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Geometrical product specifications (GPS) - Surface texture: Areal - Part 700: Calibration, adjustment and verification of areal topography measuring instruments
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GB/T 33523.700-2025
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Basic data Standard ID | GB/T 33523.700-2025 (GB/T33523.700-2025) | Description (Translated English) | Geometrical product specifications (GPS) - Surface texture: Areal - Part 700: Calibration, adjustment and verification of areal topography measuring instruments | Sector / Industry | National Standard (Recommended) | Classification of Chinese Standard | J04 | Classification of International Standard | 17.040.20; 17.040.40 | Word Count Estimation | 27,277 | Date of Issue | 2025-05-30 | Date of Implementation | 2025-09-01 | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration |
GB/T 33523.700-2025: Geometrical product specifications (GPS) - Surface texture: Areal - Part 700: Calibration, adjustment and verification of areal topography measuring instruments ---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
ICS 17.040.20;17.040.40
CCSJ04
National Standard of the People's Republic of China
Geometric Product Specification (GPS) Surface Structure.
Area law part 700.area topography measuring instruments
Calibration, adjustment and verification
Measuring instruments
Released on 2025-05-30
2025-09-01 Implementation
State Administration for Market Regulation
The National Standardization Administration issued
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents"
Drafting.
This document is Part 700 of GB/T 33523 Geometrical Product Specification (GPS) Surface Structure. Area Method.
GB/T 33523 has published the following parts.
--- Part 1.Representation of surface structure;
--- Part 2.Terms, definitions and surface structure parameters;
--- Part 3.Specification of operation sets;
--- Part 6.Classification of surface structure measurement methods;
--- Part 70.Physical measurement standards;
--- Part 71.Software measurement standards;
--- Part 72.XML file format x3p;
--- Part 73.Terms and definitions of physical standard surface defects;
--- Part 600.Metrological characteristics of area topography measurement methods;
--- Part 601.Nominal characteristics of contact (stylus) instruments;
--- Part 602.Nominal characteristics of non-contact (confocal chromatic aberration probe) instruments;
--- Part 603.Nominal characteristics of non-contact (phase-shift interferometry) instruments;
--- Part 604.Nominal characteristics of non-contact (coherent scanning interferometry) instruments;
--- Part 605.Nominal characteristics of non-contact (point autofocus probe) instruments;
--- Part 606.Nominal characteristics of non-contact (zoom) instruments;
--- Part 700.Calibration, adjustment and verification of area topography measuring instruments;
--- Part 701.Calibration and measurement standards for contact (stylus) instruments.
This document is equivalent to ISO 25178-700.2022 "Geometrical Product Specification (GPS) Surface Structure. Area Method Part 700
Section. Calibration, adjustment and verification of area topography measurement instruments.
Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.
This document is proposed and coordinated by the National Technical Committee for Standardization of Product Geometry Technical Specifications (SAC/TC240).
This document was drafted by. Harbin Institute of Technology, Shenzhen Zhongtu Instrument Co., Ltd., China Machinery Research Institute of Standards and Technology (Beijing)
Co., Ltd., China Institute of Metrology, Shanghai Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Tianjin University, Qingdao City University, Zhengzhou
University, Shining 3D Technology Co., Ltd., Heilongjiang Metrology and Testing Institute, Zhejiang University, China Machinery Productivity Promotion Center Co., Ltd.
company.
The main drafters of this document are. Liu Jian, Zhang Hejun, Liu Chenguang, Zhu Yue, Shi Yushu, Su Rong, Guo Tong, Zhang Huijie, Zhao Fengxia, You Xiaoyu, Li Renju,
Zhou Tong, Zhang Zongzheng, and Weng Zhaonan.
Introduction
With the implementation of the national product quality improvement plan, unified specifications or principles used in product design, manufacturing, measurement and inspection processes are required.
The demand for surface structure in the original product geometry specification and related standards can no longer meet the needs of product manufacturing.
Surface quality control requirements during the process.
GB/T 33523 "Product Geometry Technical Specification (GPS) Surface Structure. Area Method" is based on the new generation of GPS product geometry specification.
Through digital measurement technology, software analysis technology and metrological evaluation, a new set of three-dimensional surface structure measurement and analysis is constructed.
GB/T 33523 is a recommended national standard. Based on the proposed surface structure representation method, surface structure parameters and standard operation set, it analyzes
The method of surface structure measurement is given, and the measurement technology used and the nominal characteristics of the instrument are given. In particular, GB/T 33523 covers contact
While introducing non-contact measuring instruments, we also focus on introducing a variety of non-contact measuring instruments that are of great value in high-precision measurement applications but lack standard support.
GB/T 33523 also specifies the physical measurement and software measurement standards, and provides software file standards and surface structure measurement standards.
GB/T 33523 has achieved a leap from two-dimensional profile measurement to three-dimensional surface structure measurement, and has laid a solid foundation for the GPS product geometry specification system.
Provides measurement and testing support.
GB/T 33523 is planned to consist of 17 parts.
--- Part 1.Representation of surface structure. Aims to specify the method of using surface structure in product technical documents (such as drawings, specifications, contracts and reports).
Graphic symbols represent the regularity of the surface structure of the area.
