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JJF 1503-2015: Calibration Specification for Capacitance Diaphragm Vacuum Gauges
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Calibration Specification for Capacitance Diaphragm Vacuum Gauges
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JJF 1503-2015
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Basic data | Standard ID | JJF 1503-2015 (JJF1503-2015) | | Description (Translated English) | Calibration Specification for Capacitance Diaphragm Vacuum Gauges | | Sector / Industry | Metrology & Measurement Industry Standard | | Classification of Chinese Standard | A53 | | Classification of International Standard | 17.100 | | Word Count Estimation | 23,227 | | Date of Issue | 2015-01-30 | | Date of Implementation | 2015-04-30 | | Quoted Standard | JJF 1001-2011; JJF 1008-2008; GB/T 3163-2007; GB/T 3164-2007; ISO/TS 3567-2011(E); ISO/TS 27893-2009� | | Regulation (derived from) | The State Administration of Quality Supervision, Inspection and Quarantine Announcement 2015 No. 19 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine | | Summary | This Standard applies to measuring range Capacitance Diaphragm Gauge Calibration 0.1Pa ~ 133 kPa, including the absolute pressure gauge and differential capacitance film capacitors film gauge. | JJF 1503-2015: Calibration Specification for Capacitance Diaphragm Vacuum Gauges---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Calibration Specification for Capacitance Diaphragm Vacuum Gauges
People's Republic of China National Metrology Technical Specifications
Capacitance Diaphragm Gauge calibration specification
Issued on. 2015-01-30
2015-04-30 implementation
The State Administration of Quality Supervision, Inspection and Quarantine released
Capacitance Diaphragm Gauge calibration specification
Focal point. the National Technical Committee of pressure measurement
The main drafting units. China Institute of Metrology
Participated in the drafting unit. Shanghai Institute of Measurement and Testing
Shinta Shanghai Instrument Co., Ltd.
Zhejiang Institute of Metrology
This specification commissioned the National Technical Committee of pressure measurement shall be interpreted
The main drafters of this specification.
In Hongyan (China Institute of Metrology)
Wang vault (China Institute of Metrology)
Drafters participate.
Xu Hong (Shanghai Institute of Measurement and Testing)
Ding Jimin (Shanghai Shinta Instrument Co., Ltd.)
Chen Yuhang (Zhejiang Institute of Metrology)
table of Contents
Introduction (Ⅱ)
1 Scope (1)
2. References (1)
3 terminology and units of measurement (1)
3.1 The term (1)
3.2 units of measurement (2)
4 Overview (2)
5 Metrological characteristics (3)
Correction factor 5.1 (3)
Zero variation of 5.2 (3)
6 calibration conditions (3)
Environmental conditions 6.1 (3)
6.2 standards and other measuring equipment (3)
7 calibration items and calibration methods (4)
7.1 calibration items (4)
7.2 Calibration method (4)
8 calibration results expression (7)
9 Recalibration interval (8)
Appendix A capacitive film gauge calibration record format (9)
Appendix B calibration certificate (within the page) format (10)
C Capacitance Diaphragm Gauge correction factor measurement uncertainty evaluation method Appendix (11)
Thermal Transpiration under Appendix D Capacitance Diaphragm Gauge of temperature correction factor correction (15)
Introduction
JJF 1071-2010 "National Calibration Specifications writing rules", JJF 1001-2011 "common terminology and measurement
Definitions ", JJF 1059-1" Evaluation and Expression of Uncertainty in Measurement "and GB/T 3163-2007" vacuum technology terms "
Together constitute the basic series This specification developed.
The calibration reference specification ISO /T S3567.2011 (E) "--- vacuum gauge and standard gauge direct alignment
Calibration "(Vacuum gauge-Calibrationbydirectcomparison withareferencegauge),
ISO /T S27893.2009 (E) "vacuum technology --- --- vacuum gauge and standard gauge direct comparison calibration results
Uncertainty Evaluation "(Vacuumtechnology-Vacuumgauge-Evaluationoftheuncertaintiesof
resultsofcalibrationsbydirectcomparisonwithareferencegauge) and "Vacuum Technology Handbook"
(HandbookofVacuumTechnology) in Chapter 13, total pressure gauge (TotalPressureVacuum
Gauge) and Chapter 15 Calibration and Standards (CalibrationsandStandards) were developed, which uses a
Basic principles, methods and techniques for specific indicators were refined, additions and modifications.
The specification for the first time to develop.
Capacitance Diaphragm Gauge calibration specification
1 Scope
This standard applies to the measurement range of the calibration at 0.1Pa ~ 133kPa gauge film capacitors, including the Jedi
Capacitance Diaphragm Gauge pressure and differential pressure capacitance diaphragm gauges.
2. References
This specification refers to the following documents.
JJF 1001-2011 common measurement terms and definitions
JJF 1008-2008 pressure measurement terminology and definitions
GB/T 3163-2007 term vacuum technology
GB/T 3164-2007 vacuum technology - Graphical symbols
ISO /T S3567.2011 (E) --- vacuum gauge and standard gauge direct comparison calibration (Vacuum
gauge-Calibrationbydirectcomparisonwithareferencegauge)
ISO /T S27893.2009 (E) Vacuum technology --- --- vacuum gauge and standard gauge direct comparison calibration
Evaluation of Uncertainty (Vacuumtechnology-Vacuumgauge-Evaluationoftheuncer-
taintiesofresultsofcalibrationsbydirectcomparisonwithareferencegauge)
"Vacuum Technology Handbook" (HandbookofVacuumTechnology) Chapter 15 and calibration standard (Cali-
brationsandStandards)
For dated references, only the dated edition applies to this specification; undated reference documents
Member, the latest edition (including any amendments) applies to this specification.
3 terminology and units of measurement
3.1 Terms
3.1.1 gauge (vacuumgauge) [GB/T 3163-2007 4.1.2 Definition]
An instrument measuring the gas pressure below atmospheric pressure or steam pressure.
3.1.2 Capacitance Diaphragm Gauge (capacitancediaphragmvacuumgauge)
Displacement of the diaphragm by utilizing pressure differences, resulting in capacitance between the diaphragm and the fixed electrode is changed, by measuring
This amount of capacitance change to measure the pressure gauge.
3.1.3 calibration chamber (calibrationchamber)
To standard gauge and the instrument to be calibrated to provide a common vacuum chamber vacuum medium.
3.1.4 The bottom pressure (basepressure) [ISO 3567.2011 (E) defined 3.17]
Before entering the calibration chamber calibration gas, calibration or backward valve off after some time, the calibration chamber pressure.
NOTE. Do not base pressure and the residual pressure (residualpressure) confused, the latter refers to the indoor calibration can achieve a minimum pressure
Force, usually baking results degassing or after prolonged pumping. The bottom pressure may be higher but not lower than the residual pressure.
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