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GB/T 43965-2024: Electronic grade ethyl orthosilicate
Status: Valid
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 43965-2024 | English | 359 |
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Electronic grade ethyl orthosilicate
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GB/T 43965-2024
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Basic data | Standard ID | GB/T 43965-2024 (GB/T43965-2024) | | Description (Translated English) | Electronic grade ethyl orthosilicate | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | L90 | | Classification of International Standard | 31.030 | | Word Count Estimation | 18,158 | | Date of Issue | 2024-04-25 | | Date of Implementation | 2024-11-01 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 43965-2024: Electronic grade ethyl orthosilicate---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 31:030
CCSL90
National Standards of People's Republic of China
Electronic grade tetraethyl orthosilicate
Released on 2024-04-25
2024-11-01 Implementation
State Administration for Market Regulation
The National Standardization Administration issued
Foreword
This document is in accordance with the provisions of GB/T 1:1-2020 "Guidelines for standardization work Part 1: Structure and drafting rules for standardization documents"
Drafting:
Please note that some of the contents of this document may involve patents: The issuing organization of this document does not assume the responsibility for identifying patents:
This document was proposed and coordinated by the National Technical Committee for Semiconductor Equipment and Materials Standardization (SAC/TC203):
This document was drafted by: Jinhong Gas Co:, Ltd:, Hubei New Blue Sky New Materials Co:, Ltd:, Wuhan New Silicon Technology Qianjiang Co:, Ltd:
Co:, Ltd:, Jiangsu Nanda Optoelectronic Materials Co:, Ltd:, Nanda Optoelectronic Semiconductor Materials Co:, Ltd:, China Electronics Technology Standardization Institute,
Zhejiang Zhongning Silicon Industry Co:, Ltd:, Inner Mongolia Xingyang Technology Co:, Ltd:, Luoyang Zhongsi High-tech Co:, Ltd:, Jiangyin Runma Electronics
Materials Co:, Ltd:, Zhejiang Quzhou Guibao Chemical Co:, Ltd:, Hubei Jianghan New Materials Co:, Ltd:, Zhejiang Kaihua Synthetic Materials Co:, Ltd:
Co:, Ltd:, Guangzhou CESI Standard Testing Institute Co:, Ltd:
The main drafters of this document are: Sun Meng, Jin Xianghua, Zhao Junsha, Xiao Junping, Li Kaidong, Wu Yiran, Cao Kewei, Zhao Bin, Tao Gangyi, Sun Minglu,
Chen Deyi, Feng Qionghua, Xiang Chong, Wang Cheng, Huang Tianci, Wan Ye, Zhang Yuanyuan, Guo Shuhu, Ge Shiyong, Ge Yeming, He Ke, Li Chonghe, Gan Jun, Chen Daowei,
Zhang Mingying:
Electronic grade tetraethyl orthosilicate
1 Scope
This document specifies the technical requirements, inspection rules, type tests, marking, packaging, transportation, and other aspects of electronic grade ethyl orthosilicate for use in the semiconductor industry:
and storage requirements, and describes the test methods, analytical methods and evaluation of measurement results:
This document applies to electronic grade tetraethyl orthosilicate for depositing silicon dioxide:
2 Normative references
The contents of the following documents constitute the essential clauses of this document through normative references in this document:
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document:
GB 190 Dangerous Goods Packaging Marking
GB/T 191 Pictorial markings for packaging, storage and transportation
GB/T 2828:1 Sampling procedures for inspection by attributes Part 1: Sampling plans for batch inspection based on the acceptance quality limit (AQL)
GB/T 3143 Determination of color of liquid chemical products (Hazen unit---platinum-cobalt color number)
GB/T 3723 General safety rules for sampling of industrial chemical products
GB/T 5099 (all parts) Seamless steel gas cylinders
GB/T 6680 General Rules for Sampling of Liquid Chemical Products
GB/T 7144 Color marking of gas cylinders
GB/T 11446:1 Electronic grade water
GB/T 14193 Regulations for filling liquefied gas cylinders
GB 15258 Provisions for the preparation of chemical safety labels
GB/T 16804 Gas Cylinder Warning Label
GB/T 25915:1 Clean rooms and related controlled environments Part 1: Classification of air cleanliness by particle concentration
GB/T 26793 Coulometric trace moisture analyzer
GB/T 33145 Large volume seamless steel gas cylinders
GB/T 37837 General rules for quadrupole inductively coupled plasma mass spectrometry
SJ/T 11637 General rules for inductively coupled plasma mass spectrometry of electronic chemicals
SJ/T 11638 Test methods for particles in electronic chemicals
TSG23 Gas Cylinder Safety Technical Regulations
3 Terms and definitions
There are no terms or definitions that require definition in this document:
4 Technical requirements
Electronic grade tetraethyl orthosilicate shall comply with the requirements of Table 1:
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