| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | See Detail | Status | Related Standard |
| SJ/T 11763-2020 | English | 369 |
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Days<=4
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(Man-machine interface specification for semiconductor manufacturing equipment)
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SJ/T 11763-2020
| Valid |
SJ/T 11763-2020
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