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YS/T 987-2021: (Determination of carbon content in chlorosilanes by gas chromatography-mass spectrometry)
Status: Valid YS/T 987: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| YS/T 987-2021 | English | 219 |
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(Determination of carbon content in chlorosilanes by gas chromatography-mass spectrometry)
| Valid |
YS/T 987-2021
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| YS/T 987-2014 | English | 359 |
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Test method for measuring carbon containing compound in chlorosilane. Determination of methyldichlorosilane
| Obsolete |
YS/T 987-2014
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PDF similar to YS/T 987-2021
Basic data | Standard ID | YS/T 987-2021 (YS/T987-2021) | | Description (Translated English) | (Determination of carbon content in chlorosilanes by gas chromatography-mass spectrometry) | | Sector / Industry | Nonferrous Metallurgy Industry Standard (Recommended) | | Classification of Chinese Standard | H17 | | Word Count Estimation | 9,940 | | Issuing agency(ies) | Ministry of Industry and Information Technology | YS/T 987-2014: Test method for measuring carbon containing compound in chlorosilane. Determination of methyldichlorosilane
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Test method for measuring carbon containing compound in chlorosilane.Determination of methyldichlorosilane
ICS 77.040.30
H17
People's Republic of China Nonferrous Metals Industry Standard
Determination of carbon impurities in the chlorosilane
Determination of silicon hydrogen methyldichlorosilane
Issued on. 2014-10-14
2015-04-01 implementation
Ministry of Industry and Information Technology of the People's Republic of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) centralized.
This standard is drafted by. Sichuan Xinguang Silicon Technology Co., Ltd.
Participated in the drafting of this standard. Leshan Electric Tianwei Silicon Technology Co., Ltd., Dongfang Electric Group Emei Semiconductor Materials Co.,
SECRETARY Shaanxi Tianhong Silicon Material Co., Ltd., Luoyang Sino-silicon High-tech Co., Nanjing Germanium Technology Co., Ltd., the new special energy stocks
Limited copies.
The main drafters of this standard. Ao Xiping, Wang Bo, Huang Diovan, Liang Hong, Liu Chang, Yao Shu, Jing Fan, Yangyan Fen, silver wave, Huang Bin.
Determination of carbon impurities in the chlorosilane
Determination of silicon hydrogen methyldichlorosilane
1 Scope
This standard specifies the method for the determination of carbon impurities in the chlorosilane, including determination of trichlorosilane methyldichlorosilane hydrogen silicon and silicon tetrachloride
Determination of methyldichlorosilane hydrogen silicon.
This standard applies to the determination of silicon measured trichlorosilane hydrogen methyldichlorosilane silicon tetrachloride and methyl dichloro hydrogen in silicon. Trichlorosilane, four
Detection range of silicon tetrachloride silicon hydrogen methyldichlorosilane are from 0.00001% to 1.00%.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 4844.3 high purity helium
3 PRINCIPLE OF THE METHOD
This standard uses of 1,2-dichloroethane as an internal standard, using gas chromatography - Determination of trichlorosilane and silicon tetrachloride mass spectrometer (GC-MS)
Methyldichlorosilane hydrogen content of silicon. Gas chromatography - mass spectrometry polar capillary column through the body and carbon trichlorosilane or silicon tetrachloride
Separated impurities, to determine its retention time. The use of purge gas chromatography trichlorosilane or silicon tetrachloride after the main discharge, carbon hybrid
Substance introduction mass spectrometers. Gas chromatography - mass spectrometry qualitative mode sample trichlorosilane and silicon tetrachloride carbon impurities in full
Scan analysis, only found in the presence of hydrogen methyldichlorosilane silicon ion peak of this standard, mainly trichlorosilane or silicon tetrachloride methyldichlorosilane
Hydrosilicon analysis.
4 Reagents and materials
Unless otherwise indicated, the use of reagents or materials comply with national standards of analysis.
4.1 Helium, shall comply with the provisions of GB/T 4844.3 of.
4.2 methyldichlorosilane hydrogen silicon, chromatography.
4.3 1,2-dichloroethane, chromatography.
4.4 n-octane, chromatography.
4.5 trichlorosilane, pure spectrum.
4.6 silicon tetrachloride, pure spectrum.
5 instruments and equipment
5.1 Gas chromatography - mass spectrometry
Under optimum working conditions for those who can reach the following indicators can be used.
a) each of the temperature control gas chromatography. temperature range better than 20 ℃ ~ 300 ℃;
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