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GB/T 30702-2014: Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
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| GB/T 30702-2014 | English | 494 |
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Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
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GB/T 30702-2014
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Basic data | Standard ID | GB/T 30702-2014 (GB/T30702-2014) | | Description (Translated English) | Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G04 | | Classification of International Standard | 71.040.40 | | Word Count Estimation | 25,236 | | Date of Issue | 6/9/2014 | | Date of Implementation | 12/1/2014 | | Quoted Standard | ISO 18115; ISO 21270 | | Adopted Standard | ISO 18118-2004, IDT | | Regulation (derived from) | National Standards Bulletin No. 11 of 2014 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the Auger electron spectroscopy and X-ray photoelectron spectroscopy quantitative analysis of homogeneous material relative sensitivity factor of experimental measurements and usage guidelines. | GB/T 30702-2014: Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
ICS 71.040.40
G04
National Standards of People's Republic of China
Surface chemical analysis - Auger electron spectroscopy and X-ray
Relative sensitivity photoelectron spectroscopy determined experimentally
Factor in a homogeneous material Quantitative Analysis Guide
(ISO 18118.2004, IDT)
Issued on. 2014-06-09
2014-12-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Table of Contents
Introduction Ⅲ
Introduction Ⅳ
1 Scope 1
2 Normative references 1
3 Terms and definitions
4 Symbols and abbreviations 2
5 2 Overview
6 Measurement Condition 3
6.1 Overview 3
6.2 excitation source 3
6.3 Energy resolution 3
6.4 energy step and scan rate 3
6.5 Signal Strength 3
6.6 gain and time constant (for analog signal detection system AES instrument) 3
Get differential spectrum modulation 6.7 4
7 Data Analysis Step 4
8 energy intensity response function 4
9 determination of the chemical composition with the relative sensitivity factor 4
9.1 Calculation of the chemical composition of 4
9.2 calculate the composition of uncertainty 5
Appendix A (normative) relative sensitivity factor formula 6
A.1 Symbols and abbreviations 6
A.2 Principle 7
A.3 relative sensitivity factor 8
Annex B (informative) Analysis of Uncertainty information 15
B.1 Symbols and Abbreviations 15
B.2 Introduction 15
B.3 matrix effect 15
B.4 distribution of sample components 16
B.5 surface topography 16
B.6 radiation damage 16
B.7 ion sputtering affect 16
B.8 surface contamination 16
References 17
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard uses the translation method identical with ISO 18118.2004 "Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy
The experimentally determined relative sensitivity factor in the quantitative analysis of homogeneous material Guide. "
Correspondence between the consistency of the standards of international documents and normative references of the following documents.
--- GB/T 22461-2008 Surface chemical analysis - Vocabulary (ISO 18115.2001, IDT);
--- GB/T 21006-2007 Surface chemical analysis - X-ray photoelectron spectroscopy and Auger electron spectroscopy linear intensity scale
(ISO 21270.2004, IDT).
The standard micro-beam analysis by the National Standardization Technical Committee (SAC/TC38) and focal points.
This standard is drafted by. Analysis and Testing Center, Beijing Normal University.
The main drafters of this standard. Wu Zhenglong.
Introduction
Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) is a surface component sensitive surface analysis techniques to detect deep
Of typically a few nanometers. Both techniques are given in volume average surface weighted signal analysis. Most of the components of the sample and in the transverse
The depth direction has changed. Since difficult to measure any changes in the composition of size and distance changes, often using similar methods into
Line quantitative analysis. The simplest homogeneous samples, although this situation is not common, but in order to facilitate the analysis, the sample is generally assumed to be uniform.
This standard provides a measurement and use of AES and XPS quantified experimentally determined relative sensitivity factor analysis of homogeneous material
guide.
Surface chemical analysis - Auger electron spectroscopy and X-ray
Relative sensitivity photoelectron spectroscopy determined experimentally
Factor in a homogeneous material Quantitative Analysis Guide
1 Scope
This standard specifies the Auger electron spectroscopy and X-ray photoelectron spectroscopy quantitative analysis of homogeneous material relative sensitivity factor experiments
Measurement and usage guidelines.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
ISO 18115 Surface chemical analysis - Vocabulary (Surfacechemicalanalysis-Vocabulary)
ISO 21270 Surface chemical analysis - X-ray photoelectron spectroscopy and Auger electron spectroscopy intensity scale linear (Surfacechem-
icalanalysis-X-rayphotoelectronandAugerelectronspectrometers-Linearityofintensityscale)
3 Terms and Definitions
Terms and definitions defined in ISO 18115 apply to this document. ISO 18115 in absolute terms and relative sensitivity factors elements yuan
Prime sensitivity factors are listed in the definition of 3.1 and 3.2. ISO 18115 future revisions term average due to the relative sensitivity matrix
Son and pure elements of the definition of relative sensitivity factors are listed in 3.3 and 3.4.
3.1
Absolute elemental sensitivity factors absoluteelementalsensitivityfactor
Coefficient of an element. The element with the measured intensity divided by the coefficient, while the atomic concentration of the sample is obtained or atomic fraction of the element.
Note 1. should clearly chosen atom concentration or atomic fraction.
Note 2. The sensitivity of the type used in the calculation and quantitative factors should be consistent with the type of equation and analysis of samples used in the process, for example, a uniform layer of sample or segregation.
Note 3. In order to use the matrix factors or other parameters, the sources should be given the sensitivity factors.
Note 4. The sensitivity factor and the excitation source parameters, energy analyzer parameters and sample in the instrument relative to the orientation related to these components. But also with sensitivity factors
The correlation matrix analysis, in the SIMS matrix effect play a major role.
3.2
Element relative sensitivity factors relativeelementalsensitivityfactor
Proportional to the absolute elemental sensitivity coefficient factors. Select the scale factor so that the peak intensity of the elected element and the specified level transition
It is equal to 1.
Note 1. When the selected element and its energy transition, usually used for XPS C1s or F1s, usually used for AES AgM4,5VV.
Note 2. As used type of sensitivity factors should be applied, such as the analysis of homogeneous samples or class segregation layer of the sample.
Note 3. In order to use the matrix factors or other parameters, the sources should be given the sensitivity factors.
Note 4. The sensitivity factor and the excitation source parameters, energy analyzer parameters and sample in the instrument relative to the orientation related to these components. Sensitivity factors also
The matrix being analyzed relevant influence plays a major role in the SIMS matrix.
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