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Vacuum technology -- Sputter-ion pumps -- Measurement of performance characteristics
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Basic data
| Standard ID | GB/T 25755-2010 (GB/T25755-2010) |
| Description (Translated English) | Vacuum technology -- Sputter-ion pumps -- Measurement of performance characteristics |
| Sector / Industry | National Standard (Recommended) |
| Classification of Chinese Standard | J78 |
| Classification of International Standard | 23.160 |
| Word Count Estimation | 13,113 |
| Date of Issue | 2010-12-23 |
| Date of Implementation | 2011-10-01 |
| Quoted Standard | GB/T 3163 |
| Regulation (derived from) | National Standard Approval Announcement 2010 No.10 (Total No.165) |
| Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China |
| Summary | This standard specifies the methods of measurement sputter ion pump (hereinafter referred to as the ion pump) performance parameters. This standard applies to the nominal volume flow rate of greater than 10 L/s ion pump. |
GB/T 25755-2010: Vacuum technology -- Sputter-ion pumps -- Measurement of performance characteristics
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Vacuum technology. Sputter-ion pumps. Measurement of performance characteristics
ICS 23.160
J78
National Standards of People's Republic of China
Measuring vacuum technology sputter ion pump performance parameters
characteristics
Issued on. 2010-12-23
2011-10-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
The standard proposed by China Machinery Industry Federation.
The vacuum technology standard by the National Standardization Technical Committee (SAC/TC18) centralized.
This standard was drafted. Beijing KYKY Technology Development Co., Ltd., Shenyang Institute of Vacuum Technology.
The main drafters of this standard. Zou Meng, Zhang Qin Germany, Zhu Guo Jing, Ma Dian Li, Li shadow.
Measuring vacuum technology sputter ion pump performance parameters
1 Scope
This standard specifies the method for measuring sputter ion pump (hereinafter referred to as the ion pump) performance parameters.
This standard applies to nominal volumetric flow rate of greater than 10L/s ion pump.
The standard measurement of the volume flow rate of the pressure range from 1.5 × 10-3Pa to 1 × 10-7Pa.
Note. This standard ensures that the ion pump performance parameters measured under the same conditions in the same manner. Thus do by the manufacturer or laboratories
Measurements made with the manufacturers in a given sample data is comparable.
2 Normative references
The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent
Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research
Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard.
GB/T 3163 vacuum technical terms (GB/T 3163-2007, ISO 3529. 1981, MOD).
3 Terms and Definitions
GB/T 3163 and established the following terms and definitions apply to this standard.
3.1
Extreme pressure ultimatepressure
Test cover gradually approaching pressure.
Note 1. It is the lowest pressure of the pump can be obtained.
Note 2. It is recommended not to the manufacturer's instructions given limit pressure value. This standard does not give ultimate pressure measurement procedures. However, if the manufacturer lists the limit
Pressure, it should be noted that the completion of the measurement conditions.
3.2
Minimum working pressure minimumoperationalpressure
p0
Closing the intake valve at the pump, after the end of the baking process 48h internal tests cover approaching the minimum pressure.
Volumetric flow rate volumeflowrate
qV
Under ideal conditions, the volume of gas flow per unit time from the test ion pump inlet cover.
Note 1. For the reasons actual measured ion pump for a given volume of gas flow rate is generally agreed to be equal to the flow of the gas is given a point of equilibrium pressure
Manufacturers, using volumetric flow rate units of cubic meters per second (m3/s) or liters per second (L/s).
Note 2. Sometimes the term "pumping speed" and the symbol "s" instead of the volumetric flow rate.
3.3
Nominal pumping speed nominalpumpingspeed
Sn
The maximum value of the ion pump saturation measured volumetric flow rate is referred to as the nominal pumping speed.
Note 1. This test should be given in the nominal pumping speed measured pressure p.
Note 2. If the nominal pumping speed of an ion pump as a symbol, it is generally not exceed 10% of the actual measured values.
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