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GB/T 17874-2021: Electronic specialty gas - Boron trichloride
Status: Valid GB/T 17874: Evolution and historical versions
| Standard ID | Contents [version] | USD | STEP2 | [PDF] delivered in | Standard Title (Description) | Status | PDF |
| GB/T 17874-2021 | English | 209 |
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Electronic specialty gas - Boron trichloride
| Valid |
GB/T 17874-2021
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| GB/T 17874-2010 | English | 399 |
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Gases for electronic industry -- Boron trichloride
| Obsolete |
GB/T 17874-2010
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| GB/T 17874-1999 | English | 319 |
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Gases for electronic industry--Boron Trichloride
| Obsolete |
GB/T 17874-1999
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PDF similar to GB/T 17874-2021
Basic data | Standard ID | GB/T 17874-2021 (GB/T17874-2021) | | Description (Translated English) | Electronic specialty gas - Boron trichloride | | Sector / Industry | National Standard (Recommended) | | Classification of Chinese Standard | G86 | | Word Count Estimation | 11,194 | | Issuing agency(ies) | State Administration for Market Regulation, China National Standardization Administration | GB/T 17874-2021: Electronic specialty gas - Boron trichloride---This is a DRAFT version for illustration, not a final translation. Full copy of true-PDF in English version (including equations, symbols, images, flow-chart, tables, and figures etc.) will be manually/carefully translated upon your order.
Electronic specialty gas - Boron trichloride
ICS 71.100.20
CCSG86
National Standards of People's Republic of China
Replace GB/T 17874-2010
Electronic special gas boron trichloride
Released on 2021-10-11
2022-05-01 implementation
State Administration for Market Regulation
Issued by the National Standardization Management Committee
Foreword
This document is in accordance with GB/T 1.1-2020 "Guidelines for Standardization Part 1.Structure and Drafting Rules of Standardization Documents".
To be drafted.
This document replaces GB/T 17874-2010 "Gas Boron Trichloride for Electronic Industry". Compared with GB/T 21287-2007, except
In addition to structural adjustments and editorial changes, the main technical changes are as follows.
---Changed the technical requirements that boron trichloride should meet (see Chapter 4, Chapter 3 of the.2010 edition);
---Change the requirements of the inspection rules (see Chapter 5, 4.1 in the.2010 edition);
---Changed the purity calculation method (see 6.1, 4.2 of the.2010 edition);
---Changed the determination method of oxygen, argon, nitrogen, carbon monoxide, carbon dioxide and methane content (see 6.2, 4.4 and 4.5 of the.2010 edition);
---The determination method of silicon tetrachloride content has been added (see 6.2);
---The method for the determination of chlorine content has been added (see 6.3);
---Added the determination method of phosgene and hydrogen chloride content (see 6.4);
---Changed the determination method of metal elements (see 6.5, 4.7 of the.2010 edition);
---Deleted the determination of particles (2010 version 4.8);
--- Changed the logo, packaging, transportation and storage (see Chapter 7, Chapter 5 of the.2010 edition);
--- Changed the safety information (see 7.3, 5.2 of the.2010 edition).
Please note that some of the contents of this document may involve patents. The issuing agency of this document is not responsible for identifying patents.
This document was proposed and managed by the National Semiconductor Equipment and Material Standardization Technical Committee (SAC/TC203).
This document was drafted by. Dalian Free Trade Zone Kled Chemical Technology Development Co., Ltd., Zhonghao Bright Chemical Research and Design Institute Co., Ltd.,
Holly Gas (Shanghai) Co., Ltd., Taihe Gas (Jingzhou) Co., Ltd., Guangdong Huate Gas Co., Ltd., Haining Yingdesai Electronics
Co., Ltd., Fujian Jiuce Gas Co., Ltd., China Shipbuilding Industry (Handan) Perui Special Gas Co., Ltd., Jiangxi Huate Electronic Chemicals
Co., Ltd., Suzhou Jinhong Gas Co., Ltd., Qinyang Guoshun Silicon Source Photoelectric Gas Co., Ltd., Shanghai Brother Microelectronics Technology Co., Ltd.
