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GB/T 18994-2014: Gases for electronic industry -- High purity chlorine
Status: Valid GB/T 18994: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 18994-2014 | English | 209 |
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Gases for electronic industry -- High purity chlorine
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GB/T 18994-2014
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| GB/T 18994-2003 | English | 359 |
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Gases for electronic industry -- High purity chlorine
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GB/T 18994-2003
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PDF similar to GB/T 18994-2014
Basic data | Standard ID | GB/T 18994-2014 (GB/T18994-2014) | | Description (Translated English) | Gases for electronic industry -- High purity chlorine | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 9,956 | | Date of Issue | 12/12/2014 | | Date of Implementation | 7/1/2015 | | Older Standard (superseded by this standard) | GB/T 18994-2003 | | Quoted Standard | GB 190; GB/T 3723; GB 5099; GB/T 5832.3; GB 7144; GB 11984; GB 14193; GB 15258; GB 16804; GB/T 26571; GB/T 28726-2012 | | Regulation (derived from) | National Standards Bulletin 2014 No. 30 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | | Summary | This standard specifies the technical requirements for high-purity chlorine, test methods, inspection rules, packaging, labeling, transportation and storage. This standard applies to industrial liquid chlorine as raw material by physical adsorption proces | GB/T 18994-2014: Gases for electronic industry -- High purity chlorine---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Gases for electronic industry - High purity chlorine
ICS 71.100.20
G86
National Standards of People's Republic of China
Replacing GB/T 18994-2003
Electronics industry with high-purity chlorine gas
Issued on. 2014-12-22
2015-07-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard replaces GB/T 18994-2003 "electronic industrial gas purity chlorine." Compared with GB/T 18994-2003, in addition to editing
Modifications outside the main technical changes as follows.
--- Modify the scope (see Chapter 1, Chapter 1 of the 2003 edition);
--- Modify the normative references (see Chapter 2, Section 2 of the 2003 edition);
--- Revised technical requirements (see Chapter 3, 2003 edition of Chapter 3);
--- Modify the sample is determined (see 41, Chapter 5 of the 2003 edition.);
--- Deleting provisions (2003 edition 4.1) sampling device;
--- Modified oxygen, nitrogen, carbon monoxide, carbon dioxide, hydrocarbon content determination method (see 43, 2003 edition of the 4.3, 4.4.);
--- Increased the determination of the hydrogen content (see 4.3);
--- Modify the determination of moisture content (see 44, 2003 version 4.5.);
--- Increased the determination of metal element content (see 4.5);
--- Modify the logo, packaging, storage and security (see Chapter 5, Section 6 and 7 of the 2003 edition).
The standard equipment by the National Standardization Technical Committee and the semiconductor material (SAC/TC203) and focal points.
This standard was drafted. Southwest Chemical Industry Research and Design Institute Co., Ltd. Guangming Chemical Research and Design Institute, Foshan City, Walter Gas
Ltd., Shanghai, love Chromatography Technology Co., Ltd., Tai gas (Jingzhou) Co., Ltd., Shanghai-UNITA Technology Co., Ltd.
The main drafters of this standard. Zhoupeng Yun, Chang Xia, Liu Heng Yi, Fang Hua, Liu Xinming, Wang Zhenghong, Yang Ren.
This standard replaces the standards previously issued as follows.
--- GB/T 18994-2003.
Electronics industry with high-purity chlorine gas
1 Scope
This standard specifies the technical requirements for high-purity chlorine, test methods, inspection rules, packaging, labeling, transportation and storage.
This standard applies to industrial liquid chlorine as raw material by physical adsorption processes to produce high-purity chlorine products. The products are mainly used for large-scale
Field-scale integrated circuit technology, fiber optics, high temperature superconductivity, flat panel displays, solar energy.
Molecular formula. Cl2.
Molecular Weight. 70.90 (according to 2009 international relative atomic mass calculation).
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB 190 packaging and marking of dangerous goods
GB/T 3723 Sampling of chemical products for industrial use General Safety
GB 5099 seamless steel gas cylinders
5832.3 gas trace moisture measurement GB/T Part 3. cavity ring-down spectroscopy
GB 7144 cylinders color logo
GB 11984 Safety rules chlorine
GB 14193 Rules for filling of liquefied gas cylinders
GB 15258 rules for preparation of chemical safety labels
GB 16804 cylinders warning labels
GB/T 26571 Specification of special gas storage
GB/T 28726-2012 helium ionization gas analysis by gas chromatography
Gas Cylinder Safety Supervision (2000 Edition)
Dangerous Chemicals Regulations (2002 Edition)
Special Equipment Safety Supervision Regulations (2009 Edition)
3 Technical requirements
Technical requirements for high-purity chlorine should meet the requirements of Table 1.
Table 1 Technical Specifications
Item Index
The purity of chlorine (volume fraction)/10-2 ≥ 99.999 99.9995
Hydrogen (H2) content (volume fraction)/10-6 < 0.5 0.5
Oxygen (O2) content (volume fraction)/10-6 < 11
Nitrogen (N2) content (volume fraction)/10-6 < 21
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