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GB/T 20510-2024: Indium-tin oxide target
Status: Valid GB/T 20510: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 20510-2024 | English | 289 |
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Indium-tin oxide target
| Valid |
GB/T 20510-2024
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| GB/T 20510-2017 | English | 199 |
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Indium-tin oxide target
| Valid |
GB/T 20510-2017
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| GB/T 20510-2006 | English | 359 |
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Indium-tin oxide target
| Obsolete |
GB/T 20510-2006
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PDF similar to GB/T 20510-2024
Basic data | Standard ID | GB/T 20510-2024 (GB/T20510-2024) | | Description (Translated English) | Indium-tin oxide target | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | H62 | | Classification of International Standard | 77.150.60 | | Word Count Estimation | 14,159 | | Date of Issue | 2024-09-29 | | Date of Implementation | 2025-04-01 | | Older Standard (superseded by this standard) | GB/T 20510-2017 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 20510-2024: Indium-tin oxide target---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Indium-tin oxide target
Indium Tin Oxide Target
ICS 77.150.60
CCS H 62
National Standard of the People's Republic of China
Replace GB/T 20510-2017
Released on 2024-09-29
2025-04-01 Implementation
State Administration for Market Regulation
The National Standardization Administration issued
Table of Contents
Preface ... Ⅲ
1 Scope ... 1
2 Normative references ... 1
3 Terms and Definitions ... 1
4 Categories ... 2
5 Technical requirements ... 2
5.1 Chemical composition ... 2
5.2 Physical properties ... 3
5.3 Dimensions and their deviations ... 3
5.4 Appearance Quality ... 3
5.5 Internal Quality ... 3
6 Test methods ... 3
6.1 Chemical composition ... 3
6.2 Physical properties ... 3
6.3 Dimensions and their deviations ... 4
6.4 Appearance Quality ... 4
6.5 Internal Quality ... 4
7 Inspection Rules ... 4
7.1 Inspection and Acceptance 4
7.2 Batch 4
7.3 Inspection Items ... 4
7.4 Sampling and sample preparation 5
7.5 Determination of test results 6
8 Marking, packaging, transportation, storage and accompanying documents ... 6
8.1 Logo 6
8.2 Packaging ... 6
8.3 Transportation and storage 6
8.4 Others ... 6
8.5 Accompanying Documents 6
9 Order Contents ... 7
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1.Structure and drafting rules for standardization documents"
Drafting is required.
This document replaces GB/T 20510-2017 "Indium Tin Oxide Target". Compared with GB/T 20510-2017, in addition to structural adjustments and
In addition to logical changes, the main technical changes are as follows.
The scope of application was changed from "applicable to indium tin oxide targets produced with 99.99% metallic indium and tin as raw materials" to "applicable to
Indium tin oxide target is produced by mixing In2O3 and SnO2 powder in a certain proportion and sintering by atmospheric pressure process (see
Chapter 1, Chapter 1 of the.2017 edition);
a)
The definition of “relative density” has been changed (see 3.2, 3.2 of the.2017 edition); b)
The term and definition of “Kelvin bridge” have been deleted (see 3.3 of the.2017 edition); c)
The content of relative density has been changed (see 3.2, 3.2 of the.2017 edition); d)
The classification method has been changed from classification based on relative density to classification based on shape and the ratio of indium oxide and tin oxide (see
Chapter 4, 4.1 of the.2017 edition);
e)
The requirements for main chemical composition have been changed (see 5.1.1, 4.2.1 of the.2017 edition); f)
The requirements for physical properties have been changed (see 5.2, 4.3 of the.2017 edition); g)
The content of dimension specifications and their allowable deviations has been changed (see 5.3, 4.4 of the.2017 edition); h)
The requirements for appearance quality have been changed (see 5.4, 4.5 of the.2017 edition); i)
Added internal quality requirements (see 5.5); j)
The chemical composition analysis method has been changed (see 6.1, 5.1 of the.2017 edition); k)
The test methods for relative density and resistivity have been changed (see 6.2.1 and 6.2.2, 5.2.1 and 5.2.2 of the.2017 edition); l)
The content of the inspection items has been changed (see 7.3, 6.3 of the.2017 edition). m)
Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.
This document was proposed by China Nonferrous Metals Industry Association.
This document is under the jurisdiction of the National Technical Committee on Standardization of Nonferrous Metals (SAC/TC 243).
This document was drafted by. Pioneer Electronic Technology Co., Ltd., Zhuzhou Smelting Group Co., Ltd., Guangxi Jinglian Optoelectronic Materials Co., Ltd.
Co., Ltd., Wuhu Yingri Technology Co., Ltd., Zhongshan Zhilong New Materials Technology Co., Ltd., Zhuzhou Torch Antai New Materials Co., Ltd.
Shenzhen Zhongjin Lingnan Nonferrous Metals Co., Ltd. Shaoguan Smelter, Chengdu Zhongjiancai Optoelectronic Materials Co., Ltd., Shanghai University,
Guangdong Olai High-tech Materials Co., Ltd., Hebei Hengbo New Materials Technology Co., Ltd., Guangdong Pioneer Rare Materials Co., Ltd.,
Fujian Ashi Innovative Materials Co., Ltd.
The main drafters of this document are. Zhu Shihui, Zhu Liu, Tong Peiyun, Tan Xuelian, Huang Shicheng, Zeng Dunfeng, Ge Chunqiao, Jiang Shaoying,
Zuo Hongyi, Zheng Lin, Li Xifeng, Li Peng, Li Qingfeng, Chen Wenlin, Yu Fang, Zhu Zanfang, Fu Qingbo, Huang Zuo, Wang Zhiqiang, Li Qiang,
Liu Huiming, Zeng Pingsheng, Zhang Jianhua, Wang Huihe, Luo Shenglei, Chen Qinzhong, Wang Kaikai, Zhang Ke.
This document was first published in.2006, revised for the first time in.2017, and this is the second revision.
Indium Tin Oxide Target
1 Scope
This document specifies the classification, technical requirements, test methods, inspection rules and standards of indium tin oxide targets (hereinafter referred to as ITO targets).
Labels, packaging, transportation and storage, accompanying documents and order contents.
This document is applicable to indium tin oxide targets produced by mixing In2O3 and SnO2 powders in a certain proportion and sintering them under normal pressure.
As the core material of transparent conductive film.
2 Normative references
The contents of the following documents constitute the essential clauses of this document through normative references in this document.
For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies.
in this document.
GB/T 1551 Determination of resistivity of silicon single crystals - In-line four-probe method and direct current two-probe method
GB/T 3850 Density determination method for dense sintered metal materials and cemented carbides
GB/T 6569 Test method for flexural strength of fine ceramics
GB/T 8170 Rules for rounding off values and expression and determination of limit values
GB/T 13298 Metal microstructure inspection methods
GB/T 16535 Test method for linear thermal expansion coefficient of fine ceramics - Ejector method
GB/T 38389 Chemical analysis method of indium tin oxide target
SL 499 Standard Test Method for Residual Stress Measurement by Hole Drilling Strain Method
YS/T 837 Ultrasonic testing method for sputtering target-backing plate bonding quality
3 Terms and definitions
The following terms and definitions apply to this document.
3.1
balk density
The mass of a substance per unit volume.
3.2
relative density
The ratio of the apparent density of ITO target to its theoretical density. The theoretical density of various grades of ITO target is shown in Table 1.
Table 1 Theoretical density of various brands of ITO targets
Brand
Theoretical density
g/cm3
ITO90 7.155
ITO93 7.163
ITO95 7.167
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