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GB/T 34085-2017: Gas for electronic industry -- Trifluoromethane
Status: Valid
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 34085-2017 | English | 199 |
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Gas for electronic industry -- Trifluoromethane
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GB/T 34085-2017
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Basic data | Standard ID | GB/T 34085-2017 (GB/T34085-2017) | | Description (Translated English) | Gas for electronic industry -- Trifluoromethane | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 10,172 | | Date of Issue | 2017-07-31 | | Date of Implementation | 2017-11-01 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | GB/T 34085-2017: Gas for electronic industry -- Trifluoromethane---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Gas for electronic industry - Trifluoromethane
ICS 71.100.20
G86
National Standards of People's Republic of China
Electronic industry gas Trifluoromethane
2017-07-31 Posted
2017-11-01 implementation
General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
China National Standardization Administration released
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This standard is proposed and managed by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203).
This standard was drafted unit. National Chemical Industry Gas Products Quality Supervision and Inspection Center (Fujian), Guangdong Huate Gas Co., Ltd.,
Zhejiang Juhua Co., Ltd., Gaomi Instruments, Zhejiang Chemical Industry Research Institute, Zhonghao Guangming Chemical Research and Design Institute Co., Ltd., Dalian University
Special Gas Co., Ltd., Shanghai Hua love chromatography Technology Co., Ltd., Dongguan City, Chen Electronics Technology Co., Ltd., Tianjin Changlu Watson Chemical
Co., Ltd., Southwest Chemical Research and Design Institute Co., Ltd.
The main drafters of this standard. Chen Rong, Lin Yu Wei, Fu cast red, Du Hansheng, Ye Hongyan, Niu Yan East, Shiwan Jun, Sun Fu Nan, Qu Qing, Fang Hua,
Wang Hong, Cui Xuewen, Zhou Pengyun.
Electronic industry gas Trifluoromethane
1 Scope
This standard specifies the technical requirements of the electronics industry with Trifluoromethane, test methods and packaging, marking, storage and security.
This standard applies to difluorochloromethane, chloroform and hydrogen fluoride as raw material preparation of trifluoromethane products. It is in the electronics industry
Ion etching process as etching gas.
Molecular formula .CHF3.
Relative molecular mass .70.013 (By International Relative Atomic Weight in.2011).
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version applies to this article
Pieces. For undated references, the latest edition (including all amendments) applies to this document.
GB 190 Dangerous goods packaging mark
GB/T 3723 Industrial Chemical Sampling Safety General
GB/T 5099 seamless steel gas cylinder
GB/T 5832.3 Determination of trace moisture in gases Part 3. Cavity ring down spectroscopy
GB/T 7144 cylinder color logo
GB/T 14193 liquefied gas cylinder filling provisions
GB 15258 Chemical Safety Labeling Rules
GB/T 16804 cylinder warning labels
GB/T 26571 special gas storage period specification
Gas analysis Helium ionization gas chromatography
TSGR0006 Cylinder Safety Technology Supervision Procedures
Hazardous Chemicals Safety Management Regulations (2002 Edition)
Special Equipment Safety Supervision Regulations (2009 Edition)
3 technical requirements
The quality of trifluoromethane should meet the requirements of Table 1.
Table 1 technical indicators
Project Indicators
Purity (volume fraction) of trifluoromethane (CHF3)/10-2 ≥ 99.999
O2 Ar content (volume fraction)/10-6 < 1
Nitrogen (N2) content (volume fraction)/10-6 < 3
Carbon monoxide (CO) content (volume fraction)/10-6 < 1
Carbon dioxide (CO2) content (volume fraction)/10-6 < 1
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