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GB/T 30815-2014: Surface chemical analysis -- Guidelines for preparation and mounting of specimens for analysis
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Surface chemical analysis -- Guidelines for preparation and mounting of specimens for analysis
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GB/T 30815-2014
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Basic data | Standard ID | GB/T 30815-2014 (GB/T30815-2014) | | Description (Translated English) | Surface chemical analysis -- Guidelines for preparation and mounting of specimens for analysis | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G04 | | Classification of International Standard | 71.040.40 | | Word Count Estimation | 21,234 | | Date of Issue | 6/24/2014 | | Date of Implementation | 2/1/2015 | | Quoted Standard | ISO 18115 | | Adopted Standard | ISO 18116-2005, IDT | | Regulation (derived from) | National Standards Bulletin No. 14 of 2014 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the installation surface samples for chemical analysis and surface treatment method of guidance. Purpose is to help analysts understand when using Auger electron spectroscopy, secondary ion mass spectrometry and X-ray photoelectron | GB/T 30815-2014: Surface chemical analysis -- Guidelines for preparation and mounting of specimens for analysis
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Surface chemical analysis. Guidelines for preparation and mounting of specimens for analysis
ICS 71.040.40
G04
National Standards of People's Republic of China
Preparation of Surface Chemical Analysis of samples Analysis
And installation guide
(ISO 18116.2005, IDT)
Issued on. 2014-06-24
2015-02-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Table of Contents
Introduction Ⅲ
Introduction Ⅳ
1 Scope 1
2 Normative references 1
3 Terms and definitions
4 Symbols and abbreviations 1
5 1 General requirements
6 samples Inspection 1
7 Sample Note 2
Origin of the sample 2 7.1
7.2 Detection of information 2
7.3 Other analytical techniques have been used over the analysis sample 2
8 2 sample contamination sources
8.1 tools, gloves, fixtures and similar materials 2
8.2 Exposure to vapors 3
8.3 exposed to the vacuum apparatus 3
8.4 exposed to the electron, ion, or X-ray 3
8.5 Analysis of Pollution chamber 3
Preservation and transfer of samples 3 9
9.1 save time 3
9.2 storage containers 4
9.3 Temperature and humidity 4
9.4 Sample transfer 4
10 Sample installation steps 4
10.1 General procedure 4
10.2 powders and particles 4
10.3 threads, fibers and filaments 5
10.4 bracket 5
10.5 reduce heat damage analysis 5
11 reduced sample charged Method 5
11.1 Overview 5
11.2 conductive mask grid, parcel or coating 5
11.3 and gun 6
11.4 electron beam and ion beam 6
12 sample preparation technique 6
12.1 Overview 6
12.2 mechanical separation 6
12.3 thinning and removal of 6
12.4 Removal of the substrate 7
12.5 slicing 7
12.6 overlay Growth 8
12.7 solvent 8
12.8 chemical etching 8
12.9 8 ion sputtering
12.10 9 plasma etching
Heating 12.11 9
12.12 ultraviolet radiation 10
13 fracture, cleavage and scribing 10
13.1 fracture 10
13.2 cleavage 10
13.3 scribing 10
14 special sample preparation techniques 11
14.1 deflated pre-vacuum sample 11
14.2 viscous liquid 11
14.3 solute as residue 11
Reference 12
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard uses the translation method identical with ISO 18116.2005 "Preparation and Installation Guide Surface analysis of samples for chemical analysis."
Correspondence between the consistency of the standards of international documents and normative references of the following documents.
--- GB/T 22461-2008 Surface chemical analysis - Vocabulary (ISO 18115.2001, IDT)
The standard micro-beam analysis by the National Standardization Technical Committee (SAC/TC38) and focal points.
This standard is drafted by. Xiamen Ailao De Optical Co., Ltd., Tsinghua University.
The main drafters of this standard. aqua regia chrysanthemum, when Swallow, Li Zhanping, Yao Wenqing, Cendan Xia, Liu Fen.
Introduction
This standard is intended to assist in the analysis of the sample surface by chemical analysis of the operation, installation and handling. Although this standard formulation method main
If the Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS) and other surface analysis techniques to prepare
But it can also be used for many other surface-sensitive analytical techniques, for example, ion scattering spectroscopy, low energy electron diffraction and electron energy loss spectroscopy, sample
Ordnance Disposal affect the test results of these surface-sensitive analytical techniques. AES, XPS and SIMS to a few nanometers thickness of the surface layer Min
Sense, such a thin layer due to import samples or surface analysis chamber prior to treatment was severely disrupted.
Correct sample preparation and chemical analysis of the surface mounting is particularly critical. Improper preparation may result in surface composition changes and
Analysis of the results unreliable. Be careful to install the sample, in order to minimize or avoid the mounting operation and the introduction of contaminants. In order to analyze
Results representative of the original sample, sample preparation and installation should be kept in the surface state of the sample. This standard expresses the surface analysis by using
Any surface-sensitive analytical techniques, in order to affect the method of sample preparation is reduced to the minimum possible need to use. This standard also expresses
It does not affect the analysis of the information required to install the samples.
Preparation of Surface analytical sample surface chemical analysis
And installation guide
1 Scope
This standard provides a surface samples for chemical analysis and surface treatment method of installation guide. Purpose is to help analysts understand the use of Russian
Auger electron spectroscopy specialized sample handling, secondary ion mass spectrometry and X-ray photoelectron spectroscopy surface analysis techniques to analyze the necessary
condition.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
ISO 18115 Surface chemical analysis - Vocabulary (Surfacechemicalanalysis-Vocabulary)
3 Terms and Definitions
Terms and definitions defined in ISO 18115 apply to this document.
4 Symbols and Abbreviations
AES. Augerelectronspectroscopy, Auger electron spectroscopy;
SIMS. secondary-ionmassspectrometry, secondary ion mass spectrometry;
XPS. X-rayphotoelectronspectroscopy, X-ray photoelectron spectroscopy.
5 General requirements
General information about the sample handling two books [1,2] are applicable. Cleanliness of surface-sensitive analytical techniques required much higher than the promise
More other forms of analysis. Should not bare hand contact with the sample and the sample holder. Minimizing or eliminating the surface analysis of the proposed operation. Fingerprint carrying a can
Analysis of the material can contaminate surfaces. Hand cream, moisturizing cream and other skin material is not suitable for high vacuum.
Although substantially similar AES, XPS and SIMS sample processing methods, but also some differences. Typically AES and SIMS sample system
Device needs more careful, because there may be an electron beam or an ion beam of charged or damage, or both are present. Samples of these three techniques required
Obviously not prepared at the same time, this standard will be labeled.
Inspection 6 samples
Samples should be simple visual inspection, optical microscopy can be used. Should be checked at least residue, particles, fingerprints, adsorbent, contaminants or
Other foreign substances entered in the test log book.
It may not be observed (for example, through the observation window or outside the vacuum system after the obvious visual characteristics of the sample into the sample surface analysis instruments
Available imaging methods). So you may need to sample analysis area surrounding physical identification (such as scribing or oily pen identification tag) to
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