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JJG 28-2019

Chinese Standard: 'JJG 28-2019'
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JJG 28-2019English679 Add to Cart Days<=7 Optical Flats JJG 28-2019 Valid JJG 28-2019
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Standard ID JJG 28-2019 (JJG28-2019)
Description (Translated English) Optical Flats
Sector / Industry Metrology & Measurement Industry Standard
Word Count Estimation 34,317
Date of Issue 2019-09-27
Date of Implementation 2020-03-27
Older Standard (superseded by this standard) JJG 28-2000
Drafting Organization Hunan Institute of Metrology and Testing, China Academy of Metrology
Administrative Organization National Technical Committee for Geometric Engineering Parameter Measurement
Regulation (derived from) State Administration of Market Supervision and Administration Announcement No. 40 of 2019
Issuing agency(ies) State Administration of Market Supervision and Administration

JJG 28-2019
Optical Flats
National Measurement Verification Regulations of the People's Republic of China
Flat crystal
2019-09-27 release
2020-03-27 Implementation
Issued by the State Administration of Market Supervision and Administration
Flat Crystal Verification Regulations
Replace JJG 28-2000
Centralized unit. National Technical Committee for Geometric Engineering Parameter Measurement
Main drafting unit. Hunan Institute of Metrology and Testing
Chinese Academy of Metrology
Participated in the drafting unit. Suzhou Huili Instrument Co., Ltd.
205th Research Institute of China Ordnance Industry
This regulation entrusts the National Geometric Engineering Parameter Measurement Technical Committee to explain
The main drafters of this regulation.
Chen Yong (Hunan Provincial Institute of Metrology and Testing)
Zhang Heng (Chinese Academy of Metrology)
Zeng Yan (Hunan Provincial Institute of Metrology and Testing)
Liu Lijuan (Hunan Provincial Institute of Metrology and Testing)
Participating drafters.
Han Sen (Suzhou Huili Instrument Co., Ltd.)
Bai Wenqi (Hunan Institute of Metrology and Testing)
Shengyun Wang (205th Research Institute of China Ordnance Industry)
table of Contents
Introduction (Ⅱ)
1 Scope (1)
2 References (1)
3 Overview (1)
4 Measurement performance requirements (3)
4.1 Parallelism (3)
4.2 Flatness of working surface (3)
4.3 Flatness of non-working surface (4)
4.4 Stability (4)
5 General technical requirements (5)
5.1 Appearance and surface quality (5)
5.2 Dimensions (5)
5.3 The position of the cross-line of the flat crystal (6)
5.4 Angle between two ends (6)
5.5 The perpendicularity of the working surface and the cylindrical generatrix (7)
6 Control of measuring instruments (7)
6.1 Verification items and main verification equipment (7)
6.2 Verification conditions (7)
6.3 Verification method (9)
6.4 Processing of verification results (12)
6.5 Verification period (12)
Appendix A Dimensions and Quantity of Flat Surface Defects (13)
Appendix B. Phase-shift laser equal-thickness interferometry (15)
Appendix C. Equal thickness interferometry (18)
Appendix D Isoclinic Interferometry (20)
Appendix E Data Processing Examples of Veritable Flat Crystals Tested by the Four-sided Mutual Inspection Method (22)
Appendix F. Deformation of Changping crystal by its own weight (25)
Appendix G Format of the inner pages of the verification certificate and verification result notification (27)
JJF1001-2011 "General Metrology Terms and Definitions", JJF1002-2010 "National Metrology Verification Regulations
"Rules", JJF1059.1-2012 "Measurement Uncertainty Evaluation and Representation" together form the basis for the revision of this code
Basic series of technical regulations.
Compared with JJG 28-2000 "Flat Crystal", the main technical changes are as follows.
--- Corrected the printing error of JJG 28-2000 "Flat Crystal".
JJG 28-20006.3.8.2b) Chinese formula (6). u2 =
And the correction is. ub =
[See current edition
Formula (5)];
JJG 28-2000 Appendix C, Table C.1, Table 8 Header Column 8.Ei = (Li/Ln) Kn, corrected as. Ei =
(Li/Ln) ΔKn (see current table E.1);
JJG 28-2000 Appendix D Chinese formula (D.2). ΔF = d
÷ × F96, corrected as. ΔF =
× F96
[See current layout (C.2)].
--- The difference of flatness of the 310mm long flat crystal in two cycles of verification is relaxed from 0.020μm to 0.030μm (see
--- According to JJG 146-2011 "Measuring Block", 6 equivalent blocks were cancelled and 5 equivalent blocks were replaced (see 6.3.2).
--- Cancelled the method of parallel parallel crystal parallelism verification on laser plane equal thickness interferometer.
--- Increase the structure overview, measurement method (see Appendix B) and other related contents of the phase shift type equal thickness measuring device.
--- Add the calculation method of flatness within the range of standard flat crystal F96 (see Appendix C)
The release of previous versions of this regulation.
--- JJG 28-2000;
--- JJG 28-1991;
--- JJG 28-1980.
Flat Crystal Verification Regulations
1 Scope
This regulation is applicable to the first verification, subsequent verification and flat verification of flat crystals (including flat flat crystals, parallel flat crystals and long flat crystals)
Check in use.
2 Reference documents
This regulation refers to the following documents.
GB/T 903-2019 colorless optical glass
JB/T 7401-1994 Flat flat crystal
JB/T 7402-1994 parallel flat crystal
ISO 14999-4..2015 (E) Interferometer measurement of optical and photonic optics and optical systems Section 4
Part. Tolerance description and evaluation clearly specified in ISO 10110 (Optics and photonics-Interfero-
metricmeasurementofopticalelementsandopticalsystems-Part 4.Interpretationand
evaluationoftolerancesspecifiedinISO 10110)
For dated references, only the dated versions are applicable to this Regulation; for those without dates
The latest version (including all amendments) is applicable to this regulation.
3 Overview
Pingjing is a measuring instrument that measures flatness, straightness, fit and parallelism using the light wave interference method, including flatness
Face flat crystal, parallel flat crystal and long flat crystal. Planar flat crystals can be divided into single working plane flat crystals and double working plane flats according to the number of working faces
The shape of the crystal is shown in Figure 1; according to the purpose, it can be divided into two categories. standard flat crystal and working flat crystal.
First and second grades, working flat crystals are divided into first and second grades.
Related standard: JJG 98-2019    JJG 628-2019