Search result: YS/T 1129-2016
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Tungsten titanium alloy sputtering target
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YS/T 1129-2016
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| Standard ID | YS/T 1129-2016 (YS/T1129-2016) | | Description (Translated English) | Tungsten titanium alloy sputtering target | | Sector / Industry | Nonferrous Metallurgy Industry Standard (Recommended) | | Classification of Chinese Standard | H72 | | Word Count Estimation | 10,140 | | Date of Issue | 2016-07-11 | | Date of Implementation | 2017-01-01 | | Regulation (derived from) | Notice of the Ministry of Industry and Information Technology (2016 No. 37) | | Issuing agency(ies) | Ministry of Industry and Information Technology of the People's Republic of China | | Summary | This standard specifies the requirements, test methods, inspection rules, signs, packaging, transportation, storage, quality certificates and order forms (or contracts) for tungsten-titanium alloy target blanks for sputtering. |
YS/T 1129-2016
Tungsten titanium alloy sputtering target
ICS 77.160
H72
People's Republic of China Nonferrous Metals Industry Standard
Tungsten titanium alloy target
2016-07-11 released
2017-01-01 Implementation
Issued by the Ministry of Industry and Information Technology of the People's Republic of China
Preface
This standard is drafted in accordance with the rules given in GB/T 1.1-2009.
This standard is proposed by the National Committee for Standardization of Nonferrous Metals (SAC/TC243).
The drafting of this standard. Xi'an Ruifu Lai tungsten molybdenum Co., Ltd., Beijing Tianlong tungsten molybdenum Technology Co., Ltd., Xiamen Honglu tungsten molybdenum industry
Limited company.
The main drafters of this standard. Li Changliang, Ren Jiwen, Liu Yunfei, Su Guoping, Bai Feng, Han Ruirui.
Tungsten titanium alloy target
1 Scope
This standard specifies the requirements, test methods, inspection rules, marking, packaging, transportation, storage, quality certification of sputtering tungsten and titanium alloy target blanks
Books and orders (or contracts) and so on.
This standard applies to tungsten titanium alloy sputtering target processing target blank.
2 normative reference documents
The following documents are indispensable for the application of this document. For dated references, only the dated edition applies to this article
Pieces. For undated references, the latest edition (including all modifications) applies to this document.
GB/T 3850 method for the determination of densified sintered metal and hard alloy
GB/T 4324 (all parts) tungsten chemical analysis method
GB/T 6394 Determination of average grain size of metals
GB/T 8651 metal plate ultrasonic board wave detection method
General rules for the analysis of hydrogen, oxygen, nitrogen, carbon and sulfur in metallic materials GB/T
YS/T 901 Methods for chemical analysis of high purity tungsten - Determination of trace impurity elements Glow discharge mass spectrometry
3 request
3.1 Classification
3.1.1 products according to the shape of circular, rectangular.
3.1.2 The product is divided into WTi-99.9, WTi-99.95, WTi-99.99, WTi-99.995, WTi-99.999 according to chemical composition.
3.2 Chemical composition
The chemical composition of the product shall comply with the provisions of Table 1, where the tungsten content of 100% minus the total amount of non-gas impurities measured in the table.
Table 1 Chemical composition
element
Grade
WTi-99.9 WTi-99.95 WTi-99.99 WTi-99.995 WTi-99.999
Tungsten content (mass fraction) /%, not less than 99.9 99.95 99.99 99.995 99.999
Alloying element content
(Mass fraction) /%
W margin
Ti 5 to 15
Non - gas impurity content
(Mass fraction) /%
(× 10-6), not more than
Al 20 15 10 5 3
Ca 10 5 3 2 1
Cr 15 10 8 5 5
Cu 5 5 1 1 1
......
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