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GBZ32494-2016: Surface chemical analysis -- Auger electron spectroscopy -- Derivation of chemical information
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| GB/Z 32494-2016 | English | 359 |
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Surface chemical analysis -- Auger electron spectroscopy -- Derivation of chemical information
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GB/Z 32494-2016
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Basic data | Standard ID | GB/Z 32494-2016 (GB/Z32494-2016) | | Description (Translated English) | Surface chemical analysis -- Auger electron spectroscopy -- Derivation of chemical information | | Sector / Industry | National Standard | | Classification of Chinese Standard | G04 | | Word Count Estimation | 18,141 | | Date of Issue | 2016-02-24 | | Date of Implementation | 2017-01-01 | | Quoted Standard | GB/T 22461-2008 | | Adopted Standard | ISO/TR 18394-2006, IDT | | Regulation (derived from) | National Standard Announcement No | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China | GBZ32494-2016: Surface chemical analysis -- Auger electron spectroscopy -- Derivation of chemical information
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Surface chemical analysis - Auger electron spectroscopy - Derivation of chemical information
ICS 71.040.40
G04
People's Republic of China national standardization of technical guidance documents
Surface Chemical Analysis Auger Electron Spectroscopy
Analysis of chemical information
spectroscopy-Derivation of chemical information
(ISO /T R18394.2006, IDT)
2016-02-24 Published
2017-01-01 implementation
General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
China National Standardization Administration released
Directory
Foreword Ⅲ
Introduction IV
1 Scope 1
2 Normative references 1
3 Terms and definitions 1
4 Abbreviations 1
5 Auger Electron Spectroscopy chemical and solid state effects of the type 1
Chemical Effect Caused by 6-core Auger Electron Transition 2
6.1 Introduction 2
6.2 Auger electron energy chemical shift 2
6.3 Auger parameter chemical shift 3
6.4 Chemical State Figure 4
6.5 Auger electron energy and Auger parameter chemical shift database 5
6.6 The chemical effect of Auger electron satellites structure 5
6.7 CCC Auger line relative intensity and linear changes in the chemical effect 6
6.8 CCC Auger electron spectroscopy in the inelastic region of the chemical effect 6
Chemical Effect Caused by 7-core Auger Electron Transition 7
7.1 Introduction 7
7.2 Chemically-related lines of CCV and CVV Auger spectra 7
7.3 Analysis of CCV and CVV Auger spectral lines for local electronic structure information 10
References 11
Foreword
This instructional document has been drafted in accordance with the rules given in GB/T 1.1-2009.
This Guidance Document is translated using the equivalent ISO /T R 18394.2006 "Surface Chemical Analysis Auger Electron Spectroscopy
Learn information analysis. "
This guidance document is proposed and managed by the National Committee for Standardization Technical Committee of Microbeam Analysis (SAC/TC38).
This guideline is responsible for drafting the technical documents. Shanghai Institute of Ceramics, Chinese Academy of Sciences.
The main drafters of this technical guidance document Zhuozhang Jun, Shen Ru Xiang, Yu Ling, Liu Fen, Shen Hong, Ding Xun Min.
Introduction
This guidance document provides the chemical effects of identifying X-ray or electron-excited Auger spectroscopy and their use in chemical watches
Methodological guidelines.
Auger electron spectroscopy contains information about surface or interface elements, as well as information about the area around the atom with the initial vacancy at the core level
Information [1-5]. Changes in the Auger electron spectra due to changes in the surrounding environment are called chemical (or solid) effects. Right
The recognition of the effect of learning is of great importance to the correct quantitative analysis of Auger electron spectroscopy. It is of great importance to identify the chemical composition of the surface as well as the surface and interface
Sub-composition of the chemical state is also very helpful.
Surface Chemical Analysis Auger Electron Spectroscopy
Analysis of chemical information
1 Scope
This guidance document specifies the chemical effects of Auger spectroscopy identifying X-ray or electron excitation and their use in chemistry
Methodological criteria for characterization.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version applies to this article
Pieces. For undated references, the latest edition (including all amendments) applies to this document.
GB/T 22461-2008 Surface chemical analysis vocabulary (ISO 18115.2001, IDT)
3 Terms and definitions
ISO 18115 defines the terms and definitions apply to this document.
4 Abbreviations
CCC core level - core level - core level (Auger electronic transition)
CCV Core - Core - Valence (Auger Electron Transition)
CK Coster-Kronig (Coster-Kronig transition)
c-BN cubic boron nitride
CVV core - valence band - valence band (Auger electron transition)
h-BN hexagonal boron nitride
REELS Reflected Electron Energy Loss Spectrum
5 Auger electron spectroscopy chemical effects and solid-state effects of the type
In Auger electron spectroscopy, many types of chemical or solid-state effects can be observed [1-5]. An inner shell after the ionization of atoms,
Due to changes in its surrounding environment will lead to the emission of Auger electron kinetic energy displacement. In X-ray excited Auger electron spectroscopy
It is also possible to detect the energy of the Auger parameter (ie, the kinetic energy difference between the Auger peak and the corresponding core-level photoelectron peak during Auger electron emission)
Displacement. The Auger linearity, relative intensity and satellite structure (induced by the internal excitation of atoms) are greatly affected by chemical effects, and
The structure of the energy loss region associated with the eigenvector (induced by the electron-external electron scattering process) is also affected. Auger spectrum shape
The stronger chemical effect provides a way to identify chemical forms by means of "fingerprinting".
In electronically stimulated Auger electron spectroscopy, Auger peaks are generally superimposed on weak background peaks of high background. In large part, this
Species High background is caused by inelastic scattering of primary electrons in a solid sample. Therefore, it is usually recorded that the Auger electron differential spectrum (or
Based on the measured spectrum calculated differential spectrum), rather than the direct spectrum. This helps to observe and identify the Auger electron peak and also helps to measure the phase
The Auger transition should be. However, the differential spectrum magnifies the visibility of the intensity of stochastic fluctuations in recorded intensity, as shown in Figure 1. If needed from directly
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