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JB/T 5630-1991 PDF English

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JB/T 5630-1991: Diffusion furnace for semiconductor devices. Grading of energy consumption
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JB/T 5630-1991English199 Add to Cart 2 days [Need to translate] Diffusion furnace for semiconductor devices. Grading of energy consumption

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Basic data

Standard ID JB/T 5630-1991 (JB/T5630-1991)
Description (Translated English) Diffusion furnace for semiconductor devices. Grading of energy consumption
Sector / Industry Mechanical & Machinery Industry Standard (Recommended)
Classification of Chinese Standard J01
Word Count Estimation 4,416
Date of Issue 9/13/1991
Date of Implementation 7/1/1992
Summary This standard provides a semiconductor device diffusion furnace energy classification. This standard applies to companies in the electronics industry semiconductor device manufacturing processes used for various diffusion, oxidation, annealing and alloy technology and other materials for special treatment for diffusion furnace.

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