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GB/T 41805-2022: Methodology for the quantitative inspection of the defect on optics surface - Microscopic scattering dark-field imaging
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Methodology for the quantitative inspection of the defect on optics surface - Microscopic scattering dark-field imaging
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GB/T 41805-2022
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Basic data | Standard ID | GB/T 41805-2022 (GB/T41805-2022) | | Description (Translated English) | Methodology for the quantitative inspection of the defect on optics surface - Microscopic scattering dark-field imaging | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | N05 | | Classification of International Standard | 81.040.01 | | Word Count Estimation | 16,171 | | Date of Issue | 2022-10-12 | | Date of Implementation | 2023-05-01 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 41805-2022: Methodology for the quantitative inspection of the defect on optics surface - Microscopic scattering dark-field imaging
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Methodology for the quantitative inspection of the defect on optics surface - Microscopic scattering dark-field imaging
ICS 81.040.01
CCSN05
National Standards of People's Republic of China
Quantitative detection method for surface defects of optical components
Microscopic Scattering Dark Field Imaging
Released on 2022-10-12
2023-05-01 implementation
State Administration for Market Regulation
Released by the National Standardization Management Committee
foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1.Structure and Drafting Rules for Standardization Documents"
to be drafted.
Please note that some contents of this document may refer to patents. The issuing agency of this document assumes no responsibility for identifying patents.
This document is proposed by China Machinery Industry Federation.
This document is under the jurisdiction of the National Standardization Technical Committee of Optics and Photonics (SAC/TC103).
This document was drafted by. Zhejiang University, Hangzhou Jingnaike Photoelectric Technology Co., Ltd., Dalian Institute of Chemical Physics, Chinese Academy of Sciences, China
Laser Fusion Research Center of Academy of Engineering Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Standardization Research of China Ordnance Industry
Institute, Jiangsu Crown New Material Technology Co., Ltd., Fujian Fortek Optoelectronics Co., Ltd.
The main drafters of this document. Yang Yongying, Cao Pin, Li Gang, Yang Liming, Liu Xu, Liu Shijie, Hu Lili, Xu Xiaofei, Li Weina, Mai Qibo,
Huang Muwang.
Introduction
GB/T 1185-2006 is the standard for visual detection of surface defects of optical components, which is mainly used in strong light or certain lighting conditions
Next, the method of determining the defect scale by visual observation of the comparison target board. The visual method has strong subjectivity and poor repeatability, and the backward detection method
It has seriously restricted the development of modern scientific research and industrial online detection. This document retains the GB/T 1185-2006 table of optical components
In order to evaluate the standard of facial blemishes, a quantitative evaluation method of microscopic scattering dark-field optical imaging system and digital processing is proposed. The establishment of this standard will
Our country provides effective digital quantitative inspection for all kinds of precision optical components in various links such as processing technology, optical coating, and industrial online inspection.
measurement method.
This document introduces the terms and definitions used in optical components for microscattering dark field imaging, and describes the ring illumination source and microscattering dark field
Principles and construction methods of detection equipment composed of imaging systems, test conditions, sample types of optical components, image acquisition, image preprocessing, image
Threshold segmentation, image morphology processing, defect classification, digital calibration method, test data processing and test report form are basically applicable to
Quantitative detection of surface imperfections on all optical components.
For the digital quantitative detection method, the measurement method of detection repeatability and relative error is introduced in Appendix A. For large diameter flat
For the detection of surface optical components, the scanning stitching method of sub-apertures using micro-scattering dark-field imaging is introduced in Appendix B. In Appendix C
The method of making comparison standard board for defect scale evaluation is introduced.
In order to avoid technical barriers, this document only recommends and introduces the layout of the quantitative detection device for surface defects of planar optical components.
For example, the specific structure types such as the micro-scattering dark-field optical imaging system and the mechanical transduction device required for sub-aperture scanning are not limited, as long as they can satisfy
Microscattering dark-field imaging environment is enough.
Quantitative detection method for surface defects of optical components
Microscopic Scattering Dark Field Imaging
1 Scope
This document describes the detection principle, test conditions,
Instruments and equipment, samples, testing procedures, test data processing and test reports.
This document is applicable to the detection of the length, width, light-blocking area and defect position on the surface of flat double-sided polished optical components.
2 Normative references
The contents of the following documents constitute the essential provisions of this document through normative references in the text. Among them, dated references
For documents, only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to
this document.
GB/T 1185-2006 Surface defects of optical parts
3 Terms and Definitions
The following terms and definitions defined in GB/T 1185-2006 apply to this document.
3.1
ring light source ringlighting
A lighting system composed of ring-shaped distribution of high-brightness LEDs or other high-brightness light sources to provide uniform dark field lighting.
3.2
Use an industrial camera and an optical system as an imaging component, use a high-brightness light source to excite the scattered light from the surface defects of the component, and capture it by the imaging lens
Collect, and finally form the imaging method of bright defect image under the dark background.
3.3
imaging resolution imageresolution
The geometric dimension of the object plane corresponding to a single pixel of the image.
3.4
Calibration calibration
Use the surface defect comparison target with accurate traceability and quantifiable defect size to establish the relationship between the actual size of the object surface and the pixels of the imaging system
mapping relationship between them.
Note. C.4 of GB/T 1185-2006 stipulates the model of the comparison target plate and the defect size parameters.
3.5
defect pixel area pixelarea
The area represented by the number of pixels in the defective connected domain in the image.
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