YS/T 983: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| YS/T 983-2024 | English | RFQ |
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(Determination of tail gas composition in silicon polycrystalline reduction furnace - Gas chromatography)
| Valid |
YS/T 983-2024
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| YS/T 983-2014 | English | 279 |
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Test method for measuring composition of polysilicon deposition reactor and TCS to STC converter vent gas
| Obsolete |
YS/T 983-2014
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Basic data | Standard ID | YS/T 983-2024 (YS/T983-2024) | | Description (Translated English) | (Determination of tail gas composition in silicon polycrystalline reduction furnace - Gas chromatography) | | Sector / Industry | Nonferrous Metallurgy Industry Standard (Recommended) | | Classification of Chinese Standard | H17 | | Classification of International Standard | 77.04 | | Date of Issue | 2024-10-24 | | Date of Implementation | 2025-05-01 | | Older Standard (superseded by this standard) | YS/T 983-2014 | | Issuing agency(ies) | Ministry of Industry and Information Technology | | Summary | This standard specifies the method for determining the components in the tail gas of silicon polycrystalline reduction furnace by gas chromatography. This standard is applicable to the determination of the components of the tail gas of silicon polycrystalline reduction furnace produced by trichlorosilane method. | YS/T 983-2014: Test method for measuring composition of polysilicon deposition reactor and TCS to STC converter vent gas
---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Test method for measuring composition of polysilicon deposition reactor and TCS to STC converter vent gas
ICS 77.040
H17
People's Republic of China Nonferrous Metals Industry Standard
Polysilicon reduction furnace and furnace exhaust hydrogenation component
test methods
Issued on. 2014-10-14
2015-04-01 implementation
Ministry of Industry and Information Technology of the People's Republic of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) centralized.
This standard is drafted by. Sichuan Xinguang Silicon Technology Co., Ltd.
Participated in the drafting of this standard. Tianwei Sichuan Silicon Industry Co., Ltd., Leshan Electric Tianwei Silicon Technology Co., Ltd., Emei half
Institute of conductive material, Shaanxi Tianhong Silicon Material Co., Ltd., Luoyang Sino-silicon high-tech Co., Ltd.
The main drafters of this standard. Ao Xiping, Wang Bo, Liang Hong, Liu Chang, Zhang end, the ancient line of dry, King Ali.
Polysilicon reduction furnace and furnace exhaust hydrogenation component
test methods
1 Scope
This standard specifies the method for determination of polysilicon reduction furnace and furnace exhaust hydrogenation component.
This standard applies to improved Siemens process furnace and hydride reduction furnace exhaust components (hydrogen, hydrogen chloride, trichlorosilane, and dichloro-dihydro-silicon
Silicon tetrachloride) measurement. Detection range of the volume fraction of 0.1% to 100%.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 7445 purity, high purity and ultra pure hydrogen
GB/T 8979 nitrogen, high purity nitrogen and ultra pure nitrogen
3 Method summary
According to the boiling point of the respective components in the exhaust gas, and the polarity of adsorption difference by gas chromatography to separate the individual components from the column, mining
Detected content with a thermal conductivity detector (TCD).
4 confounding factors
4.1 Sample temperature should not be below 50 ℃, otherwise the sample part chlorosilane group branch condensation, analysis results to lose representation.
4.2 exhaust pressure should be maintained in a suitable range, and not too difficult to operate safe, easily lead to too small a sample can not be collected until the sample container
Inside.
4.3 of the sample container should be kept closed, otherwise leakage will affect the accuracy of the sample analysis results.
5 Reagents and materials
Unless otherwise indicated, the use of reagents or materials comply with national standards of analysis.
5.1 high-purity hydrogen shall comply with the provisions of GB/T 7445's.
5.2 high-purity nitrogen, shall comply with the provisions of GB/T 8979's.
6 instruments and equipment
6.1 Gas chromatograph. with a thermal conductivity detector.
6.2 Injector. 1mL gas tight glass syringe.
6.3 Sample container. volume of about 250mL.
6.4 Columns. length 1m ~ 2m, the inner diameter of 5mm, filled with silane material columns, other columns or equivalent material.
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