YS/T 1063-2015 (YS/T1063-2015, YST 1063-2015, YST1063-2015)
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| YS/T 1063-2015 | English | 189 |
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Molybdenum target
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YS/T 1063-2015
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Standards related to: YS/T 1063-2015
| Standard ID | YS/T 1063-2015 (YS/T1063-2015) | | Description (Translated English) | Molybdenum target | | Sector / Industry | Nonferrous Metallurgy Industry Standard (Recommended) | | Classification of Chinese Standard | H72 | | Classification of International Standard | 77.16 | | Word Count Estimation | 8,886 | | Date of Issue | 2015-04-30 | | Date of Implementation | 2015-10-01 | | Quoted Standard | GB/T 3876; GB/T 4196; GB/T 4197; GB/T 4325.1; GB/T 4325.2; GB/T 4325.3; GB/T 4325.4; GB/T 4325.5; GB/T 4325.6; GB/T 4325.7; GB/T 4325.8; GB/T 4325.9; GB/T 4325.10; GB/T 4325.11; GB/T 4325.12; GB/T 4325.13; GB/T 4325.14; GB/T 4325.15; GB/T 4325.16; GB/T 4325.17; GB/T 4325.18 | | Drafting Organization | Xi An Ruifu Lai tungsten and molybdenum Limited | | Administrative Organization | National Standardization Technical Committee for Nonferrous Metals | | Regulation (derived from) | Ministry of Industry and Information Technology Announcement (2015 No. 28) | | Proposing organization | National Non-Ferrous Metals Standardization Technical Committee (SAC/TC 243) | | Issuing agency(ies) | Ministry of Industry and Information Technology of the People's Republic of China | | Summary | This standard specifies the requirements, test methods, inspection rules, marking, packaging, transportation, storage, quality certificate and contract (or purchase order) contents of molybdenum target for sputtering coating. This standard applies to the use of powder metallurgy sintering and sintering and then pressure processing method of manufacturing molybdenum target, the material is mainly applied to photovoltaic solar panels, flat panel displays and touch screen panel manufacturing and other industries. | YS/T 1063-2015
Molybdenum target
ICS 77.160
H72
People's Republic of China Nonferrous Metals Industry Standard
Molybdenum Target
Issued on. 2015-04-30
2015-10-01 implementation
Ministry of Industry and Information Technology of the People's Republic of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) and focal points.
This standard was drafted. 西安瑞福莱 tungsten and molybdenum Co., Ltd., Beijing Tianlong tungsten and molybdenum Technology Co., Ltd., Ningbo Jiang Feng Electronic Materials
Co., Ltd., North mine New Material Technology Co., Ltd., Hunan Nonferrous New Material Technology Co., Ltd., Yixing Kexing Alloy Material Co., Ltd.
There RESEARCH billion of New Materials Co., Ltd.
The main drafters of this standard. light new country, Hou Juntao, Li Changliang, Su Guoping, Wang Xueze, Liu Jun, Li, Yu Ye, Xiong.
Molybdenum Target
1 Scope
This standard specifies the use of molybdenum sputtering target material requirements, test methods, inspection rules, marking, packaging, transportation, storage, quality certificate
And contracts (or orders) content.
This standard applies to the use of powder metallurgy sintering method and then sintering pressure processing method for producing a molybdenum target, the target is mainly applied to
Photovoltaic solar panels, flat panel displays and touch screen panel manufacturing and other industries.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 3876 molybdenum and molybdenum alloy plate
GB/T 4196 tungsten, molybdenum density determination
GB/T 4197 tungsten, molybdenum and alloys sintered bar, bar grain size test methods
GB/T 4325 (all parts), chemical analysis of molybdenum
GB/T 17792 molybdenum and molybdenum alloy rods
YS/T 837 sputtering targets - back binding quality ultrasonic inspection
JB/T 4009-contact ultrasonic longitudinal wave direct detection method
3 Requirements
3.1 Categories
Products by supplier and sintered state is divided into two types of state pressure processing, manufacturing method, supply condition and shape are shown in Table 1.
Table 1 Product manufacturing methods, supply condition and shape
Delivery method for producing state shape
Sintering - machining sintered
Sintering - pressure processing - recrystallization annealing - machining pressure processing state
Rectangular tubular
3.2 Chemical composition
Chemical composition of the target should be in accordance with Table 2.
3.3 Density
Sintered density of the target should be greater than 9.6g/cm3; working pressure should be greater than the density of the target states 10.0g/cm3.
3.4 Grain Size
Target grain size should be consistent with the provisions in Table 3, and grain distribution.
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