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GB/T 39516-2020: Micro namo standard samples(geometric)
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| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 39516-2020 | English | 369 |
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Micro namo standard samples(geometric)
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GB/T 39516-2020
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Basic data | Standard ID | GB/T 39516-2020 (GB/T39516-2020) | | Description (Translated English) | Micro namo standard samples(geometric) | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | J42 | | Classification of International Standard | 17.040.30 | | Word Count Estimation | 20,286 | | Date of Issue | 2020-11-19 | | Date of Implementation | 2021-06-01 | | Quoted Standard | GB/T 17163-2008; GB/T 25915.1-2010 | | Regulation (derived from) | National Standard Announcement No. 26 of 2020 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | | Summary | This standard specifies the terms and definitions, types and basic parameters, requirements, inspection conditions, inspection methods, markings, transportation and storage of micro-nano standard templates (geometric quantities). This standard is applicable to the micro-nano wire spacing standard template with the line spacing of 0.05um��10um, the micro-nano step height standard template with the step height of 0.01um��100um, the nano film thickness standard template with the film thickness of 2nm��1000um and the line width Nanowire width standard model of 25nm��1000um. | GB/T 39516-2020: Micro namo standard samples(geometric)---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Micro nano standard samples (geometric)
ICS 17.040.30
J42
National Standards of People's Republic of China
Micro-nano standard template (geometric quantity)
2020-11-19 released
2021-06-01 implementation
State Administration for Market Regulation
Issued by the National Standardization Management Committee
Table of contents
Preface Ⅲ
1 Scope 1
2 Normative references 1
3 Terms and definitions 1
4 Type and basic parameters 3
4.1 Type 3
4.2 Basic parameters 4
5 Requirements 5
5.1 Appearance 5
5.2 Performance parameter requirements 5
6 Inspection condition 7
7 Inspection method 7
7.1 Appearance 7
7.2 Performance parameters of micro-nanowire interval standard sample 7
7.3 Performance parameters of micro-nano step height standard model 10
7.4 Performance parameters of nano-film thickness standard sample 12
7.5 Performance parameters of nanowire width standard model 14
8 Marking, transportation and storage 15
8.1 Sign 15
8.2 Transportation 16
8.3 Storage 16
8.4 Product certificate 16
Figure 1 Schematic diagram of line spacing 1
Figure 2 Schematic diagram of step height 2
Figure 3 Schematic diagram of film thickness definition 2
Figure 4 Schematic diagram of line width 2
Figure 5 Schematic diagram of the standard model of micro-nanowire spacing 3
Figure 6 Schematic diagram of the standard model of micro-nano step height 3
Figure 7 Schematic diagram of the standard model of nano film thickness 4
Figure 8 Schematic diagram of the standard model of nanowire width 4
Figure 9 Schematic diagram of selection of effective measurement area for line interval deviation 8
Figure 10 Schematic diagram of line edge roughness assessment location 9
Figure 11 Schematic diagram of line edge roughness 9
Figure 12 Schematic diagram of uniformity measurement 10
Figure 13 Schematic diagram of step height measurement 11
Figure 14 Schematic diagram of measurement line selection when measuring the uniformity of the step area 12
Figure 15 Schematic diagram of film thickness deviation assessment 13
Figure 16 Schematic diagram of line width deviation measurement area selection 14
Figure 17 Schematic diagram of line width uniformity measurement location selection 15
Table 1 Performance parameter requirements of micro-nanowire spacing standard model 5
Table 2 Performance parameter requirements of micro-nano step height standard model 5
Table 3 Performance parameter requirements of nano-film thickness standard sample 6
Table 4 Performance parameter requirements of nanowire width standard model 6
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This standard was proposed by China Machinery Industry Federation.
This standard is under the jurisdiction of the National Standardization Technical Committee for Measuring Instruments (SAC/TC132).
Drafting organizations of this standard. The 13th Research Institute of China Electronics Technology Group Corporation, Chengdu Tool Research Institute Co., Ltd., Guangxi Zhuang Autonomous
District Metrology and Testing Institute, China Institute of Metrology, Shanghai Institute of Metrology and Testing Technology, China Jiliang University, Zhuhai Yixin Measurement
Technology Co., Ltd.
The main drafters of this standard. Li Suoyin, Fu Xingchang, Liang France, Han Zhiguo, Zhao Lin, Feng Yanan, Xu Xiaoqing, Zhang Xiaodong, Jiang Zhigang, Xu Gang,
Su Jixiong, Zhang Heng, Lei Lihua, Zhao Jun, Zhang Songtao, Cai Xiaoyu, Fu Yunxia.
Micro-nano standard template (geometric quantity)
1 Scope
This standard specifies the terms and definitions, types and basic parameters, requirements, inspection conditions, inspection methods, and
Signs, transportation and storage, etc.
This standard is applicable to the standard model of micro-nano wire spacing with line spacing of 0.05μm~10μm, and the step height is 0.01μm~100μm
The micro-nano step height standard template, the nano-film thickness standard template with the film thickness of 2nm~1000nm and the line width of 25nm~
1000nm nanowire width standard model.
2 Normative references
The following documents are indispensable for the application of this document. For dated reference documents, only the dated version applies to this document.
For undated references, the latest version (including all amendments) applies to this document.
GB/T 17163-2008 Basic terminology of geometric quantity measuring instrument terminology
GB/T 25915.1-2010 Clean room and related controlled environment Part 1.Air cleanliness grade
3 Terms and definitions
The following terms and definitions defined in GB/T 17163-2008 apply to this document.
3.1
It has the geometric characteristic structure of micro-nano-level line spacing, step height, film thickness, and line width, which can be used as a standard model for micro-nano measurement.
3.2
Line spacing
Periodic scribe lines with micro-nano-level accuracy and uniformity, and scribe line pitch P not greater than 10μm. Periodically scribe lines on the same side adjacent to each other
The distance between the edges or the distance between the centers of adjacent periodic reticle geometric structures characterizes the reticle interval.
Note. The line spacing diagram is shown in Figure 1.
Figure 1 Schematic diagram of line spacing
3.3
Step height
Steps or grooves with micro-nano accuracy and uniformity.
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