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SJZ2927-1988 English PDF

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SJZ2927-1988: Terminology for mask-making equipment for integrated circuits manufacturing
Standard IDContents [version]USDSTEP2[PDF] delivered inStandard Title (Description)StatusPDF
SJ/Z 2927-1988English529 Add to Cart 3 days [Need to translate] Terminology for mask-making equipment for integrated circuits manufacturing   SJ/Z 2927-1988

PDF similar to SJZ2927-1988


Standard similar to SJZ2927-1988

SJ/T 11723   SJ/T 11634   GB/T 5593   SJ/T 11450   SJ/T 11183   SJ 21546   

Basic data

Standard ID SJ/Z 2927-1988 (SJ/Z2927-1988)
Description (Translated English) Terminology for mask-making equipment for integrated circuits manufacturing
Sector / Industry Electronics Industry Standard
Classification of Chinese Standard L97
Word Count Estimation 15,111
Date of Issue 3/10/1988
Date of Implementation 10/1/1988
Regulation (derived from) Industry-Science (2010) No. 77
Summary This standard applies to the development, use, testing and commissioning of integrated optical lithography major equipment.

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