Division, Zhejiang Research Institute of Chemical Industry Co., Ltd., Haohua Gas Co., Ltd. Southwest Branch, Hangzhou Consumer Rights Protection Committee Secretariat
(Hangzhou National E-commerce Product Quality Monitoring and Disposal Center), Shanghai Shennan Special Gas Co., Ltd., Shanghai Huaai Chromatographic Analysis Technology Co., Ltd.
Company, Dalian Date Gas Co., Ltd., Shanghai Fanwei Instrument and Equipment Co., Ltd., Lianxiong Investment (Shanghai) Co., Ltd., Shenyang Zhongfu Ke
Power Container Co., Ltd., Zhejiang Dongkai Semiconductor Technology Co., Ltd., Kunming Guangruida Special Gas Co., Ltd., Southwest Chemical Research Institute
Southwest Chemical Research and Design Institute Co., Ltd. Wuhan Branch, Southwest Chemical Research and Design Institute Co., Ltd. Shuangliu Branch.
The main drafters of this document. Shi Yini, Zhao Fang, Sun Funan, Liang Yongqiang, Liang Chengke, Yang Hui, Fu Zhuhong, Chen Yanshan, Ding Gaosong, He Jingyu,
Cao Suying, Song Fucai, Su Zijie, Liao Hengyi, Liu Jian, Shi Wanjun, Zhang Jianjun, Wang Xinxi, Sun Meng, Shi Juntao, Zhou Liyu, Ku Chunli, Zhang Qiyan,
Lu Bowen, Chen Jie, Wu Liang, Fang Hua, Xin Ling, He Bo, Huang Xiaoqiang, Huang Hui, Liu Yangtao, Gong Bing, Yi Dawen, Li Yang, Gao Jing, Li Wei, Zhao Shuide,
Yu Min, Zhou Pengyun, Shen Cuiping.
The previous releases of this document and the documents it replaced are as follows.
--- First published as GB/T 17874-1999 in.1999, first revised in.2010;
---This is the second revision.
Electronic special gas boron trichloride
1 Scope
This document specifies the technical requirements, inspection rules, test methods, signs, packaging, transportation, storage and safety information of electronic grade boron trichloride
Requirements.
This document is applicable to electronic grade boron trichloride purified from crude boron trichloride.
2 Normative references
The content of the following documents constitutes an indispensable clause of this document through normative references in the text. Among them, dated quotations
Only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to
This document
GB 190 Dangerous Goods Packaging Mark
GB/T 3723 General Rules for Sampling Safety of Industrial Chemical Products
GB/T 5099 (all parts) seamless steel gas cylinders
GB/T 7144 Gas cylinder color mark
GB/T 11736 Standard method for hygienic inspection of chlorine in the air of residential areas Methyl orange spectrophotometric method
GB/T 14193 Liquefied Gas Cylinder Filling Regulations
GB 15258 Regulations for the preparation of chemical safety labels
GB/T 16804 Gas cylinder warning label
GB/T 28726 Gas Analysis Helium Ionization Gas Chromatography
GB/T 33145 Large-volume steel seamless gas cylinder
GB/T 34972 Determination of metal content in gases for electronics industry inductively coupled plasma mass spectrometry
TSG07 Licensing Rules for Special Equipment Production and Filling Units
TSG23 Gas Cylinder Safety Technical Regulations
3 Terms and definitions
There are no terms and definitions that need to be defined in this document.
4 Technical requirements
The technical requirements of boron trichloride should meet the requirements of Table 1.
Table 1 Technical requirements
Project indicators
Boron trichloride (BCl3) purity (volume fraction)/10-2 ≥99.999 ≥99.9995 ≥99.9999
(Oxygen Argon) (O2 Ar) content (volume fraction)/10-6 < 1 < 0.5 < 0.25
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