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GB/T 17866-1999 English PDF

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GB/T 17866-1999: Guideline for programmed defect masks and benchmark procedures for sensitivity analysis of mask defect inspection systems
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GB/T 17866-1999English349 Add to Cart 3 days [Need to translate] Guideline for programmed defect masks and benchmark procedures for sensitivity analysis of mask defect inspection systems   GB/T 17866-1999

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Basic data

Standard ID GB/T 17866-1999 (GB/T17866-1999)
Description (Translated English) Guideline for programmed defect masks and benchmark procedures for sensitivity analysis of mask defect inspection systems
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard L56
Classification of International Standard 31.2
Word Count Estimation 10,166
Date of Issue 9/13/1999
Date of Implementation 6/1/2000
Quoted Standard GB/T 16880-1997; SJ/T 10584-1994
Adopted Standard SEMI P23-1993, IDT
Issuing agency(ies) State Quality and Technical Supervision
Summary This standard specifies the mask defect inspection system sensitivity.

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