YS/T 1031-2015 (YST1031-2015)

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YS/T 1031-2015	English	209	Add to Cart	3 days [Need to translate]	Chemical vapor deposition furnace	YS/T 1031-2015	Valid	YS/T 1031-2015

YS/T 1031-2015
(CVD furnace)
ICS 77.180
H91
People's Republic of China Nonferrous Metals Industry Standard
CVD furnace
Issued on. 2015-04-30
2015-10-01 implementation
Ministry of Industry and Information Technology of the People's Republic of China released
Foreword
This standard was drafted in accordance with GB/T 1.1-2009 given rules.
This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) and focal points.
This standard was drafted. Hunan top legislature Technology Co., Ltd., China Nonferrous Metals Industry Standards and Metrology Institute for Quality.
The main drafters of this standard. Dai Yu, Hu Xianglong, Hugao Jian, Yang Jian high, Ma Weidong, Dai Xiaolei, Zhou Yuebing, SECOND NORTHWEST.
CVD furnace
1 Scope
This standard specifies the chemical vapor deposition furnace requirements, test methods, inspection rules and signs, packaging, transportation, storage, and quality certificate
Contract (or purchase order) content.
This standard applies to chemical vapor deposition.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 3163-2007 term vacuum technology
Safety - Part 1 GB 5959.1 electric apparatus. General requirements
GB 5959.4 electric safety devices - Part 4. Particular requirements for resistance heating device
GB/T 10066.1-2004 Test methods for electroheat installations - Part 1. General section
GB/T 10066.4-2004 Test methods for electric equipment - Part 4. Indirect resistance furnaces
GB/T 10067.1-2005 basic technical conditions for electric devices - Part 1. General section
GB/T 10067.4-2005 Electric equipment basic technical conditions - Part 4. Indirect resistance furnaces
JB/T 10550-2006 vacuum technology vacuum sintering furnace
YS/T 778-2011 degreasing vacuum sintering furnace
3 Terms and Definitions
GB/T 3163-2007, GB/T 10066.4-2004, JB/T 10550-2006, YS/T 778-2011 define the terms and definitions
Meaning applicable to this document.
4 Requirements
4.1 Classification
Chemical vapor deposition furnace according to the structure is divided into horizontal and vertical chemical vapor deposition furnace chemical vapor deposition furnace of two types, according to the furnace
And the size of the working area is divided into 13 models, see Table 1 and Table 2.
4.2 Model presentation rules
4.2.1 Horizontal chemical vapor deposition furnace model representation
Horizontal CVD furnace model represented by HCVD (where H represents horizontal; the CVD represents chemical vapor deposition) and workspace
Field size (width × height × length), whose model representation, see example.
Example. Horizontal chemical vapor deposition furnace work area having a width of 1000mm, height 1000mm, length 1500mm, the model expressed as HCVD-101015.