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GB/T 33523.604-2022 English PDF

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GB/T 33523.604-2022: Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact(coherence scanning interferometry) instruments
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GB/T 33523.604-2022English694 Add to Cart 6 days [Need to translate] Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact(coherence scanning interferometry) instruments Valid GB/T 33523.604-2022

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Basic data

Standard ID GB/T 33523.604-2022 (GB/T33523.604-2022)
Description (Translated English) Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact(coherence scanning interferometry) instruments
Sector / Industry National Standard (Recommended)
Classification of Chinese Standard J04
Classification of International Standard 17.040.20
Word Count Estimation 38,320
Date of Issue 2022-12-30
Date of Implementation 2023-04-01
Issuing agency(ies) State Administration for Market Regulation, China National Standardization Administration

GB/T 33523.604-2022: Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact(coherence scanning interferometry) instruments


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ICS 17.040.20 CCSJ04 National Standards of People's Republic of China Product Geometry Specification (GPS) Surface Structure Region Method Part 604.Non-contact (coherent scanning interference) type Nominal characteristics of the instrument (ISO 25178-604.2013, IDT) Released on 2022-12-30 and implemented on 2023-04-01 State Administration for Market Regulation Released by the National Standardization Management Committee

table of contents

Preface III Introduction IV 1 Scope 1 2 Normative references 1 3 Terms and Definitions 1 3.1 Terms and definitions related to regional surface structure measurement methods1 3.2 Terms and definitions related to X, Y axis scanning system 5 3.3 Terms and definitions related to optical systems7 3.4 Terms and definitions related to the optical characteristics of the workpiece 8 3.5 Specific Terms and Definitions for Coherent Scanning Interferometry Microscopy 9 4 Description of influence quantity 12 4.1 General 12 4.2 Influence amount 12 Appendix A (Informative) Overview and Components of Coherent Scanning Interferometry (CSI) Microscopy 14 Appendix B (Informative) Working Principle of Coherent Scanning Interferometry 17 Appendix C (Informative) Spatial Resolution 24 Appendix D (Informative) Example of Surface Topography Measurement Repeatability Evaluation Process 28 Appendix E (Informative) Relationship with GPS Matrix Model 29 Reference 30

foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1.Structure and Drafting Rules for Standardization Documents" drafting. This document is part 604 of GB/T 33523 "Geometric Specification for Products (GPS) Surface Structure Area Law". GB/T 33523 The following parts have been published. --- Part 1.Representation of surface structure; --- Part 2.Terms, definitions and surface structure parameters; --- Part 3.Specification operation set; --- Part 6.Classification of surface structure measurement methods; --- Part 70.Physical measurement standards; --- Part 71.Software measurement standards; --- Part 72.XML file format x3p; --- Part 601.Nominal characteristics of contact (stylus) instruments; --- Part 602.Nominal characteristics of non-contact (confocal chromatic aberration probe) instruments; --- Part 603.Nominal characteristics of non-contact (phase-shift interference microscopy) instruments; --- Part 604.Nominal characteristics of non-contact (coherent scanning interference) instruments; --- Part 605.Nominal characteristics of non-contact (point autofocus probe) instruments; --- Part 606.Nominal characteristics of non-contact (zoom) instruments; --- Part 701.Calibration and measurement standards for contact (stylus) instruments. This document is equivalent to ISO 25178-604.2013 "Product Geometric Specifications (GPS) Surface Structure Area Law Part 604 Part. Nominal Characteristics of Non-Contact (Coherent Scanning Interferometry) Instruments". This document adds a chapter "Normative References". Please note that some contents of this document may refer to patents. The issuing agency of this document assumes no responsibility for identifying patents. This document is proposed and managed by the National Product Geometric Technical Specification Standardization Technical Committee (SAC/TC240). This document is drafted by. Tsinghua University, Tianjin University, Xiamen Metrology Testing Institute, Jiangsu Ruijing Optoelectronics Research Institute Co., Ltd., China Machine Productivity Promotion Center Co., Ltd., China Jiliang University, Beijing Times Peak Technology Co., Ltd., Zaozhuang Yougui Information Technology Co., Ltd., China Machine Research Institute of Standard Technology (Beijing) Co., Ltd. The main drafters of this document. Wei Haoyun, Guo Tong, Zheng Weifeng, Chen Gang, Kong Ming, Hao Jianguo, Zhang Zongzheng, Zhu Yue.

