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GB/T 34612-2017: Measurement method for X-ray double crystal diffraction rocking curve of sapphire crystals
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| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 34612-2017 | English | 199 |
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Measurement method for X-ray double crystal diffraction rocking curve of sapphire crystals
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GB/T 34612-2017
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Basic data | Standard ID | GB/T 34612-2017 (GB/T34612-2017) | | Description (Translated English) | Measurement method for X-ray double crystal diffraction rocking curve of sapphire crystals | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | H21 | | Classification of International Standard | 77.040 | | Word Count Estimation | 10,198 | | Date of Issue | 2017-10-14 | | Date of Implementation | 2018-05-01 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | GB/T 34612-2017: Measurement method for X-ray double crystal diffraction rocking curve of sapphire crystals
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Measurement method for X-ray double crystal diffraction rocking curve of sapphire crystals
ICS 77.040
H21
National Standards of People's Republic of China
Sapphire crystal X - ray double crystal diffraction rocking curve
Measurement methods
2017-10-14 Published
2018-05-01 implementation
General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
China National Standardization Administration released
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This standard by the National Semiconductor Equipment and Materials Standardization Technical Committee (SAC/TC203) and the National Semiconductor Equipment and Materials Standards
Technical Committee Sub-Technical Committee on Materials (SAC/TC203/SC2) co-sponsored and centralized.
This standard was drafted by the Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai Daheng Optical Precision Machinery Co., Ltd., China Branch
Institute of Physics and Technology Xinjiang Institute, Xinjiang Amethyst Optoelectronics Technology Co., Ltd., Jiangsu vast sapphire Technology Co., Ltd., Dandong New Oriental Crystal
Body Instrument Co., Ltd.
The main drafters of this standard. Hang Yin, Xu Min, Pan Shi Lie, Zhang Fang, Zhao Xingjian, Guo Honghe, Zhao Songbin.
Sapphire crystal X - ray double crystal diffraction rocking curve
Measurement methods
1 Scope
This standard specifies the sapphire crystal X-ray double crystal diffraction rocking curve measurement method.
This standard applies to the measurement of sapphire crystal X-ray double crystal diffraction rocking curve.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version applies to this article
Pieces. For undated references, the latest edition (including all amendments) applies to this document.
GB/T 14264 semiconductor materials terminology
3 Terms and definitions
GB/T 14264 and defined by the following terms and definitions apply to this document.
3.1
χ axis χaxis
The axis of the tilted sample is formed by the intersection of the diffraction plane formed by the incident X-ray and the diffracted X-ray beam with the sample surface.
3.2
χ angle χangle
The angle between a sample surface and the sample surface.
3.3
φ angle φangle
The sample stage rotates about the normal of the sample surface.
3.4
φ scan φscan
Change the angle φ continuously and record the diffraction intensity measurement mode.
3.5
ω angle ωangle
The angle between incident X-ray and sample surface.
3.6
ω scan ωscan
Change the ω angle continuously and record the diffraction intensity measurement mode.
4 method summary
4.1 The crystal is made up of a series of parallel ions, atoms or molecular planes with a spatial spacing d. When a beam of parallel monochromatic X-rays
Diffraction (reflection) takes place when this plane is entered and X-rays have an optical path difference between adjacent planes that is n times their wavelength. When incident
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