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GB/T 21006-2007: Surface chemical analysis -- X-ray photoelectron and Auger electron spectrometers -- Linearity of intensity scale
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Surface chemical analysis -- X-ray photoelectron and Auger electron spectrometers -- Linearity of intensity scale
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GB/T 21006-2007
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Basic data | Standard ID | GB/T 21006-2007 (GB/T21006-2007) | | Description (Translated English) | Surface chemical analysis -- X-ray photoelectron and Auger electron spectrometers -- Linearity of intensity scale | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | L67 | | Classification of International Standard | 35.240.70; 71.040.40 | | Word Count Estimation | 15,145 | | Date of Issue | 2007-07-26 | | Date of Implementation | 2008-03-01 | | Adopted Standard | ISO 21270-2004, IDT | | Regulation (derived from) | China National Standard Announcement 2007 No.7 (Total No.107) | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies two methods. AES and XPS spectrometer used to measure the strength of standard maximum count rate is within the allowable limits of discrete linear range. It also includes non-linear intensity correction method. Spectrometer may be used so that the maximum count rate is higher, the correction formula associated spectrometers have proven to be effective. | GB/T 21006-2007: Surface chemical analysis -- X-ray photoelectron and Auger electron spectrometers -- Linearity of intensity scale
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Surface chemical analysis. X-ray photoelectron and Auger electron spectrometers. Linearity of intensity scale
ICS 35.240.70; 71.040.40
L67
National Standards of People's Republic of China
GB/T 21006-2007/ISO 21270.2004
Surface chemical analysis and X-ray photoelectron spectroscopy
Auger electron spectroscopy Linearity of intensity scale
(ISO 21270.2004, IDT)
Posted 2007-07-26
2008-03-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Table of Contents
Preface Ⅰ
Introduction Ⅱ
1 Scope 1
2 Normative references 1
3 Symbol 1
4 Summary of Method 1
5 When to use this standard 2
6 to assess the strength of the linear program 2
Appendix A (informative) linear measuring spectral ratio method (Method II) results of Example 8
Reference 10
GB/T 21006-2007/ISO 21270.2004
Foreword
This standard is identical with ISO 21270.2004 "Surface chemical analysis - X-ray photoelectron spectroscopy and Auger electron spectroscopy strength
Linear subject "(in English).
This standard is equivalent to translate ISO 21270.2004. For ease of use, this standard made the following editorial changes.
--- Use the decimal symbol instead of decimal symbol ",". ",";
--- Use the "standard" instead of "this International Standard."
Appendix A of this standard is an informative annex.
This standard by the National Standardization Technical Committee microbeam and focal points.
This standard was drafted. Institute of Chemistry, China Institute of Metrology.
Drafters of this standard. Liu Fen Qiu Li Mei, Zhao Liang-Zhong, Wang Hai, Song Xiaoping, Hong Shen Electric.
GB/T 21006-2007/ISO 21270.2004
Introduction
When using Auger electron spectroscopy (AES) or X-ray photoelectron spectroscopy (XPS) analysis of the material surface to be measured quantitatively strong line
degree. Unless corrected, the strength of the underlying instrument will directly lead to the presence of non-linear error of the measurement results. Typically, the intensity scale at very low count
When the rate is linear, but increases the count rate will gradually become non-linear. Measuring the signal strength depends on the strength of the measurement system, the output of
Signal is set proportional to the measured intensity. In the counting system, it is desirable for this ratio is 1. If the ratio of the signal strength or count rate and
Change, the measuring system is considered to be non-linear. Nonlinear less than 1% is generally considered not serious. When the count exceeds the maximum allowable
Count rate of 5%, the strength of the underlying non-linear may exceed 1% [1,2]. For many instruments, as long as the correct settings Detection System, a non-linear
Nature will not change significantly in the next few months. The above apparatus, the count rate can be corrected with the corresponding relationship, so that the strength of the corrected
It is linear larger maximum allowable count rate. This standard describes two simple relationship for correction, which involves a
A parameter detection system known as dead time. Nonlinear some instruments can not be used a simple formula to predict or describe the relationship. These instruments, this
Criteria can be used to measure the degree of nonlinearity and determine the maximum count rate acceptable limits under linear discrete. This limit can be used for linear discrete
According to the analysis requirements of the user appropriately selected.
This standard provides two linear measuring methods. The principle is a method of the output signal is proportional to the AES spectrometer in the electron beam
Or XPS X-ray beam flux [1]. This is the easiest way, can be operated on the following instruments, these instruments beam or flux
It can be set to 30 or more approximately equally spaced, using a beam or flux until the maximum count rate of the standard required. But for
Some X-ray flux can set two or less than the predetermined value 30 the XPS spectrometer, a method can not be used, the method requires two [2].
When the identification of a new spectrometer, the need to work in order to make spectrometer count rates in the appropriate scope of this standard. In the following cases
You need to use the standard calibration. 1) After the detection circuit to make any substantive adjustment; 2) (the use of this standard since the last examination) multiplier
Voltage has increased after vendors increments of 1/3; 3) After replacing the electron multiplier; 4) spaced approximately 12 months later.
GB/T 21006-2007/ISO 21270.2004
Surface chemical analysis and X-ray photoelectron spectroscopy
Auger electron spectroscopy Linearity of intensity scale
1 Scope
This standard specifies two methods for the determination of AES and XPS spectrometer intensity scale maximum count within an allowable range of linear discrete limit
Data rate. It also includes a correction strength of the non-linear method so that the spectrometer can use a higher maximum count rate for spectrometers related
Correction formula has been proven to be effective.
2 Normative references
The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent
Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research
Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard.
ISO 18115 Surface chemical analysis - Vocabulary
3 Symbol
CuL3VV peak ECu --- measured energy value;
Energy value E j --- jth energy channels;
--- K constant;
MH (E j) --- high-intensity X-ray spectrum in the correction count rate at the energy E j;
NH (E j) --- high-intensity X-ray spectra measured count rates at the energy E j;
NL (E j) --- low intensity X-ray spectra measured count rates at the energy E j;
Nmax --- the system and that the system remains within the k (1 ± δ) given tolerance limit range of linear discrete maximum count rate;
± δ --- linear limit fraction;
τe --- extend the dead time;
τn --- non-extended dead time.
4. Summary
Linear two methods available instruments assess strength. First, the process of this standard provides a general method, which applies to the AES instrument
And X-ray flux may have 30 or more equally spaced and known incremental XPS spectrometer. This method is called to change the source flux method. For X
Ray flux only two or more but less than 30 settings XPS spectrometer, a method is not applicable; This standard provides a second method, the method is called
Do spectral ratio method.
In a method, the spectrometer must be equipped with an inert gas ion sputtering gun for cleaning the sample. Intensity scale linear measurement sputtering cleaned
The copper samples. The second method is also available sample; if not equipped with an ion gun, you can use stainless steel sample or sample holder. 6.1 description
He said the selection of the sample, 6.2 and 6.3 describes the preparatory steps of the sample. 6.4 describes the selection spectrometer settings 6.5 Description of the instrument
Operation.
GB/T 21006-2007/ISO 21270.2004
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