Introduction

With the implementation of the national product quality improvement plan, the unified norms or principles used in the process of product design, manufacturing, measurement and inspection needs are becoming more and more urgent. The surface structure representation method and related standards in the original product geometric technical specifications can no longer meet the requirements of the product manufacturing process. Surface quality control requirements in the process. GB/T 33523 "Product Geometric Specifications (GPS) Surface Structure Area Method" is based on the new generation of GPS product geometric specifications Through digital measurement technology, software analysis technology and measurement evaluation, a new set of three-dimensional surface structure measurement and analysis recommended national standards. GB/T 33523, on the basis of proposing the surface structure representation, surface structure parameters and standard operation set, analyzes The method of surface structure measurement is given, the measurement technique used and the nominal characteristics of the instrument are given. In particular, GB/T 33523 covers contact At the same time, it focuses on introducing a variety of non-contact measuring instruments that are of great value in high-precision measurement applications but lack standard support. Measuring instrument. GB/T 33523 also regulates physical measurement and software measurement standards, and provides software file standards and surface structure measurement standards. quantitative characteristics. GB/T 33523 realizes the leap from two-dimensional profile measurement to three-dimensional surface structure measurement, and is the standard system for GPS product geometry Provides metrology test support. GB/T 33523 is proposed to consist of 14 parts. --- Part 1.Representation of surface structure. The purpose is to specify the product technical documents (such as drawings, specifications, contracts and reports) Rules for representing the surface structure of a region using graphical symbols. --- Part 2.Terms, definitions and surface structure parameters. The purpose of this document is to specify the terms, definitions and parameter. --- Part 3.Specification operation set. The purpose is to provide complete rules applicable to the evaluation of surface structure (scale-limited surface) by the regional method. Fan operation set. --- Part 6.Classification of surface structure measurement methods. The purpose is to define a classification system mainly for methods of surface texture measurement, Define three types of methods, describe the relationship between the three types of methods, and give a brief description of the specific methods. --- Part 70.physical measurement standards. The purpose is to define a practice for the periodic verification and adjustment of area-based surface structure measurement instruments. properties of physical measurement standards. --- Part 71.Software measurement standards. The purpose is to specify the S1 and S2 software measurement standards for software calibration of measuring instruments. Standard (etalon) term definition. --- Part 72.XML file format x3p. The purpose is to specify XML for storing and exchanging shape and contour data File format x3p. --- Part 601.Nominal characteristics of contact (stylus) instruments. The purpose is to specify the surface structure area method contact (stylus) type instrument Nominal characteristics of the device. --- Part 602.Nominal characteristics of non-contact (confocal chromatic aberration probe) instruments. The purpose is to specify the use of axial Design and metrological characterization of a non-contact instrument for measuring surface structure with a confocal chromatic aberration probe for dispersion properties. --- Part 603.Nominal characteristics of non-contact (phase-shift interference microscopy) instruments. The purpose is to specify the phase-shift interferometry (PSI) profile and metrological properties of area surface structure measurement microscopes. --- Part 604.Nominal characteristics of non-contact (coherent scanning interference) type instruments. The purpose is to specify the surface height three-dimensional mapping Metrology characteristics of a coherent scanning interferometry (CSI) measurement system for radiation. --- Part 605.Nominal characteristics of non-contact (point AF probe) instruments. The purpose is to specify the use of point AF probes Metrological properties of non-contact instruments for measuring surface structures. --- Part 606.Nominal characteristics of non-contact (zoom) instruments. The purpose is to specify the use of variable focus (FV) sensors to measure surfaces Design and metrological characteristics of structured non-contact instruments. --- Part 701.Calibration and measurement standards for contact (stylus) instruments. The purpose is to specify the area method surface structure contact (contact The characteristics of physical measuring tools used as measurement standards for needle) instruments, the evaluation method of residual error, the inspection of calibration, acceptance and periodic verification measurement method. Product Geometry Specification (GPS) Surface Structure Region Method Part 604.Non-contact (coherent scanning interference) type Nominal characteristics of the instrument

1 Scope

This document specifies the metrological characteristics of coherent scanning interferometry (CSI) measurement systems for three-dimensional mapping of surface heights.

2 Normative references

This document has no normative references.

3 Terms and Definitions

The following terms and definitions apply to this document. 3.1 Terms and definitions related to regional surface structure measurement methods 3.1.1 area reference arealreference An integral part of an instrument that defines a reference surface for surface topography measurements. 3.1.2 Right-hand rule Cartesian coordinate system with (x, y, z) coordinate axes, where. ---(x, y) is the plane constructed by the regional reference of the instrument (Note. some optical instruments do not have actual regional guide reference); --- For optical instruments, the Z axis is along the optical axis and perpendicular to the (x, y) plane; for stylus instruments, the Z axis is located on the stylus track in the trace plane and perpendicular to the (x, y) plane (see Figure 1). Note 1.Usually, for instruments that scan in the horizontal plane, the X-axis is the scanning axis, and the Y-axis is the stepping axis. Note 2.See also "Normative Coordinate System" [GB/T 33523.2-2017, 3.1.2] and "Measurement Coordinate System" [GB/T 33523.6-2017, 3.1.1].

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