Search result: GB/T 18867-2025 (GB/T 18867-2014 Older version)
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| GB/T 18867-2025 | English | 299 |
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Electronic gas - Sulphur hexaflouride
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GB/T 18867-2025
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| GB/T 18867-2014 | English | 259 |
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Gases for electronic industry -- Sulfur hexafluoride
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GB/T 18867-2014
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| GB/T 18867-2002 | English | 399 |
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Gases for electronic industry -- Sulfur hexafluoride
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GB/T 18867-2002
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| Standard ID | GB/T 18867-2025 (GB/T18867-2025) | | Description (Translated English) | Electronic gas - Sulphur hexaflouride | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 14,136 | | Date of Issue | 2025-04-25 | | Date of Implementation | 2025-11-01 | | Older Standard (superseded by this standard) | GB/T 18867-2014 | | Issuing agency(ies) | State Administration for Market Regulation, National Standardization Administration |
GB/T 18867-2025.Electronic gas sulfur hexafluoride
ICS 71.100.20
CCSG86
National Standard of the People's Republic of China
Replaces GB/T 18867-2014
Electronic gas sulfur hexafluoride
Released on 2025-04-25
2025-11-01 Implementation
State Administration for Market Regulation
The National Standardization Administration issued
Preface
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents"
Drafting.
This document replaces GB/T 18867-2014 "Gas Sulfur Hexafluoride for Electronic Industry". Compared with GB/T 18867-2014,
In addition to structural adjustments and editorial changes, the main technical changes are as follows.
--- Changed the scope (see Chapter 1, Chapter 1 of the.2014 edition);
--- Changed the technical requirements that sulfur hexafluoride should meet (see Chapter 4, Chapter 3 of the.2014 edition);
--- Changed the sampling requirements (see Chapter 5, 4.1.3, 4.1.5 of the.2014 edition);
--- Changed the purity calculation method (see 6.1, 4.2 of the.2014 edition);
--- Changed the determination method of oxygen argon, nitrogen, carbon tetrafluoride, carbon monoxide, carbon dioxide and methane content (see 6.2,.2014 edition
4.3);
--- Added the determination method of hydrogen, hexafluoroethane and octafluoropropane content (see 6.2);
--- Added requirements for exhaust gas treatment (see 6.6);
--- Changed the inspection rules (see Chapter 7, 4.1 of the.2014 edition);
--- Changed the requirements for marking, packaging, transportation and storage (see 8.1, 8.2, 5.1 of the.2014 edition);
--- Changed the content of safety information (see 8.3, 5.2 of the.2014 edition).
Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.
This document was proposed and coordinated by the National Technical Committee for Semiconductor Equipment and Materials Standardization (SAC/TC203).
This document was drafted by. Haohua Gas Co., Ltd., Fujian Del Technology Co., Ltd., Zhejiang Chemical Research Institute Co., Ltd.,
Fujian Yongjing Technology Co., Ltd., Shanghai Shangpeng Electric Co., Ltd., Beijing Purui Analytical Instruments Co., Ltd., Nanjing University of Science and Technology Optoelectronics (Zibo) Co., Ltd.
Co., Ltd., CSSC (Handan) Perri Special Gas Co., Ltd., Guangdong Huate Gas Co., Ltd., Fujian Hengshen Electronic Materials Technology
Co., Ltd., Haohua Gas Co., Ltd. Southwest Branch, Zhonghao Guangming Chemical Research and Design Institute Co., Ltd., Dalian Data Gas Co., Ltd.,
Shanghai Huaai Chromatography Analysis Technology Co., Ltd., Lianxiong Investment (Shanghai) Co., Ltd., Hangzhou New Century Mixed Gas Co., Ltd., Shenyang Zhongfu
Kejin Pressure Vessel Co., Ltd., Suzhou Ivite New Materials Co., Ltd., Beijing Ruixinjie Environmental Protection Technology Co., Ltd., Guangdong Power Grid Co., Ltd.
Served as the Electric Power Research Institute of the company, the Electric Power Research Institute of State Grid Shandong Electric Power Company, Shenzhen Power Supply Bureau Co., Ltd., State Grid Hunan Electric Power
Co., Ltd. Electric Power Science Research Institute, Shanghai Fanwei Instrument Equipment Co., Ltd., and Southwest Chemical Industry Research and Design Institute Co., Ltd.
The main drafters of this document are. Chen Xinglong, Tang Yuezhen, Chen Shihua, Lin Derong, Shi Wanjun, Zhong Huifei, Liu Chunhua, Li Wen, Chen Kai, Shi Lan,
Huang Xiurong, Zhang Yanzhi, Zhang Lulu, Chen Yanshan, Lü Lei, Xie Shipeng, Guo Qiong, Sun Funan, Yi Junting, Du Yutong, Fang Hua, Huang Hui, Yang Jinshan,
Bao Guangqiang, Wang Dawei, Li Ming, Tan Yiqiang, Yin Lele, Zhao Jie, Tang Nian, Li Li, Qi Guodong, Tang Feng, Wu Junjie, He Bo, Tang Zhongwei, Lai Xiaofeng,
Zhou Pengyun and Tang Xiamei.
This document was first published in.2002, revised for the first time in.2014, and this is the second revision.
Electronic gas sulfur hexafluoride
1 Scope
This document specifies the technical requirements, sampling, inspection rules, marking, packaging, transportation, storage of sulfur hexafluoride for electronic use, and describes the corresponding
The test method provides safety information for sulfur hexafluoride.
This document applies to sulfur hexafluoride for electronic use obtained by purifying industrial sulfur hexafluoride as raw material.
2 Normative references
The contents of the following documents constitute essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document.
