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JJF 2067-2023 English PDF

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JJF 2067-2023: Calibration Specification for Energy-Dispersive X-ray Spectrometers
Status: Valid

Standard ID	Contents [version]	USD	STEP2	[PDF] delivered in	Standard Title (Description)	Status	PDF
JJF 2067-2023	English	369	Add to Cart	4 days [Need to translate]	Calibration Specification for Energy-Dispersive X-ray Spectrometers	Valid	JJF 2067-2023

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Basic data

Standard ID	JJF 2067-2023 (JJF2067-2023)
Description (Translated English)	Calibration Specification for Energy-Dispersive X-ray Spectrometers
Sector / Industry	Metrology & Measurement Industry Standard
Word Count Estimation	18,160
Date of Issue	2023-10-12
Date of Implementation	2024-04-12
Issuing agency(ies)	State Administration for Market Regulation

JJF 2067-2023: Calibration Specification for Energy-Dispersive X-ray Spectrometers

---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
National Metrology Technical Specifications of the People's Republic of China X-ray energy spectrometer calibration specifications Released on 2023-10-12 Implemented on 2024-04-12 Released by the State Administration for Market Regulation X-ray energy spectrometer calibration specifications Energy-DispersiveX-raySpectrometers Responsible unit: National New Materials and Nano Metrology Technical Committee Main drafting unit: Shandong Institute of Metrology China Institute of Metrology Suzhou Metrology and Testing Institute Participating units in the drafting: Shanghai Institute of Metrology and Testing Technology This specification is entrusted to the National New Materials and Nano Metrology Technical Committee to be responsible for interpretation: The main drafters of this specification: Cao Cong (Shandong Institute of Metrology) Li Shi (China Institute of Metrology) Wang Yunxiang (Suzhou Metrology and Testing Institute) Participating drafters: Li Xu(China Institute of Metrology) Zhao Dongsheng (Shandong Institute of Metrology) Shi Yushu (Chinese Institute of Metrology) Zhou Ying (Shanghai Institute of Metrology and Testing Technology)

Introduction(Ⅱ) 1 Scope(1) 2 Cited documents(1) 3 Terminology and units of measurement(1) 3:1 X-ray energy spectrometer(1) 3:2 Peak half-maximum width (1) 3:3 Quantitative analysis (1) 3:4 Reference materials(1) 3:5 Overvoltage ratio(1) 3:6 Dead time(2) 4 Overview(2) 5 Measuring characteristics(2) 5:1 Energy resolution(2) 5:2 Relative indication error of element content measurement (3) 5:3 Repeatability of element content measurement(3) 6 Calibration conditions(3) 6:1 Environmental conditions(3) 6:2 Measurement standards and other equipment(3) 7 Calibration items and calibration methods (4) 7:1 Preparation before calibration(4) 7:2 Energy resolution(4) 7:3 Relative indication error of element content measurement (4) 7:4 Repeatability of elemental content measurements (5) 8 Calibration result expression(5) 9 Recalibration time interval(5) Appendix Example of measurement uncertainty evaluation of relative indication error of element content measurement of AX-ray energy spectrometer (6) Appendix B X-ray energy spectrometer calibration record format (8) Appendix C X-ray energy spectrometer calibration certificate (inside page) format (10)

Introduction

JJF 1001 "General Measurement Terms and Definitions", JJF 1071-2010 "Rules for Writing National Measurement Calibration Specifications" Together with JJF 1059:1-2012 "Evaluation and Expression of Measurement Uncertainty", they form the basis for supporting the formulation of this specification: sex documents: This specification mainly refers to GB/T 17359-2012 "Quantitative Analysis by Microbeam Analysis Energy Spectroscopy", GB/T 20726-2015 "Microbeam Analysis Electron Probe Microanalysis X-ray Energy Spectrometer Main Performance Parameters and Verification" Method", GB/T 21636-2021 "Microbeam Analysis Electron Probe Microanalysis (EPMA) Terminology", GB/T 25189-2010 "Method for determination of quantitative analysis parameters of microbeam analysis scanning electron microscope energy spectrometer" and other relevant countries Home standard content: This specification is released for the first time: X-ray energy spectrometer calibration specifications

1 Scope

This specification applies to the calibration of X-ray spectrometers based on scanning electron microscopes or electron probes:

2 cited documents

This specification references the following documents: JJF 1071 Rules for Writing National Measurement Calibration Specifications GB/T 20726-2015 Microbeam Analysis Electron Probe Microanalysis X-ray Energy Spectrometer Main Performance Parameters and Verification method GB/T 21636-2021 Microbeam Analysis Electron Probe Microanalysis (EPMA) Terminology For dated references, only the dated version applies to this specification; for undated references, only the dated edition applies: The latest version (including all modification orders) shall apply to this specification:

3 Terminology and units of measurement

The following terms and definitions defined in GB/T 20726-2015 and GB/T 21636-2021 apply to this specification: 3:1 energy-dispersiveX-rayspectrometer; EDS A device that simultaneously records the entire X-ray spectrum to determine X-ray intensity as a function of radiation energy: Note: X-ray energy spectrometer includes solid-state detector, preamplifier and pulse processor: The detector converts the X-ray photon energy into electrical pulse, and the signal is amplified by the preamplifier: The pulse processor classifies the pulses according to their amplitude and forms X-ray intensity Histogram distribution of degrees versus energy: [Source: GB/T 20726-2015, 3:1, with modifications] The peak width at half the maximum intensity of the spectrum peak after deducting the background, the unit is electron volts (eV): Note: The maximum peak intensity is determined by fitting all channels of the corresponding peak, and the peak width is measured at half the peak height: [Source: GB/T 21636-2021,5:6:7] 3:3 Quantitative analysis quantitative analysis Electron excited X-ray spectroscopy is used to determine elemental content in micron-scale analytical volumes: [Source: GB/T 21636-2021, 6:4, with modifications] 3:4 Reference material; RM Substances with specific properties that are sufficiently homogeneous and stable that their properties have been demonstrated to be suitable for use in measurements or for testing nominal properties: Intended use: [Source: JJF 1001-2011,8:14] 3:5 Overvoltage ratio overvoltageratio The ratio of the incident beam electron energy to the critical excitation energy of a particular atomic shell: Note: The overvoltage ratio must be greater than 1 to produce characteristic X-rays from this atomic shell:

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