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GB/T 26249-2010: Gases for electronic industry -- Hydrogen selenide
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| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 26249-2010 | English | 299 |
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Gases for electronic industry -- Hydrogen selenide
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GB/T 26249-2010
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Basic data | Standard ID | GB/T 26249-2010 (GB/T26249-2010) | | Description (Translated English) | Gases for electronic industry -- Hydrogen selenide | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 13,174 | | Date of Issue | 2011-01-14 | | Date of Implementation | 2011-05-01 | | Quoted Standard | GB 190; GB/T 3723; GB 5099; GB/T 5832.1; GB 7144; GB/T 8984; GB/T 11640; GB 14193; GB/T 26571; " Gas Cylinder Safety Supervision " State Administration of Quality Supervision, Inspection and Quarantine Published in 2000 | | Regulation (derived from) | National Standard Approval Announcement 2011 No.14 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the technical requirements for hydrogen selenide, test methods and packaging, signs, storage and safety. This standard applies to selenium aluminum, hydrolysis of magnesium alloy selenium compounds, elemental selenium and other methods to obtain high-temperature reaction of hydrogen and refined products resulting hydrogen selenide. It is mainly used in solar cells, epitaxial semiconductor and integrated circuit manufacturing, ion implantation and doping. | GB/T 26249-2010: Gases for electronic industry -- Hydrogen selenide---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Gases for electronic industry. Hydrogen selenide
ICS 71.100.20
G86
National Standards of People's Republic of China
Electronic industrial gas hydrogen selenide
Issued on. 2011-01-14
2011-05-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
The Standard Annexes A and B are normative appendix. Annex C is informative appendix.
The standard equipment by the National Standardization Technical Committee and the semiconductor material (SAC/TC203) proposed.
The standard equipment by the National Standardization Technical Committee and a semiconductor material gas Technical Committee (SAC/TC203/SC1) centralized.
This standard was drafted. China Institute of Metrology, Southwest Chemical Industry Research and Design Institute, Shanghai, love Chromatography Technology Co., river
Baoding city north of North Gas Company Limited special.
The main drafters of this standard. Zhouze Yi, Fang Hua, Zhuang Hongtao, Lijian Hao, Zhou Pengyun, Xushao Bing.
Electronic industrial gas hydrogen selenide
1 Scope
This standard specifies the technical requirements for hydrogen selenide, test methods and packaging, labeling, storage and security.
This standard applies to selenium aluminum, magnesium alloy hydrolysis selenium compound, elemental selenium and other methods to obtain high-temperature reaction of hydrogen selenide and hydrogen obtained by refining
product. It is mainly used in solar cells, semiconductors and integrated circuits produced by epitaxy, ion implantation and doping.
Molecular formula. H2Se.
Relative molecular mass. 80.97588 (according to 2007 international relative atomic mass calculation).
2 Normative references
The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent
Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research
Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard.
GB 190 packaging and marking of dangerous goods
GB/T 3723 Sampling of chemical products for industrial use General Safety
GB 5099 seamless steel gas cylinders
Determination of GB/T 5832.1 gas humidity - Part 1. Electrolysis
GB 7144 cylinders color logo
GB/T 8984 of carbon monoxide, carbon dioxide and hydrocarbons by gas chromatography
GB/T 11640 seamless aluminum alloy gas cylinders
GB 14193 Rules for filling of liquefied gas cylinders
GB/T 26571 Specification of special gas storage
"Gas Cylinder Safety Supervision" (State Administration of Quality Supervision, Inspection and Quarantine released, 2000)
3 Technical requirements
Hydrogen selenide technical requirements should be consistent with the provisions in Table 1.
Table 1 Technical Specifications
Item Index
Hydrogen selenide (H2Se) purity (volume fraction)/10-2 ≥ 99.99
Hydrogen (H2) content (volume fraction)/10-6 ≤ 20
Argon + oxygen (O2 + Ar) content (volume fraction)/10-6 ≤ 10
Nitrogen (N2) content (volume fraction)/10-6 ≤ 20
Carbon monoxide (CO) content (volume fraction)/10-6 ≤ 10
Carbon dioxide (CO2) content (volume fraction)/10-6 ≤ 10
Total hydrocarbons (methane) content (volume fraction)/10-6 ≤ 10
Hydrogen sulfide (H2S) content (volume fraction)/10-6 ≤ 10
Water (H2O) content (volume fraction)/10-6 ≤ 10
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