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GB/T 34177-2017: Quartz glass wafer for lithography
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| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 34177-2017 | English | 279 |
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Quartz glass wafer for lithography
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GB/T 34177-2017
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Basic data | Standard ID | GB/T 34177-2017 (GB/T34177-2017) | | Description (Translated English) | Quartz glass wafer for lithography | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | Q35 | | Classification of International Standard | 81.040.30 | | Word Count Estimation | 14,140 | | Date of Issue | 2017-09-07 | | Date of Implementation | 2018-08-01 | | Issuing agency(ies) | General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China | GB/T 34177-2017: Quartz glass wafer for lithography---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Quartz glass wafer for lithography
ICS 81.040.30
Q35
National Standards of People's Republic of China
Lithography quartz glass wafer
2017-09-07 Posted
2018-08-01 implementation
General Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
China National Standardization Administration released
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
This standard proposed by the China Building Materials Federation.
This standard by the National Industrial Glass and Special Glass Standardization Technical Committee (SAC/TC447) centralized.
This standard drafting unit. China Building Materials Inspection and Certification Group Co., Ltd., China Building Materials Quzhou Jin Gelan Quartz Co., Ltd. Changsha Shao
Chromium Plate Co., Ltd., China Building Materials Research Institute, the National Safety Glass and Quartz Glass Quality Supervision and Inspection Center.
The main drafters of this standard. Wu Jie, Wang Jingxia, Wang Youjun, Li Yi Zhou, Hua Ning, Liu Huanmin, Xiao Songhua, Nilan Ship, Zhang Hao Yun, Yang Xiaohui,
Yang Xuedong, Kong Min, Zhang Ying.
Lithography quartz glass wafer
1 Scope
This standard specifies the lithography quartz glass wafer (hereinafter referred to as quartz glass wafer) terms and definitions, classification, requirements, test methods,
Inspection rules and signs, packaging, transportation and storage.
This standard applies to semiconductor integrated circuits, optical communications, micro-electromechanical systems (MEMS), optoelectronic devices and light-emitting diode (LED) light
Engraved in the process used as a substrate of quartz glass wafer.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version applies to this article
Pieces. For undated references, the latest edition (including all amendments) applies to this document.
Methods of chemical composition analysis of quartz glass GB/T 3284-2015
GB/T 5949 transparent quartz glass bubble, gas line test methods
Surface roughness of gallium nitride single crystal substrate by atomic force microscopy
JC/T 185 optical quartz glass
Internal stress testing methods for JC/T 655 quartz glass products
JC/T 2205 quartz glass terms
3 Terms and definitions
JC/T 2205 and defined by the following terms and definitions apply to this document.
3.1
Total thickness change totalthicknessvariation; TTV
The difference between the maximum and minimum thickness of quartz glass wafers.
3.2
Flatness flatness
For example, a surface of a quartz glass wafer is sucked by a vacuum chuck in an ideal,
On a flat suction cup, the deviation of the other surface from the specified reference surface is indicated by the total readings in the measurement range (TIR).
3.3
Curvature bow
Deviation from the center plane of the median plane of the free, non-gripped quartz glass wafer to the plane of the median plane.
The median plane reference plane is a plane defined by three equidistant points on a given circumference that is less than the nominal diameter of the quartz glass wafer.
3.4
Warp warp
The difference between the maximum and minimum distance of the free, uncladished quartz glass wafer median plane relative to the reference plane.
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