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GB/T 33838-2017 English PDF

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GB/T 33838-2017: Microbeam analysis -- Scanning electron microscopy -- Methods of evaluating image sharpness
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GB/T 33838-2017English1404 Add to Cart 4 days [Need to translate] Microbeam analysis -- Scanning electron microscopy -- Methods of evaluating image sharpness Valid GB/T 33838-2017

PDF similar to GB/T 33838-2017


Standard similar to GB/T 33838-2017

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Basic data

Standard ID GB/T 33838-2017 (GB/T33838-2017)
Description (Translated English) Microbeam analysis -- Scanning electron microscopy -- Methods of evaluating image sharpness
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard G04
Classification of International Standard 71.040.40
Word Count Estimation 74,715
Date of Issue 2017-05-31
Date of Implementation 2018-04-01
Issuing agency(ies) General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China

GB/T 33838-2017: Microbeam analysis -- Scanning electron microscopy -- Methods of evaluating image sharpness


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Microbeam analysis - Scanning electron microscopy - Methods of Drawing image sharpness ICS 71.040.40 G04 National Standards of People's Republic of China Micro - beam analysis of scanning electron microscopy Image sharpness evaluation method (ISO /T S24597..2011, IDT) 2017-05-31 released 2018-04-01 implementation General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China China National Standardization Management Committee released Directory Preface I 1 Scope 1 2 normative reference document 1 3 Terms and definitions 1 4 Step 2 of the SEM image 4.1 Overview 2 4.2 Sample 2 4.3 Sample tilt 2 4.4 field selection 2 4.5 pixel size selection 3 4.6 Image brightness and contrast 4 4.7 Image linings ratio 4 4.8 image focusing and astigmatism 6 4.9 External factors interference 6 4.10 error contrast 6 4.11 SEM image data file 6 5 SEM image acquisition and image area selection 6 6 Evaluation Method 6 6.1 Overview 6 6.2 Lining ratio 7 6.3 Fourier transform (FT) method 7 6.4 contrast - gradient (CG) method 10 6.5 Derivative (DR) method 12 7 Test Report 14 7.1 Overview 14 7.2 Test Report Contents 14 Appendix A (Normative Appendix) Lined Noise Ratio (CNR) Details 15 Appendix B (Normative Appendix) Fourier Transform (FT) Method Details 19 Appendix C (Normative Appendix) Contrast - Gradient (CG) Method Details Appendix D (Normative Appendix) Derivative (DR) Method Details 42 Appendix E (informative) Background for assessing image sharpness 59 Appendix F (informative) Characteristics and applicability of the various assessment methods Appendix G (informative) Method for preparing samples for evaluating image sharpness Appendix H (informative) Test Report Example 68 Reference 70

Foreword

This standard is drafted in accordance with the rules given in GB/T 1.1-2009. This standard uses the translation method equivalent to ISO /T S24597..2011 "Micro-beam analysis scanning electron microscopy image sharpness evaluation side law". And the normative reference in this standard international documents are consistent with the relationship between China's documents are as follows. Microscopic analysis - Scanning electron microscopy (ISO 22493..2008, IDT) GB/T 21636-2008. This standard is proposed by the National Microparraph Analysis Standardization Technical Committee (SAC/TC38). The drafting of this standard. School of Physics, University of Science and Technology of China. The main drafters of this standard. Ding Zejun, Ruan Yan. Micro - beam analysis of scanning electron microscopy Image sharpness evaluation method

1 Scope

This standard specifies three methods for evaluating the sharpness of digital images generated by scanning electron microscopy (SEM). Fourier transform (FT) Method, contrast - gradient (CG) method, derivative (DR) method.

2 normative reference documents

The following documents are indispensable for the application of this document. For dated references, only the dated edition applies to this article Pieces. For undated references, the latest edition (including all modifications) applies to this document. GB/T 27025-2008 General requirements for testing and calibration laboratory capabilities (ISO /IEC 17025..2005, IDT) GB/T 27788-2011 Microbeam analysis Scanning electron microscope image magnification calibration guidelines (ISO 16700..2004, IDT) ISO 22493 Microbeam analysis-Scanningelectron micro- scopy-vocabulary

3 terms and definitions

GB/T 27788-2011 and ISO 22493 are defined and the following terms and definitions apply to this document. 3.1 Pixel pixel The smallest imaging unit can not be subdivided in the digital SEM image. 3.2 Pixel size pixelsize The length of the sample per unit pixel in the SEM image, in nanometer (nm). Note. The horizontal and vertical pixels should be the same size. 3.3 Binary SEM image binarySEMimage There are only two gray-scale SEM images after conversion. 3.4 Convoluted image The image obtained by convolution of the binary SEM image and the two - dimensional Gaussian distribution. 3.5 Sharpness factor (2σ) for generating the standard deviation of the Gaussian distribution of the convolution image. 3.6 Image sharpness (image clarity) imagesharpness The sharpness factor is divided by the square root of 2 (ie, 2σ/2), and the sharpness factor of the SEM image is considered to be equal to the Gaussian distribution with the standard deviation σ Into the same convolution image.

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