--- Part 2.Terms, definitions and surface texture parameters. Aims to specify the terms, definitions and parameters for evaluating surface texture using the area method.
--- Part 3.Set of standard operations. Aims to specify complete standard operations applicable to the regional method for assessing surface structure (size-limited surface)
Make a collection.
--- Part 6.Classification of surface structure measurement methods. Aims to specify the classification system mainly used for surface structure measurement methods, defining
The three types of methods are described, and the relationship between the three types of methods is described, and the specific methods are briefly explained.
--- Part 70.Physical measurement standards. Aims to specify physical measurement standards for periodic verification and adjustment of area method surface structure measurement instruments.
Characteristics of quantity standards.
--- Part 71.Software measurement standards. Aims to specify S1 and S2 software measurement standards for use in measuring instrument software calibration
Definition of the term (etalon).
--- Part 72.XML file format x3p. Aims to specify the XML file format for storing and exchanging topography and contour data
Type x3p.
--- Part 73.Terms and definitions of physical standard surface defects. Aims to define the terms and definitions specified in ISO 5436-1 and ISO 25178.70
Definition of the types of geometric defects that can appear on the surface of physical measuring tools and calibration samples, and definition of the treatment methods for these defects
the term.
--- Part 600.Metrological characteristics of area topography measurement methods. Aims to specify area method measuring instruments for surface topography measurement
The measurement characteristics.
--- Part 601.Nominal characteristics of contact (stylus) instruments. To specify the nominal characteristics of contact (stylus) instruments using the surface structure area method.
Nominal characteristics.
--- Part 602.Nominal characteristics of non-contact (confocal chromatic aberration probe) instruments. It is intended to specify the use of white light axial dispersion based on
Design and metrological characterization of a non-contact instrument for measuring surface structure using a confocal chromatic aberration probe.
--- Part 603.Nominal characteristics of non-contact (phase shift interferometry) instruments. To specify the phase shift interferometry (PSI) profile and area
Metrological properties of a surface structure measurement microscope.
--- Part 604.Nominal characteristics of non-contact (coherent scanning interferometry) instruments. To specify the nominal characteristics of non-contact (coherent scanning interferometry) instruments for three-dimensional mapping of surface height.
Metrological characteristics of a coherence scanning interferometry (CSI) measurement system.
--- Part 605.Nominal characteristics of non-contact (point autofocus probe) instruments. To specify the use of point autofocus probe measurement
Metrological properties of non-contact instruments for measuring surface structure.
--- Part 606.Nominal characteristics of non-contact (varifocal) instruments. To specify the use of variable focal length (FV) sensors to measure surface structures.
Design and metrological characteristics of non-contact instruments.
--- Part 700.Calibration, adjustment and verification of area topography measuring instruments. Aims to specify the calibration, adjustment and verification of area topography measuring instruments.
General procedure for the common metrological characterization of areal topography instruments as described in ISO 25178-600.
--- Part 701.Calibration and measurement standards for contact (stylus) instruments. To specify the area method surface structure contact (stylus) type
Characteristics of physical measuring tools used as measuring standards, methods for assessing residual errors, tests for calibration, acceptance and periodic verification
method.
Geometric Product Specification (GPS) Surface Structure.
Area law part 700.area topography measuring instruments
Calibration, adjustment and verification
1 Scope
This document specifies the procedures for calibrating, adjusting and verifying the common metrological characteristics of areal topography measuring instruments as described in ISO 25178-600.
General Procedure. Since surface contours can be extracted from surface topography images, most of the methods described in this paper can be applied to contour
Measuring instrument.
This document does not address instrument-specific issues. For example, for mechanical probing instruments where the probe moves in an arc, ISO 25178-701
Additional measurement criteria are specified in.
This document does not cover procedures for area integral methods (e.g. light scattering for surface topography) as specified in ISO 25178-6.
2 Normative references
The contents of the following documents constitute essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies to
This document.
GB/T 33523.73-2025 Product Geometric Technical Specification (GPS) Surface structure. Area method Part 73.Physical standard surface
Terms and definitions of defects (ISO 25178-73.2019, IDT)
GB/T 33523.600-2025 Product Geometric Specification (GPS) Surface structure. Area method Part 600.Area topography measurement
Metrological characteristics of measurement methods (ISO 25178-600.2019, IDT)
3 Terms and definitions
The following terms and definitions apply to this document.
3.1
Non-measured points
There are no surface locations for which valid measurements exist.
Note 1.For the treatment of non-measurement points, see 6.3.
Note 2.Non-measurement points may be caused by characteristics of the measuring instrument or surface defects in the measurement standard that are beyond the measurement range of the instrument.
3.2
spurious data
Data that is considered measurable according to the measurement principle but obviously deviates from the reasonable value range based on prior knowledge.
Note 1.False data may be a single point or a group of points that are identified as measurable by the measuring instrument based on prior knowledge of the surface to be measured and the instrument, or based solely on
Defects and contamination on the surface may cause the value to be non-existent, thus identifying it as false data. False data may appear as outliers or spikes.
The form appears.
NOTE 2 False data may be caused by environmental conditions (e.g. vibrations or external light sources), by interactions between the surface and the instrument, or simply by surface imperfections and contamination.
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