| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | See Detail | Status | Related Standard |
| SJ 21629-2021 | English | 469 |
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Days<=4
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(Process verification method for silicon carbide (SiC) epitaxial growth equipment)
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SJ 21629-2021
| Valid |
SJ 21629-2021
|