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GB/T 32293-2015: Vacuum technology -- Selection of leak test methods for vacuum equipment
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Basic data

Standard ID GB/T 32293-2015 (GB/T32293-2015)
Description (Translated English) Vacuum technology -- Selection of leak test methods for vacuum equipment
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard J78
Classification of International Standard 23.160
Word Count Estimation 19,124
Date of Issue 2015-12-10
Date of Implementation 2016-07-01
Quoted Standard GB/T 3163; GB/T 9445
Regulation (derived from) National Standard Announcement 2015 No.38
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China
Summary This standard specifies the personnel qualification requirements, general requirements, safety requirements for leak detection, selection procedures and selection principles, and characteristic parameters of leak detection methods for vacuum equipment leak detection methods. This standard applies to the selection of vacuum equipment leak detection methods. The applicable vacuum equipment includes vacuum vessel, vacuum pipe, vacuum pump, vacuum valve, vacuum coating equipment, vacuum drying equipment, vacuum freeze drying equipment, surface analysis equipment, vacuum metallurgy equipment, space Environmental simulation equipment, semiconductor production equipment, such as vacuum equipment. Selection of leak detection methods for other equipment in operation involving a vacuum may also be performed with reference to this standard.

GB/T 32293-2015: Vacuum technology -- Selection of leak test methods for vacuum equipment


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Vacuum technology - Selection of leak test methods for vacuum equipment ICS 23.160 J78 National Standards of People's Republic of China Vacuum technology - Vacuum equipment - Leak detection method selection 2015-12-10 released 2016-07-01 implementation General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China China National Standardization Management Committee released Directory Preface III 1 Scope 1 2 normative reference document 1 3 Terms and definitions 1 4 Personnel Qualification 1 5 General requirements 2 6 Summary of leak detection method 2 7 Leak detection method selection procedure 3 8 selection of leak detection method 3 9 leak detection 5 Appendix A (Normative Appendix) Leakage correction for different leak conditions 6 Appendix B (normative appendix) Vacuum equipment commonly used leak detection method and the main characteristics of the parameters 8 Appendix C (informative) Vacuum equipment Other leak detection methods and main characteristic parameters 10

Foreword

This standard is drafted in accordance with the rules given in GB/T 1.1-2009. This standard is proposed by the China Machinery Industry Federation. This standard is under the jurisdiction of the National Vacuum Technology Standardization Technical Committee (SAC/TC18). The drafting of this standard. Beijing Institute of Satellite Environmental Engineering, China Institute of Space Technology Lanzhou Institute of Space Technology and Physics, Anhui Anhui Instrument Technology Co., Ltd., Taizhou Global Vacuum Equipment Manufacturing Co., Ltd., Hunan Weige Magneto-Fluid Co., Ltd., Zhongshan Triumph Really Air Technology Engineering Co., Ltd., Weihai Zhide Vacuum Technology Co., Ltd., Dongguan Jin Sheng Precision Components Co., Ltd., Shenyang vacuum technology research Institute. The main drafters of this standard. Sun Lichen, Shi Jijun, Li Derian, Liu Enjun, Wang Li, Yan Rongxin, Zhang Chunyuan, Sun Gang, Chen Guangqi, Liu Lei, Huang Wenping, Zhao Weisheng, Zhao Jichun, Yan Jichun, Wang Gongfa, Yan Runquan, Gao Feng, Hu Shuangli, Lin Lezhong, Wang Changming, Wang Lingling. Vacuum technology - Vacuum equipment - Leak detection method selection

1 Scope

This standard specifies the personnel requirements for the selection of leak detection methods for vacuum equipment, general requirements, safety requirements for leak detection, selection procedures And the selection principle, the characteristic parameter of the leak detection method. This standard applies to the selection of leak detection methods for vacuum equipment. Suitable vacuum equipment includes vacuum containers, vacuum pipes, vacuum pumps, vacuum valves Door, vacuum coating equipment, vacuum drying equipment, vacuum freeze-drying equipment, surface analysis equipment, vacuum metallurgy equipment, space environment simulation set Equipment, such as semiconductor equipment, vacuum equipment. Please refer to this standard for the selection of leak detection methods for other equipment in the vacuum state carried out.

2 normative reference documents

The following documents are indispensable for the application of this document. For dated references, only the dated edition applies to this article Pieces. For undated references, the latest edition (including all modifications) applies to this document. Vacuum Technology Terminology GB/T GB/T 9445 Non - destructive testing personnel qualification and certification

3 terms and definitions

The following definitions and definitions as defined in GB/T 3163 apply to this document. 3.1 Leakage leakagerate Under certain conditions, the flow of a particular gas through the leak. 3.2 Effective minimum leak rate effectiveminimumdetectableleakagerate qemin Under the specific working conditions, the leak detection method can detect the minimum leakage rate. 3.3 Allow leak rate acceptableleakagerate Vacuum equipment can work to accept the maximum leakage rate. 3.4 Viscous leaks The mass flow rate of the leak is inversely proportional to the viscosity of the flowing gas. 3.5 Molecular leakage The mass flow rate of the leak is proportional to the reciprocal of the square root of the flow gas molecular weight.

4 Personnel qualification

It is recommended that the personnel who have selected the leak detection method should have Level 2 or Level 2 required by GB/T 9445. ...

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