Ltd.
Co., Ltd., Fujian Ashi Innovation Materials Co., Ltd., Zhongshan Zhilong New Materials Technology Co., Ltd., Shanghai University, Guangdong Pioneer Rare Materials Co., Ltd.
company.
The main drafters of this document are. Yu Fang, Tong Peiyun, Zhu Zanfang, Yang Ping, Jiang Shaoying, Zeng Dunfeng, Zhou Yi, Cai Zhengming, Li Qingfeng, Chen Wenlin,
Ge Chunqiao, Li Xifeng, Zhu Liu, Gao Minyi, Zuo Hongyi, Liu Huiming, Wang Zhiqiang, Li Jiaxuan, Li Peng, Luo Shenglei, Chen Qinzhong, Li Qiang, Zhang Jianhua,
Zhang Ke, Zeng Pingsheng, Shi Shilong, Wang Kaikai, and Zhu Yongfeng.
Zinc Oxide Aluminum Sputtering Target
1 Scope
This document specifies the classification, technical requirements, test methods, inspection rules, marking,
Packaging, transportation, storage and accompanying documents and order contents.
This document is applicable to the zinc oxide aluminum target produced by mixing ZnO and Al2O3 powder in a certain proportion and sintering by normal pressure.
Used in thin-film solar cell coating and building energy-saving glass coating.
2 Normative references
The contents of the following documents constitute the essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document.
GB/T 1551 Determination of resistivity of silicon single crystals - In-line four-probe method and DC two-probe method
GB/T 3850 Density determination method for dense sintered metal materials and cemented carbides
GB/T 6569 Test method for bending strength of fine ceramics
GB/T 8170 Rules for rounding off values and expression and determination of limit values
GB/T 13298 Metal microstructure inspection methods
SL499 Standard Test Method for Residual Stress Measurement by Hole Drilling Strain Method
YS/T 837 Ultrasonic testing method for sputtering target-backing plate bonding quality
3 Terms and definitions
The following terms and definitions apply to this document.
3.1
apparent density
The mass of a substance per unit volume.
3.2
relative density
The ratio of apparent density to theoretical density.
Note. When the mass ratio of AZO target is m(ZnO)∶m(Al2O3)=98∶2, the theoretical density of AZO target is calculated as 5.57g/cm3.
4 Categories
AZO targets are divided into planar targets and tubular targets according to their shapes; and are specified as one grade according to the mass ratio of ZnO and Al2O3.AZO98.
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