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GB/T 18867-2025: Electronic gas - Sulphur hexaflouride
Status: Valid GB/T 18867: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 18867-2025 | English | 299 |
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Electronic gas - Sulphur hexaflouride
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GB/T 18867-2025
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| GB/T 18867-2014 | English | 259 |
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Gases for electronic industry -- Sulfur hexafluoride
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GB/T 18867-2014
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| GB/T 18867-2002 | English | 399 |
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Gases for electronic industry -- Sulfur hexafluoride
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GB/T 18867-2002
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PDF similar to GB/T 18867-2025
Basic data | Standard ID | GB/T 18867-2025 (GB/T18867-2025) | | Description (Translated English) | Electronic gas - Sulphur hexaflouride | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Classification of International Standard | 71.100.20 | | Word Count Estimation | 14,158 | | Date of Issue | 2025-04-25 | | Date of Implementation | 2025-11-01 | | Older Standard (superseded by this standard) | GB/T 18867-2014 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 18867-2025: Electronic gas - Sulphur hexaflouride---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 71.100.20
CCSG86
National Standard of the People's Republic of China
Replaces GB/T 18867-2014
Electronic gas sulfur hexafluoride
Released on 2025-04-25
2025-11-01 Implementation
State Administration for Market Regulation
The National Standardization Administration issued
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents"
Drafting.
This document replaces GB/T 18867-2014 "Gas Sulfur Hexafluoride for Electronic Industry". Compared with GB/T 18867-2014,
In addition to structural adjustments and editorial changes, the main technical changes are as follows.
--- Changed the scope (see Chapter 1, Chapter 1 of the.2014 edition);
--- Changed the technical requirements that sulfur hexafluoride should meet (see Chapter 4, Chapter 3 of the.2014 edition);
--- Changed the sampling requirements (see Chapter 5, 4.1.3, 4.1.5 of the.2014 edition);
--- Changed the purity calculation method (see 6.1, 4.2 of the.2014 edition);
--- Changed the determination method of oxygen argon, nitrogen, carbon tetrafluoride, carbon monoxide, carbon dioxide and methane content (see 6.2,.2014 edition
4.3);
--- Added the determination method of hydrogen, hexafluoroethane and octafluoropropane content (see 6.2);
--- Added requirements for exhaust gas treatment (see 6.6);
--- Changed the inspection rules (see Chapter 7, 4.1 of the.2014 edition);
--- Changed the requirements for marking, packaging, transportation and storage (see 8.1, 8.2, 5.1 of the.2014 edition);
--- Changed the content of safety information (see 8.3, 5.2 of the.2014 edition).
Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.
This document was proposed and coordinated by the National Technical Committee for Semiconductor Equipment and Materials Standardization (SAC/TC203).
This document was drafted by. Haohua Gas Co., Ltd., Fujian Del Technology Co., Ltd., Zhejiang Chemical Research Institute Co., Ltd.,
Fujian Yongjing Technology Co., Ltd., Shanghai Shangpeng Electric Co., Ltd., Beijing Purui Analytical Instruments Co., Ltd., Nanjing University of Science and Technology Optoelectronics (Zibo) Co., Ltd.
Co., Ltd., CSSC (Handan) Perri Special Gas Co., Ltd., Guangdong Huate Gas Co., Ltd., Fujian Hengshen Electronic Materials Technology
Co., Ltd., Haohua Gas Co., Ltd. Southwest Branch, Zhonghao Guangming Chemical Research and Design Institute Co., Ltd., Dalian Data Gas Co., Ltd.,
Shanghai Huaai Chromatography Analysis Technology Co., Ltd., Lianxiong Investment (Shanghai) Co., Ltd., Hangzhou New Century Mixed Gas Co., Ltd., Shenyang Zhongfu
Kejin Pressure Vessel Co., Ltd., Suzhou Ivite New Materials Co., Ltd., Beijing Ruixinjie Environmental Protection Technology Co., Ltd., Guangdong Power Grid Co., Ltd.
Served as the Electric Power Research Institute of the company, the Electric Power Research Institute of State Grid Shandong Electric Power Company, Shenzhen Power Supply Bureau Co., Ltd., State Grid Hunan Electric Power
Co., Ltd. Electric Power Science Research Institute, Shanghai Fanwei Instrument Equipment Co., Ltd., and Southwest Chemical Industry Research and Design Institute Co., Ltd.
The main drafters of this document are. Chen Xinglong, Tang Yuezhen, Chen Shihua, Lin Derong, Shi Wanjun, Zhong Huifei, Liu Chunhua, Li Wen, Chen Kai, Shi Lan,
Huang Xiurong, Zhang Yanzhi, Zhang Lulu, Chen Yanshan, Lü Lei, Xie Shipeng, Guo Qiong, Sun Funan, Yi Junting, Du Yutong, Fang Hua, Huang Hui, Yang Jinshan,
Bao Guangqiang, Wang Dawei, Li Ming, Tan Yiqiang, Yin Lele, Zhao Jie, Tang Nian, Li Li, Qi Guodong, Tang Feng, Wu Junjie, He Bo, Tang Zhongwei, Lai Xiaofeng,
Zhou Pengyun and Tang Xiamei.
This document was first published in.2002, revised for the first time in.2014, and this is the second revision.
Electronic gas sulfur hexafluoride
1 Scope
This document specifies the technical requirements, sampling, inspection rules, marking, packaging, transportation, storage of sulfur hexafluoride for electronic use, and describes the corresponding
The test method provides safety information for sulfur hexafluoride.
This document applies to sulfur hexafluoride for electronic use obtained by purifying industrial sulfur hexafluoride as raw material.
2 Normative references
The contents of the following documents constitute essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document.
GB 190 Dangerous Goods Packaging Marking
GB/T 4844 Pure helium, high purity helium and ultrapure helium
GB/T 5099 (all parts) Seamless steel gas cylinders
GB/T 5832.3 Determination of trace moisture in gases Part 3.Cavity ring-down spectroscopy
GB/T 7144 Color marking of gas cylinders
GB/T 11640 Aluminum alloy seamless gas cylinders
GB/T 12022 Industrial sulfur hexafluoride
GB/T 14193 Regulations for filling liquefied gas cylinders
GB 15258 Provisions for the preparation of chemical safety labels
GB/T 16804 Gas Cylinder Warning Label
GB/T 28726 Gas analysis - Helium ionization gas chromatography
GB/T 33145 Large volume seamless steel gas cylinders
GB/T 34528 Gas Cylinder Cluster Filling Regulations
GB/T 43306 Gas analysis sampling guide
TSG07 Rules for licensing of special equipment production and filling units
TSG23 Gas Cylinder Safety Technical Regulations
TSGR0005 Safety Technical Supervision Regulations for Mobile Pressure Vessels
3 Terms and definitions
There are no terms or definitions that require definition in this document.
4 Technical requirements
The technical requirements for sulfur hexafluoride shall comply with the provisions of Table 1.
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