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GB/T 25189-2010 English PDF

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GB/T 25189-2010: Microbeam analysis -- Determination method for quantitative analysis parameters of SEM-EDS
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PDF similar to GB/T 25189-2010


Standard similar to GB/T 25189-2010

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Basic data

Standard ID GB/T 25189-2010 (GB/T25189-2010)
Description (Translated English) Microbeam analysis -- Determination method for quantitative analysis parameters of SEM-EDS
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard N53
Classification of International Standard 71.040.99
Word Count Estimation 9,993
Date of Issue 2010-09-26
Date of Implementation 2011-08-01
Quoted Standard GB/T 4930; GB/T 17359-1998; GB/T 20726; JJF 1001
Regulation (derived from) Announcement of Newly Approved National Standards No. 6 of 2010 (total 161)
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary This standard specifies the scanning electron microscopy energy dispersive spectroscopy quantitative analysis of chemical composition determination of the relevant parameters. This standard applies to the scanning electron microscope that affect the performance of quantitative analysis of the relevant parameters and the determination of the basic parameters spectrometer, and quantitative analysis of the elemental composition of the instrument to make a comprehensive analysis.

GB/T 25189-2010: Microbeam analysis -- Determination method for quantitative analysis parameters of SEM-EDS


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Microbeam analysis.Determination method for quantitative analysis parameters of SEM-EDS ICS 71.040.99 N53 National Standards of People's Republic of China Microbeam analysis SEM EDS quantitative analysis Determination of parameters Issued on. 2010-09-26 2011-08-01 implementation Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China Standardization Administration of China released

Foreword

This standard by the National Standardization Technical Committee microbeam analysis and focal points. This standard was drafted. Mineral Resources Research Institute, Chinese Academy of Geological Sciences. The main drafters of this standard. Zhou Jianxiong, Chen Zhenyu.

Introduction

X-ray spectrometer is a scanning electron microscope common configuration, SEM - EDS accuracy quantitative analysis of the chemical composition depends not only on energy Spectrometer, also depends on the properties of SEM. Scanning electron microscopy - energy dispersive spectroscopy quantitative analysis of performance testing can be both as a unified whole consider. Microbeam analysis SEM EDS quantitative analysis Determination of parameters

1 Scope

This standard specifies the SEM - EDS analysis of the chemical composition of the quantitative determination of the relevant parameters. This standard applies to the determination of scanning electron microscopy - related parameters and quantitative analysis of the performance of the basic parameters of the energy spectrum, and elemental as Sub-quantitative analysis of the instrument to make a comprehensive analysis.

2 Normative references

The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard. GB/T 4930 micro beam analysis electron probe microanalysis standard specimen technical conditions Guidelines GB/T 17359-1998 electron probe and scanning electron microscopy X-ray spectroscopy quantitative analysis General GB/T 20726 semiconductor detector X-ray spectrometers JJF1001 common measurement terms and definitions

3 SEM EDS quantitative analysis principles

Focused electron beam having a certain energy emitted SEM bombardment of the sample surface, generated by the excitation of characteristic X-ray elements. This These characteristic X-rays detected by the semiconductor detector and after signal conversion, amplification and a series of processing and analysis, the sample can be obtained by Characteristics containing the elements of X-ray intensity values and by comparison with the corresponding elements of the X-ray spectrum of a standard sample measurement and calculation of the correction Li, a test sample can be obtained by quantitative analysis of the chemical composition.

4 basic parameters and the detection reference materials

4.1 Basic parameters Basic parameters 4.1.1 Scanning electron microscopy. electron beam stability, repeatability working distance. 4.1.2 The basic parameters of spectrometers. energy resolution, X-ray energy efficiency and related equipment testing, etc.; 4.2 Reference substance detection National electronic probe preferred national standardization administrative department issued the approval/SEM standard sample, in line with GB/T 4930 The relevant provisions. When the absence of appropriate national standard samples, the choice of the appropriate agency approved research standards. Determination spectrometer energy resolution sample. use of manganese metal standard samples and PTFE sample. Determination spectrometer detection efficiency of sample. using polished, smooth, clean, pure copper or pure nickel samples. Determination spectrometer sample quantitative elemental analysis accuracy. recommend at least a selection of alloy (such as Fe-Cr-Ni alloy multi-element) and a Silicate minerals (such as pyrope, olivine, etc.) or basaltic glass samples. Ultra-thin window spectrometer should also use Teflon or containing Samples of the light elements (e.g., glassy carbon, silicon carbide, boron nitride, or calcium fluoride). Selected samples should be flat polished sample.

5 Technical requirements and measuring methods

5.1 SEM Electron beam size should be digital display and scanning electron microscopy adjustable. Recommended with Faraday cup to monitor the electron beam. Experiments should be

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