| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | See Detail | Status | Related Standard |
| SJ/T 11761-2020 | English | 169 |
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Days<=3
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(Specification for loading ports of semiconductor equipment for wafers of 200mm and below)
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SJ/T 11761-2020
| Valid |
SJ/T 11761-2020
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