GB/T 26307: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 26307-2025 | English | RFQ |
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3 days [Need to translate]
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Siver target
| Valid |
GB/T 26307-2025
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| GB/T 26307-2010 | English | 209 |
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3 days [Need to translate]
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Silver target
| Valid |
GB/T 26307-2010
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Basic data | Standard ID | GB/T 26307-2025 (GB/T26307-2025) | | Description (Translated English) | Siver target | | Sector / Industry | National Standard (Recommended) | | Date of Implementation | 2026-03-01 | | Older Standard (superseded by this standard) | GB/T 26307-2010 | GB/T 26307-2010: Silver target---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Silver target
ICS 77.120.99
H68
National Standards of People's Republic of China
Silver target
Issued on. 2011-01-14
2011-11-01 implementation
Administration of Quality Supervision, Inspection and Quarantine of People's Republic of China
Standardization Administration of China released
Foreword
This standard by the national non-ferrous metals Standardization Technical Committee (SAC/TC243) centralized.
This standard has made Beijing Institute billion of new Materials Co., Ltd. is responsible for drafting.
The main drafters of this standard. Yan Lin, Yang Hua, Li Rui, Yang Yonggang, Lei Jifeng, Xiong Jiang Xuan.
Silver target
1 Scope
This standard specifies the requirements for silver target, test methods, inspection rules and signs, packaging, transportation, storage and quality certificate with your order (or
contract details.
This standard applies to all types of semiconductor devices with silver sputtering target (hereinafter referred to as the silver target). Target for other purposes can also refer to use.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 4135 Silver
GB/T 6394 Determination of average grain size of metal
GB/T 11067 chemical analysis of silver
GB/T 15077 precious metals and their alloys geometry measurement methods
3 Requirements
3.1 Categories
Silver target by type of chemical composition of IC-Ag99.99 one kind.
Silver target shape and size determined mainly by the base station equipment, mainly for the shape of circular, rectangular and shaped.
3.2 Chemical composition
Chemical composition of silver target IC-Ag99.99 shall comply with the provisions of GB/T 4135's. Demand side for a particular impurity elements required
By agreement between confirm.
Grain size 3.3
The average grain size transversely silver target should be 50μm ~ 150μm.
3.4 appearance quality
Silver target surface should be no dents, scratches, cracks, and other defects raised; no lubrication traces of particles and other contaminants addenda; should be clean and smooth, no
Fingerprints, no oil and rust.
3.5 Surface roughness
Silver target surface roughness Ra value should be no greater than 1.6μm.
3.6 geometry
Diameter φ 3.6.1 circular silver target mainly. 25mm, 50mm, 100mm, 150mm, 200mm, 300mm, thickness is usually
3mm ~ 35mm.
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