YS/T 1059-2015 (YST1059-2015)

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YS/T 1059-2015	English	249	Add to Cart	3 days [Need to translate]	Determination of total carbon content in trichlorosilane for silicon eqitaxy - Gas chromatographic method	YS/T 1059-2015		YS/T 1059-2015

YS/T 1059-2015
(Epitaxial silicon with trichlorosilane total carbon by Gas Chromatography)
ICS 77.040.30
H17
People's Republic of China Nonferrous Metals Industry Standard
Determination of silicon epitaxy with trichlorosilane total carbon
Gas chromatography
Issued on. 2015-04-30
2015-10-01 implementation
Ministry of Industry and Information Technology of the People's Republic of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) and focal points.
This standard was drafted. Germanium Technology Co., Ltd. Kunming Metallurgical Institute New Materials Co., Limited Jiangsu Zhongneng Polysilicon Technology Development
The company, New Energy Co., Ltd. special.
The main drafters of this standard. Liu Yingjie, Zheng Huarong, Kezun Bin, Liu Xinjun, as Zhao, Xia Wang Tao, Zhang Jing, Zhang Yunhui, Yang Hongyan, Chen Xiqing,
Yang Shuai.
Determination of silicon epitaxy with trichlorosilane total carbon
Gas chromatography
1 Scope
This standard specifies the gas chromatographic method using trichlorosilane silicon epitaxial total carbon content.
This standard applies to the epitaxial silicon with trichlorosilane Determination of total carbon content was measured in the range of 0.00005% to 0.005%.
2 Method summary
Trichlorosilane sample into the gas chromatograph in an inert gas, wherein the carbonaceous component in high temperature, hydrogen-rich reduction furnace to fully transfer
Into methane and methane content is detected with a flame ionization detector, trichlorosilane calculated the total carbon content. Conversion reactions are as follows.
HxSiCyClz 1/2 (z 4y-x) H2
850 ℃
→ Si zHCl yCH4
3 Reagents and materials
3.1 hydrogen volume fraction ≥99.999%.
3.2 an inert gas, the volume fraction ≥99.999%.
3.3 compressed air, drying by charcoal.
3.4 acetone, AR.
3.5 standard methane gas, hydrogen gas was added.
4 Equipment
4.1 Gas chromatograph. equipped with a flame ionization detector (FID), hydrogen reduction furnace, and the corresponding chromatography workstation.
4.2 Columns. carbon molecular sieve column or other equivalent column, size φ3mm × 50cm.
4.3 hydrogen reduction furnace. the furnace is equipped with a long 40cm, inner diameter of about 3mm built quartz sand quartz tube.
4.4 micro syringe. 10μL.
5 disturbances
5.1 Samples should be placed in the refrigerator freezer to save, prevent sample evaporation loss.
5.2 Indoor humidity should be controlled below 40%, to prevent the influence of humidity on the sample.
5.3 Inert gas operated air box must be replaced with a clean high-purity gases, otherwise the sample hydrolysis, affect the test results.
5.4 Samples should avoid contact with organic materials, instruments sampling system to avoid the introduction of organic matter; otherwise it will cause high test results.
Step 6 Analysis
Warning. Pipette trichlorosilane sample to prevent sample leakage. It recommends transferring samples under an inert gas, and wear protective equipment.