GB 190 Dangerous Goods Packaging Marking
GB/T 4844 Pure helium, high purity helium and ultrapure helium
GB/T 5099 (all parts) Seamless steel gas cylinders
GB/T 5832.3 Determination of trace moisture in gases Part 3.Cavity ring-down spectroscopy
GB/T 7144 Color marking of gas cylinders
GB/T 11640 Aluminum alloy seamless gas cylinders
GB/T 12022 Industrial sulfur hexafluoride
GB/T 14193 Regulations for filling liquefied gas cylinders
GB 15258 Provisions for the preparation of chemical safety labels
GB/T 16804 Gas Cylinder Warning Label
GB/T 28726 Gas analysis - Helium ionization gas chromatography
GB/T 33145 Large volume seamless steel gas cylinders
GB/T 34528 Gas Cylinder Cluster Filling Regulations
GB/T 43306 Gas analysis sampling guide
TSG07 Rules for licensing of special equipment production and filling units
TSG23 Gas Cylinder Safety Technical Regulations
TSGR0005 Safety Technical Supervision Regulations for Mobile Pressure Vessels
3 Terms and definitions
There are no terms or definitions that require definition in this document.
4 Technical requirements
The technical requirements for sulfur hexafluoride shall comply with the provisions of Table 1.
......
GB/T 18867-2014
Gases for electronic industry - Sulfur hexafluoride
ICS 71.100.20
G86
National Standards of People's Republic of China
Replacing GB/T 18867-2002
Electronic industrial gas sulfur hexafluoride
Issued on. 2014-12-22
2015-07-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
Please note that some of the content of this document may involve patents. Release mechanism of the present document does not assume responsibility for the identification of these patents.
This standard replaces GB/T 18867-2002 "Electronic industrial gases sulfur hexafluoride." Compared with GB/T 18867-2002, except series
Series modifications outside the main technical changes are as follows.
--- Modify the scope (see Chapter 1, 2002 edition of the Chapter 1);
--- Modify the normative references (see Chapter 2, Section 2 of the 2002 edition);
--- Modify the technical specifications (see Chapter 3, Section 3 of the 2002 edition);
--- Modified sampling, determination and re-inspection (see 41, Chapter 5 of the 2002 edition.);
--- Modified oxygen, argon, nitrogen, carbon tetrafluoride, Determination of carbon dioxide content (see 43, 2002 version 4.2, 4.3.);
--- Removed hexafluoroethane, determination Octafluoropropane content (see 2002 edition 4.4);
--- Increased the determination of carbon monoxide and methane content (see 4.3);
--- Modify the determination of moisture content (see 44, 2002 version 4.5.);
--- Modify the logo, packaging, storage and security (see Chapter 5, Chapter 6, 2002 edition).
The standard equipment by the National Standardization Technical Committee and the semiconductor material (SAC/TC203) and focal points.
This standard was drafted. Dawn Chemical Research Institute Co., Ltd., Chengdu Branch US special Fluorine Plastic Co., Ltd., Qinghai high Xinhe
Fine Chemical Co., Ltd., Foshan City, Walter Gas Co., Ltd., Sichuan people of fluoride industry limited liability company, Shanghai, love Chromatography Technology Co.,
The company, Dalian special gas Co., Ltd., Sichuan measured standard material Technology Co., Ltd., Shanghai-UNITA Electronic Technology Co., Ltd., light chemical research
Design Institute, the amount of sea-based Standard Gas Co., Ltd. Southwest Chemical Industry Research and Design Institute, Institute of Physical and Chemical Engineering of Nuclear Industry China Nuclear New Technology
Art development company.
The main drafters of this standard. Huang Xiaolei, Niu Kun Laiming Gui Fu Tao, Liu Changqing, Renqing Gui, Shishu Hui, founder, Liu Heng Yi, Li Xiaoming,
Qu Qing, Yang Ren, Chang Xia, Yang Sui Ping, Deng Jianping, Fang Hua, Zhou Pengyun.
This standard replaces the standards previously issued as follows.
--- GB/T 18867-2002.
Electronic industrial gas sulfur hexafluoride
1 Scope
This standard specifies the technical requirements for sulfur hexafluoride, test methods, marking, packaging, storage and other security.
This standard applies to direct reaction with sulfur hexafluoride and fluorine refined and purified preparation. The products are mainly used in chemical industry electronic
Vapor deposition chamber cleaning agents and plasma etching or the like.
Molecular formula. SF6.
Molecular Weight. 146.0564192 (according to 2007 international relative atomic mass calculation).
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB 190 packaging and marking of dangerous goods
GB/T 3723 Sampling of chemical products for industrial use General Safety
GB 5099 seamless steel gas cylinders
Determination of GB/T 5832.1 gas humidity - Part 1. Electrolysis
5832.3 gas trace moisture measurement GB/T Part 3. cavity ring-down spectroscopy
GB 7144 cylinders color logo
GB/T 8170 repair value expressed about the rules and limit values \u200b\u200band judgment
GB/T 12022 Industrial sulfur hexafluoride
GB 14193 Rules for filling of liquefied gas cylinders
GB 15258 rules for preparation of chemical safety labels
GB 16804 cylinders warning labels
GB/T 26571 Specification of special gas storage
GB/T 28726-2012 helium ionization gas analysis by gas chromatography
Gas Cylinder Safety Supervision (2000 Edition)
Dangerous Chemicals Regulations (2002 Edition)
3 Requirements
Sulfur hexafluoride technical indicators should comply with the requirements in Table 1.
Table 1 Technical Specifications
Project Name Index
Sulfur hexafluoride (SF6) purity (volume fraction)/10-2 ≥ 99.999
(Oxygen-argon) (O2 Ar) content (volume fraction)/10-6 ≤ 2.0
Nitrogen (N2) content (volume fraction)/10-6 ≤ 2.0
......
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