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GB/T 39144-2020 English PDF

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GB/T 39144-2020: Test method for magnesium content in gallium nitride materials - Secondary ion mass spectrometry
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PDF similar to GB/T 39144-2020


Standard similar to GB/T 39144-2020

GB/T 14849.3   GB/T 14849.1   GB/T 38976   GB/T 14140   GB/T 39145   

Basic data

Standard ID GB/T 39144-2020 (GB/T39144-2020)
Description (Translated English) Test method for magnesium content in gallium nitride materials - Secondary ion mass spectrometry
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard H17
Classification of International Standard 77.040
Word Count Estimation 6,619
Date of Issue 2020-10-11
Date of Implementation 2021-09-01
Regulation (derived from) National Standard Announcement No. 21 of 2020
Issuing agency(ies) State Administration for Market Regulation, China National Standardization Administration

GB/T 39144-2020: Test method for magnesium content in gallium nitride materials - Secondary ion mass spectrometry


---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Test method for magnesium content in gallium nitride materials - Secondary ion mass spectrometry ICS 77.040 H17 National Standards of People's Republic of China Determination of Magnesium Content in Gallium Nitride Materials Secondary ion mass spectrometry 2020-10-11 released 2021-09-01 implementation State Administration for Market Regulation Issued by the National Standardization Management Committee

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009. This standard is composed of the National Semiconductor Equipment and Material Standardization Technical Committee (SAC/TC203) and the National Semiconductor Equipment and Material Standard The material sub-committee of the Chemical Technology Committee (SAC/TC203/SC2) jointly proposed and managed. Drafting organizations of this standard. The 46th Research Institute of China Electronics Technology Group Corporation, Beijing Jurui Zhongbang Technology Co., Ltd., Dongguan Zhong Gallium Semiconductor Technology Co., Ltd., Non-ferrous Metal Technology and Economic Research Institute, Xiamen Keli Electronics Co., Ltd. The main drafters of this standard. Ma Nongnong, He Youqin, Chen Xiao, Liu Lina, He Xuankun, Yang Suxin, Yan Fangliang, Yang Lixia, Yan Jianfeng, Ni Qingqing. Determination of Magnesium Content in Gallium Nitride Materials Secondary ion mass spectrometry

1 Scope

This standard specifies the secondary ion mass spectrometry test method for magnesium content in gallium nitride materials. This standard applies to the quantitative analysis of magnesium content in gallium nitride materials, and the measurement range is not less than 5×1014cm-3. Note. The magnesium content in gallium nitride material is calculated by the number of atoms per cubic centimeter.

2 Normative references

The following documents are indispensable for the application of this document. For dated reference documents, only the dated version applies to this document. For undated references, the latest version (including all amendments) applies to this document. GB/T 14264 Terminology of Semiconductor Materials GB/T 22461 Surface Chemical Analysis Vocabulary GB/T 32267 Analytical Instrument Performance Measurement Terms

3 Terms and definitions

The terms and definitions defined in GB/T 14264, GB/T 22461 and GB/T 32267 apply to this document.

4 Principle of the method

Under the condition of high vacuum (vacuum degree is better than 10-6Pa), the primary ions generated by the oxygen ion source will bombard the nitrogen after being accelerated, purified and focused. A variety of particles were sputtered on the surface of gallium sulfide sample. Extract the ions (i.e. secondary ions) and separate the ions with different mass-to-charge ratios through a mass spectrometer. Record and calculate the ratio of the ion count rate of magnesium to gallium in the sample, and use the relative sensitivity factor to quantitatively analyze and calculate the magnesium content in the gallium nitride material.

5 Disturbing factors

5.1 The secondary ion mass spectrometer has a memory effect. If a sample with a higher magnesium content is tested, a high content of magnesium will remain in the sample chamber of the instrument, which will affect the test result of the magnesium content. 5.2 Different instrument models or different states of the same instrument (e.g. electron multiplier efficiency, aperture size, primary beam size, focus state State, etc.), will affect the detection limit of this method. 5.3 The sample analysis surface within the sample rack window should be flat to ensure that when each sample moves to the analysis position, its surface and ion collection The tilt of the optical system remains unchanged, otherwise the accuracy of the test will be reduced. 5.4 Magnesium ions adsorbed on the sample surface may affect the test results of magnesium content. 5.5 The accuracy of the test decreases significantly as the surface roughness of the sample increases. It should be done by chemical mechanical polishing or chemical Corrosion polishing reduces surface roughness. 5.6 The non-uniformity of magnesium content in the standard sample will limit the accuracy of the test results. 5.7 Deviations in the nominal content of magnesium in the standard samples will lead to deviations in the test results.

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